Microring resonators fabricated by electron beam bleaching of chromophore doped polymers

Journal Article · Mon May 12 00:00:00 EDT 2008 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2926680· OSTI ID:21102054

Haishan, Sun ^[1]; Antao, Chen ^[1]; Olbricht, Benjamin C; Davies, Joshua A; Sullivan, Philip A ^[2]; Yi, Liao ^[3]; Dalton, Larry R ^[1]

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1. Department of Electrical Engineering, University of Washington, Seattle, Washington 98195 (United States)
2. Department of Chemistry, University of Washington, Seattle, Washington 98195 (United States)
3. Department of Chemistry, University of Central Florida, Orlando, Florida 32816 (United States)

Decomposition of chromophore molecules under direct electron beam irradiation reduces the refractive index of chromophore containing polymers. The induced refractive index contrast between the exposed and unexposed regions is high enough for waveguide bends of small radius and thus microring resonator devices. This electron beam bleaching of chromophore-containing polymers provides a fabrication approach for nonlinear polymer optical waveguide devices. Fabrication of high quality microring resonators with critical feature size on the order of 100 nm was demonstrated with this technique in an electro-optic polymer that contains YL124 chromophores.

• OSTI ID: 21102054
• Journal Information: Applied Physics Letters, Vol. 92, Issue 19; Other Information: DOI: 10.1063/1.2926680; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BLEACHING
DECOMPOSITION
DOPED MATERIALS
ELECTRO-OPTICAL EFFECTS
ELECTRON BEAMS
FABRICATION
IRRADIATION
NONLINEAR OPTICS
NONLINEAR PROBLEMS
POLYMERS
REFRACTIVE INDEX
RESONATORS
WAVEGUIDES