Spatial distribution of nonemissive metastables in a two-frequency capacitively coupled plasma in Ar by using a pair of optical emission lines

Journal Article · Mon Mar 15 00:00:00 EDT 2010 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3360888· OSTI ID:21347319

Ohba, Tomihito; Makabe, Toshiaki ^[1]

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1. Department of Electronics and Electrical Engineering, Faculty of Science and Technology, Keio University, 3-14-1-Hiyoshi, Yokohama 223-8522 (Japan)

When a pair of short- and long-lived excited molecules are coupled with an upper radiative state, it will be possible to derive the number density of the long-lived species from the optical emission spectroscopy of upper-level short-lived species by careful selection of the pair. Two-dimensional density distributions of the long-lived metastable state Ar(1s{sub 5}) and that of the short-lived excited state Ar(2p{sub 2}) are observed and compared in the time-averaged form, using a computerized tomography technique of the emissions from a pair of optical transitions in a two-frequency capacitively coupled plasma in pure Ar.

• OSTI ID: 21347319
• Journal Information: Applied Physics Letters, Vol. 96, Issue 11; Other Information: DOI: 10.1063/1.3360888; (c) 2010 American Institute of Physics; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON
COMPUTERIZED TOMOGRAPHY
EMISSION SPECTROSCOPY
METASTABLE STATES
PLASMA
PLASMA DENSITY
PLASMA DIAGNOSTICS
SPATIAL DISTRIBUTION
DIAGNOSTIC TECHNIQUES
DISTRIBUTION
ELEMENTS
ENERGY LEVELS
EXCITED STATES
FLUIDS
GASES
NONMETALS
RARE GASES
SPECTROSCOPY
TOMOGRAPHY