Wide bandwidth and high resolution planar filter array based on DBR-metasurface-DBR structures
Abstract
Here, we propose and experimentally demonstrate a planar array of optical bandpass filters composed of low loss dielectric metasurface layers sandwiched between two distributed Bragg reflectors (DBRs). The two DBRs form a Fabry-Perot resonator whose center wavelength is controlled by the design of the transmissive metasurface layer which functions as a phase shifting element. We demonstrate an array of bandpass filters with spatially varying center wavelengths covering a wide range of operation wavelengths of 250nm around λ = 1550nm (Δλ/λ = 16%). The center wavelengths of each filter are independently controlled only by changing the in-plane geometry of the sandwiched metasurfaces, and the experimentally measured quality factors are larger than 700. The demonstrated filter array can be directly integrated on top of photodetector arrays to realize on-chip high-resolution spectrometers with free-space coupling.
- Authors:
-
- California Inst. of Technology, Pasadena, CA (United States). T. J. Watson Laboratory of Applied Physics
- Publication Date:
- Research Org.:
- California Institute of Technology (CalTech), Pasadena, CA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1287395
- Grant/Contract Number:
- SC0001293
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Optics Express
- Additional Journal Information:
- Journal Volume: 24; Journal Issue: 11; Journal ID: ISSN 1094-4087
- Publisher:
- Optical Society of America (OSA)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; optical filter; microspectrometer; chip; metamaterials; spectrometer; silicon
Citation Formats
Horie, Yu, Arbabi, Amir, Arbabi, Ehsan, Kamali, Seyedeh Mahsa, and Faraon, Andrei. Wide bandwidth and high resolution planar filter array based on DBR-metasurface-DBR structures. United States: N. p., 2016.
Web. doi:10.1364/OE.24.011677.
Horie, Yu, Arbabi, Amir, Arbabi, Ehsan, Kamali, Seyedeh Mahsa, & Faraon, Andrei. Wide bandwidth and high resolution planar filter array based on DBR-metasurface-DBR structures. United States. https://doi.org/10.1364/OE.24.011677
Horie, Yu, Arbabi, Amir, Arbabi, Ehsan, Kamali, Seyedeh Mahsa, and Faraon, Andrei. Thu .
"Wide bandwidth and high resolution planar filter array based on DBR-metasurface-DBR structures". United States. https://doi.org/10.1364/OE.24.011677. https://www.osti.gov/servlets/purl/1287395.
@article{osti_1287395,
title = {Wide bandwidth and high resolution planar filter array based on DBR-metasurface-DBR structures},
author = {Horie, Yu and Arbabi, Amir and Arbabi, Ehsan and Kamali, Seyedeh Mahsa and Faraon, Andrei},
abstractNote = {Here, we propose and experimentally demonstrate a planar array of optical bandpass filters composed of low loss dielectric metasurface layers sandwiched between two distributed Bragg reflectors (DBRs). The two DBRs form a Fabry-Perot resonator whose center wavelength is controlled by the design of the transmissive metasurface layer which functions as a phase shifting element. We demonstrate an array of bandpass filters with spatially varying center wavelengths covering a wide range of operation wavelengths of 250nm around λ = 1550nm (Δλ/λ = 16%). The center wavelengths of each filter are independently controlled only by changing the in-plane geometry of the sandwiched metasurfaces, and the experimentally measured quality factors are larger than 700. The demonstrated filter array can be directly integrated on top of photodetector arrays to realize on-chip high-resolution spectrometers with free-space coupling.},
doi = {10.1364/OE.24.011677},
journal = {Optics Express},
number = 11,
volume = 24,
place = {United States},
year = {Thu May 19 00:00:00 EDT 2016},
month = {Thu May 19 00:00:00 EDT 2016}
}
Web of Science
Works referenced in this record:
A lab-on-a-chip for spectrophotometric analysis of biological fluids
journal, January 2005
- Minas, G.; Wolffenbuttel, R. F.; Correia, J. H.
- Lab on a Chip, Vol. 5, Issue 11
Silicon nanophotonic devices for integrated sensing
journal, January 2009
- Momeni, Babak; Yegnanarayanan, Siva; Soltani, Mohammad
- Journal of Nanophotonics, Vol. 3, Issue 1, Article No. 031001
Miniature spectroscopic instrumentation: Applications to biology and chemistry
journal, January 2004
- Bacon, Christina P.; Mattley, Yvette; DeFrece, Ronald
- Review of Scientific Instruments, Vol. 75, Issue 1
MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range
journal, June 2005
- Wolffenbuttel, R. F.
- Journal of Micromechanics and Microengineering, Vol. 15, Issue 7
High resolution on-chip spectroscopy based on miniaturized microdonut resonators
journal, January 2011
- Xia, Zhixuan; Eftekhar, Ali Asghar; Soltani, Mohammad
- Optics Express, Vol. 19, Issue 13, p. 12356-12364
Sub-nm resolution cavity enhanced microspectrometer
journal, December 2009
- Kyotoku, Bernardo B. C.; Chen, Long; Lipson, Michal
- Optics Express, Vol. 18, Issue 1, p. 102-107
A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides
journal, January 2007
- Cheben, P.; Schmid, J. H.; Delâge, A.
- Optics Express, Vol. 15, Issue 5
Concept of a high-resolution miniature spectrometer using an integrated filter array
journal, January 2007
- Wang, Shao-Wei; Xia, Changsheng; Chen, Xiaoshuang
- Optics Letters, Vol. 32, Issue 6, p. 632-634
High-selectivity single-chip spectrometer in silicon for operation in visible part of the spectrum
journal, March 2000
- Correia, J. H.; Bartek, M.; Wolffenbuttel, R. F.
- IEEE Transactions on Electron Devices, Vol. 47, Issue 3
Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter
journal, December 2011
- Emadi, Arvin; Wu, Huaiwen; de Graaf, Ger
- Optics Express, Vol. 20, Issue 1
Fabrication of CMOS-compatible optical filter arrays using gray-scale lithography
journal, January 2012
- Xiao, Jing; Song, Fuchuan; Han, Kijeong
- Journal of Micromechanics and Microengineering, Vol. 22, Issue 2, Article No. 025006
Flat optics with designer metasurfaces
journal, February 2014
- Yu, Nanfang; Capasso, Federico
- Nature Materials, Vol. 13, Issue 2, p. 139-150
All-dielectric metamaterials
journal, January 2016
- Jahani, Saman; Jacob, Zubin
- Nature Nanotechnology, Vol. 11, Issue 1
Planar Photonics with Metasurfaces
journal, March 2013
- Kildishev, A. V.; Boltasseva, A.; Shalaev, V. M.
- Science, Vol. 339, Issue 6125, p. 1232009-1232009
Sub-Wavelength Grating Lenses With a Twist
journal, July 2014
- Vo, Sonny; Fattal, David; Sorin, Wayne V.
- IEEE Photonics Technology Letters, Vol. 26, Issue 13, p. 1375-1378
Dielectric gradient metasurface optical elements
journal, July 2014
- Lin, D.; Fan, P.; Hasman, E.
- Science, Vol. 345, Issue 6194, p. 298-302
Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays
journal, May 2015
- Arbabi, Amir; Horie, Yu; Ball, Alexander J.
- Nature Communications, Vol. 6, Article No. 7069
Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission
journal, August 2015
- Arbabi, Amir; Horie, Yu; Bagheri, Mahmood
- Nature Nanotechnology, Vol. 10, Issue 11, p. 937-943
How to deal with the loss in plasmonics and metamaterials
journal, January 2015
- Khurgin, Jacob B.
- Nature Nanotechnology, Vol. 10, Issue 1
Narrowband multispectral filter set for visible band
journal, January 2012
- Walls, K.; Chen, Q.; Grant, J.
- Optics Express, Vol. 20, Issue 20
Two-dimensional array of optical interference filters produced by lithographic alterations of the index of refraction
conference, September 1995
- Kaushik, Sumanth; Stallard, Brian R.
- SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, SPIE Proceedings
S4 : A free electromagnetic solver for layered periodic structures
journal, October 2012
- Liu, Victor; Fan, Shanhui
- Computer Physics Communications, Vol. 183, Issue 10, p. 2233-2244
High resolution on-chip optical filter array based on double subwavelength grating reflectors
journal, January 2015
- Horie, Yu; Arbabi, Amir; Han, Seunghoon
- Optics Express, Vol. 23, Issue 23, p. 29848-29854
Works referencing / citing this record:
Metasurface for Constructing a Stable High‐ Q Plano‐Planar Open Cavity
journal, December 2018
- Fu, Jichao; Jin, Yi; He, Sailing
- Advanced Optical Materials, Vol. 7, Issue 5
MEMS-tunable dielectric metasurface lens
journal, February 2018
- Arbabi, Ehsan; Arbabi, Amir; Kamali, Seyedeh Mahsa
- Nature Communications, Vol. 9, Issue 1
Compact folded metasurface spectrometer
journal, October 2018
- Faraji-Dana, MohammadSadegh; Arbabi, Ehsan; Arbabi, Amir
- Nature Communications, Vol. 9, Issue 1
Metasurface-generated complex 3-dimensional optical fields for interference lithography
journal, October 2019
- Kamali, Seyedeh Mahsa; Arbabi, Ehsan; Kwon, Hyounghan
- Proceedings of the National Academy of Sciences, Vol. 116, Issue 43
Multichannel tunable narrowband mid-infrared optical filter based on phase-change material Ge 2 Sb 2 Te 5 defect layers
journal, January 2020
- Zhou, Kun; Cheng, Qiang; Lu, Lu
- Applied Optics, Vol. 59, Issue 3
Gate-tunable optical filter based on conducting oxide metasurface heterostructure
journal, January 2019
- Zhang, Jinqiannan; Yang, Jingyi; Schell, Michael
- Optics Letters, Vol. 44, Issue 15
A review of dielectric optical metasurfaces for wavefront control
journal, June 2018
- Kamali, Seyedeh Mahsa; Arbabi, Ehsan; Arbabi, Amir
- Nanophotonics, Vol. 7, Issue 6
Metalens-Based Miniaturized Optical Systems
journal, May 2019
- Li, Bo; Piyawattanametha, Wibool; Qiu, Zhen
- Micromachines, Vol. 10, Issue 5
MEMS-tunable dielectric metasurface lens
conference, January 2018
- Arbabi, Ehsan; Arbabi, Amir; Kamali, Seyedeh Mahsa
- CLEO: Science and Innovations, Conference on Lasers and Electro-Optics