Laser processing of solar cells with anti-reflective coating
Patent
·
OSTI ID:1240400
Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thicknesses.
- Research Organization:
- SunPower Corporation, San Jose, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- FC36-07GO17043
- Assignee:
- SunPower Corporation (San Jose, CA)
- Patent Number(s):
- 9,263,602
- Application Number:
- 14/061,584
- OSTI ID:
- 1240400
- Resource Relation:
- Patent File Date: 2013 Oct 23
- Country of Publication:
- United States
- Language:
- English
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