Hard-x-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution

Journal Article · Mon Mar 10 00:00:00 EDT 2008 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2857476· OSTI ID:21120584

Chu, Y S; Yi, J M; De Carlo, F; Shen, Q; Lee, Wah-Keat ^[1]; Wu, H J; Wang, C L; Wang, J Y; Liu, C J; Wang, C H ^[2]; Wu, S R; Chien, C C ^[2]; Hwu, Y ^[2]; Tkachuk, A; Yun, W; Feser, M ^[3]; Liang, K S ^[4]; Yang, C S ^[5]; Je, J H ^[6]; Margaritondo, G ^[7]

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1. Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439 (United States)
2. Institute of Physics, Academia Sinica, Taipei 115, Taiwan (China)
3. Xradia Inc., 5052 Commercial Circle, Concord, California 94520 (United States)
4. National Synchrotron Radiation Research Center, Hsinchu 300, Taiwan (China)
5. Center for Nanomedicine, National Health Research Institutes, Miaoli 350, Taiwan (China)
6. X-ray Imaging Center, Pohang University of Science and Technology, Pohang 790-784 (Korea, Republic of)
7. Ecole Polytechnique Federale de Lausanne (EPFL), CH-1015 Lausanne (Switzerland)

Substantial improvements in the nanofabrication and characteristics of gold Fresnel zone plates yielded unprecedented resolution levels in hard-x-ray microscopy. Tests performed on a variety of specimens with 8-10 keV photons demonstrated a first-order lateral resolution below 40 nm based on the Rayleigh criterion. Combined with the use of a phase contrast technique, this makes it possible to view features in the 30 nm range; good-quality images can be obtained at video rate, down to 50 ms/frame. The important repercussions on materials science, nanotechnology, and the life sciences are discussed.

• OSTI ID: 21120584
• Journal Information: Applied Physics Letters, Vol. 92, Issue 10; Other Information: DOI: 10.1063/1.2857476; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
DIFFRACTION
FABRICATION
FRESNEL LENS
GOLD
HARD X RADIATION
KEV RANGE 01-10
MICROSCOPY
NANOSTRUCTURES
PHOTONS
PLATES
RAYLEIGH SCATTERING
RESOLUTION