Depth Profile Analysis of New Materials in Hollow Cathode Discharge

Journal Article · Wed Dec 01 00:00:00 EST 2004 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.1843521· OSTI ID:20630453

Djulgerova, R; Mihailov, V; Gencheva, V; Popova, L; Panchev, B ^[1]; Michaylova, V ^[2]; Szytula, A; Gondek, L; Dohnalik, T M ^[3]; Petrovic, Z Lj ^[4]

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1. Institute of Solid State Physics - Bulgarian Academy of Sciences, 1784 Sofia (Bulgaria)
2. Technical University of Sofia, 1797 Sofia (Bulgaria)
3. Smoluchowski Institute of Physics - Jagellonian University, 30-059 Cracow (Poland)
4. Institute of Physics, 11080 Zemun, Belgrade (Serbia and Montenegro)

In this review the possibility of hollow cathode discharge for depth profile analysis is demonstrated for several new materials: planar optical waveguides fabricated by Ag+-Na+ ion exchange process in glasses, SnO2 thin films for gas sensors modified by hexamethildisilazane after rapid thermal annealing, W- and WC- CVD layers deposited on Co-metalloceramics and WO3- CVD thin films deposited on glass. The results are compared with different standard techniques.

• OSTI ID: 20630453
• Journal Information: AIP Conference Proceedings, Vol. 740, Issue 1; Conference: 22. summer school and international symposium on the physics of ionized gases, Bajina Basta (Serbia and Montenegro), 23-27 Aug 2004; Other Information: DOI: 10.1063/1.1843521; (c) 2004 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
36 MATERIALS SCIENCE
ANNEALING
CERAMICS
CHEMICAL VAPOR DEPOSITION
DEPTH
GLASS
GLOW DISCHARGES
GOLD IONS
HOLLOW CATHODES
ION BEAMS
ION EXCHANGE
LAYERS
PLASMA
SILVER
SILVER IONS
SODIUM
THIN FILMS
TUNGSTEN CARBIDES
WAVEGUIDES