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Title: Laser processing of solar cells with anti-reflective coating

Patent ·
OSTI ID:1240400
; ; ; ; ;

Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thicknesses.

Research Organization:
SunPower Corporation, San Jose, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FC36-07GO17043
Assignee:
SunPower Corporation (San Jose, CA)
Patent Number(s):
9,263,602
Application Number:
14/061,584
OSTI ID:
1240400
Resource Relation:
Patent File Date: 2013 Oct 23
Country of Publication:
United States
Language:
English

References (13)

Decoupling charge carrier collection and metallization geometry of back-contacted back-junction silicon solar cells by using insulating thin films conference June 2010
Laser ablation and contact formation for Cu-plated large area C-silicon industrial solar cells conference June 2010
Solar cells and methods for manufacture thereof patent March 1982
Method of fabricating back surface point contact solar cells patent May 1990
Electroluminescent laminate with thick film dielectric patent July 1995
Semiconductor interconnection device with both n- and p-doped regions patent October 1998
Process and fabrication methods for emitter wrap through back contact solar cells patent-application March 2006
Preventing harmful polarization of solar cells patent-application September 2006
Array of small contacts for solar cell fabrication patent-application December 2008
Anti-Reflective Coating With High Optical Absorption Layer For Backside Contact Solar Cells patent-application June 2009
Methods for forming mutiple-layer electrode structures for silicon photovoltaic cells patent-application September 2009
Trench Process And Structure For Backside Contact Solar Cells With Polysilicon Doped Regions patent-application December 2009
Ablation Of Film Stacks In Solar Cell Fabrication Processes patent-application December 2011

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14 SOLAR ENERGY
36 MATERIALS SCIENCE