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Title: Mid-infrared materials and devices on a Si platform for optical sensing

Abstract

In this article, we review our recent work on mid-infrared (mid-IR) photonic materials and devices fabricated on silicon for on-chip sensing applications. Pedestal waveguides based on silicon are demonstrated as broadband mid-IR sensors. Our low-loss mid-IR directional couplers demonstrated in SiNx waveguides are useful in differential sensing applications. Photonic crystal cavities and microdisk resonators based on chalcogenide glasses for high sensitivity are also demonstrated as effective mid-IR sensors. Polymer-based functionalization layers, to enhance the sensitivity and selectivity of our sensor devices, are also presented. We discuss the design of mid-IR chalcogenide waveguides integrated with polycrystalline PbTe detectors on a monolithic silicon platform for optical sensing, wherein the use of a low-index spacer layer enables the evanescent coupling of mid-IR light from the waveguides to the detector. Finally, we show the successful fabrication processing of our first prototype mid-IR waveguide-integrated detectors.

Authors:
 [1];  [1];  [1];  [2];  [2];  [2];  [2];  [2];  [2];  [3];  [3];  [3];  [3];  [3];  [3];  [3];  [3];  [3];  [4];  [1] more »;  [1] « less
+ Show Author Affiliations
  1. Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States). Microphotonics Center
  2. Univ. of Delaware, Newark, DE (United States). Dept. of Materials Science and Engineering
  3. Clemson Univ., SC (United States). Dept. of Materials Science and Engineering
  4. Clemson Univ., SC (United States). Dept. of Materials Science and Engineering; Univ. of Central Florida, Orlando, FL (United States)
Publication Date:
Research Org.:
Oklahoma National Guard, Oklahoma City, OK (United States); Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division; USDOE National Nuclear Security Administration (NNSA); Defense Threat Reduction Agency (DTRA); National Science Foundation (NSF)
OSTI Identifier:
1625218
Grant/Contract Number:  
NA0002421; HDTRA1-10-1-0101; HDTRA1-13-1-0001; 1200406; EPS-0814251
Resource Type:
Accepted Manuscript
Journal Name:
Science and Technology of Advanced Materials
Additional Journal Information:
Journal Volume: 15; Journal Issue: 1; Journal ID: ISSN 1468-6996
Publisher:
IOP Publishing
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; Materials Science; mid-infrared; lab-on-a-chip; resonators; waveguides; photonic crystals; chalcogenides; photodetectors; polymer enrichment layers

Citation Formats

Singh, Vivek, Lin, Pao Tai, Patel, Neil, Lin, Hongtao, Li, Lan, Zou, Yi, Deng, Fei, Ni, Chaoying, Hu, Juejun, Giammarco, James, Soliani, Anna Paola, Zdyrko, Bogdan, Luzinov, Igor, Novak, Spencer, Novak, Jackie, Wachtel, Peter, Danto, Sylvain, Musgraves, J. David, Richardson, Kathleen, Kimerling, Lionel C., and Agarwal, Anuradha M. Mid-infrared materials and devices on a Si platform for optical sensing. United States: N. p., 2014. Web. doi:10.1088/1468-6996/15/1/014603.
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Singh, Vivek, Lin, Pao Tai, Patel, Neil, Lin, Hongtao, Li, Lan, Zou, Yi, Deng, Fei, Ni, Chaoying, Hu, Juejun, Giammarco, James, Soliani, Anna Paola, Zdyrko, Bogdan, Luzinov, Igor, Novak, Spencer, Novak, Jackie, Wachtel, Peter, Danto, Sylvain, Musgraves, J. David, Richardson, Kathleen, Kimerling, Lionel C., & Agarwal, Anuradha M. Mid-infrared materials and devices on a Si platform for optical sensing. United States. https://doi.org/10.1088/1468-6996/15/1/014603
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Singh, Vivek, Lin, Pao Tai, Patel, Neil, Lin, Hongtao, Li, Lan, Zou, Yi, Deng, Fei, Ni, Chaoying, Hu, Juejun, Giammarco, James, Soliani, Anna Paola, Zdyrko, Bogdan, Luzinov, Igor, Novak, Spencer, Novak, Jackie, Wachtel, Peter, Danto, Sylvain, Musgraves, J. David, Richardson, Kathleen, Kimerling, Lionel C., and Agarwal, Anuradha M. Thu . "Mid-infrared materials and devices on a Si platform for optical sensing". United States. https://doi.org/10.1088/1468-6996/15/1/014603. https://www.osti.gov/servlets/purl/1625218.
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@article{osti_1625218,
title = {Mid-infrared materials and devices on a Si platform for optical sensing},
author = {Singh, Vivek and Lin, Pao Tai and Patel, Neil and Lin, Hongtao and Li, Lan and Zou, Yi and Deng, Fei and Ni, Chaoying and Hu, Juejun and Giammarco, James and Soliani, Anna Paola and Zdyrko, Bogdan and Luzinov, Igor and Novak, Spencer and Novak, Jackie and Wachtel, Peter and Danto, Sylvain and Musgraves, J. David and Richardson, Kathleen and Kimerling, Lionel C. and Agarwal, Anuradha M.},
abstractNote = {In this article, we review our recent work on mid-infrared (mid-IR) photonic materials and devices fabricated on silicon for on-chip sensing applications. Pedestal waveguides based on silicon are demonstrated as broadband mid-IR sensors. Our low-loss mid-IR directional couplers demonstrated in SiNx waveguides are useful in differential sensing applications. Photonic crystal cavities and microdisk resonators based on chalcogenide glasses for high sensitivity are also demonstrated as effective mid-IR sensors. Polymer-based functionalization layers, to enhance the sensitivity and selectivity of our sensor devices, are also presented. We discuss the design of mid-IR chalcogenide waveguides integrated with polycrystalline PbTe detectors on a monolithic silicon platform for optical sensing, wherein the use of a low-index spacer layer enables the evanescent coupling of mid-IR light from the waveguides to the detector. Finally, we show the successful fabrication processing of our first prototype mid-IR waveguide-integrated detectors.},
doi = {10.1088/1468-6996/15/1/014603},
journal = {Science and Technology of Advanced Materials},
number = 1,
volume = 15,
place = {United States},
year = {Thu Jan 30 00:00:00 EST 2014},
month = {Thu Jan 30 00:00:00 EST 2014}
}
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    • Wang, Ruijun; Vasiliev, Anton; Muneeb, Muhammad
    • Sensors, Vol. 17, Issue 8
    • DOI: 10.3390/s17081788

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