Hard x-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution.

Journal Article · Mon Mar 10 00:00:00 EDT 2008 · Appl. Phys. Lett.

DOI:https://doi.org/10.1063/1.2857476· OSTI ID:927999

Chu, Y S; De Carlo, F; Shen, Q; Lee, W K; Wu, H J; Wang, C L; Wang, J Y; Liu, C J; Wang, C H; Wu, S R; Chien, C C; Hwu, Y; Tkachuk, A; Yun, W; Feser, M; Liang, K S; Yang, C S; Je, J H; Margaritondo, G; Sinica, Academia

Substantial improvements in the nanofabrication and characteristics of gold Fresnel zone plates yielded unprecedented resolution levels in hard-x-ray microscopy. Tests performed on a variety of specimens with 8-10 keV photons demonstrated a first-order lateral resolution below 40 nm based on the Rayleigh criterion. Combined with the use of a phase contrast technique, this makes it possible to view features in the 30 nm range; good-quality images can be obtained at video rate, down to 50 ms/frame. The important repercussions on materials science, nanotechnology, and the life sciences are discussed.

• Research Organization: Argonne National Lab. (ANL), Argonne, IL (United States)
• Sponsoring Organization: USDOE Office of Science (SC); National Science and Technology Program for Nanosciences and Nanotechnology; Thematic Research Project of Academia Sinica; National Synchrotron Radiation Research Center (Taiwan); Creative Research Initiatives of MOST/KOSEF; Leenards and Jeantet Foundations; EPFL; Swiss Fonde National de la Recherche Scientifique
• DOE Contract Number: DE-AC02-06CH11357
• OSTI ID: 927999
• Report Number(s): ANL/XSD/JA-61165; APPLAB; TRN: US0804687
• Journal Information: Appl. Phys. Lett., Vol. 92, Issue Mar. 10, 2008; ISSN 0003-6951
• Country of Publication: United States
• Language: ENGLISH

Related Subjects

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS
GOLD
MICROSCOPY
PHOTONS
PLATES
RESOLUTION