Crystal structure of laser-induced subsurface modifications in Si
Abstract
Laser-induced subsurface modification of dielectric materials is a well-known technology. Applications include the production of optical components and selective etching. In addition to dielectric materials, the subsurface modification technology can be applied to silicon, by employing near to mid-infrared radiation. An application of subsurface modifications in silicon is laser-induced subsurface separation, which is a method to separate wafers into individual dies. Other applications for which proofs of concept exist are the formation of waveguides and resistivity tuning. However, limited knowledge is available about the crystal structure of subsurface modifications in silicon. In this paper, we investigate the geometry and crystal structure of laser-induced subsurface modifications in monocrystalline silicon wafers. Finally, in addition to the generation of lattice defects, we found that transformations to amorphous silicon and Si-iii/Si-xii occur as a result of the laser irradiation.
- Authors:
-
- Univ. of Twente, Enschede (Netherlands). Faculty of Engineering Technology. Chair of Applied Laser Technology
- Australian National Univ., Canberra, ACT (Australia). Research School of Physics and Engineering
- Australian National Univ., Canberra, ACT (Australia). Research School of Physics and Engineering; Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Chemical and Engineering Materials Division
- Publication Date:
- Research Org.:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE
- Contributing Org.:
- Univ. of Twente, Enschede (Netherlands); Australian National Univ., Canberra, ACT (Australia)
- OSTI Identifier:
- 1265519
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Applied Physics. A, Materials Science and Processing
- Additional Journal Information:
- Journal Volume: 120; Journal Issue: 2; Journal ID: ISSN 0947-8396
- Publisher:
- Springer
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 38 RADIATION CHEMISTRY, RADIOCHEMISTRY, AND NUCLEAR CHEMISTRY
Citation Formats
Verburg, P. C., Smillie, L. A., Römer, G. R. B. E., Haberl, B., Bradby, J. E., Williams, J. S., and Huis in ’t Veld, A. J. Crystal structure of laser-induced subsurface modifications in Si. United States: N. p., 2015.
Web. doi:10.1007/s00339-015-9238-5.
Verburg, P. C., Smillie, L. A., Römer, G. R. B. E., Haberl, B., Bradby, J. E., Williams, J. S., & Huis in ’t Veld, A. J. Crystal structure of laser-induced subsurface modifications in Si. United States. https://doi.org/10.1007/s00339-015-9238-5
Verburg, P. C., Smillie, L. A., Römer, G. R. B. E., Haberl, B., Bradby, J. E., Williams, J. S., and Huis in ’t Veld, A. J. Thu .
"Crystal structure of laser-induced subsurface modifications in Si". United States. https://doi.org/10.1007/s00339-015-9238-5. https://www.osti.gov/servlets/purl/1265519.
@article{osti_1265519,
title = {Crystal structure of laser-induced subsurface modifications in Si},
author = {Verburg, P. C. and Smillie, L. A. and Römer, G. R. B. E. and Haberl, B. and Bradby, J. E. and Williams, J. S. and Huis in ’t Veld, A. J.},
abstractNote = {Laser-induced subsurface modification of dielectric materials is a well-known technology. Applications include the production of optical components and selective etching. In addition to dielectric materials, the subsurface modification technology can be applied to silicon, by employing near to mid-infrared radiation. An application of subsurface modifications in silicon is laser-induced subsurface separation, which is a method to separate wafers into individual dies. Other applications for which proofs of concept exist are the formation of waveguides and resistivity tuning. However, limited knowledge is available about the crystal structure of subsurface modifications in silicon. In this paper, we investigate the geometry and crystal structure of laser-induced subsurface modifications in monocrystalline silicon wafers. Finally, in addition to the generation of lattice defects, we found that transformations to amorphous silicon and Si-iii/Si-xii occur as a result of the laser irradiation.},
doi = {10.1007/s00339-015-9238-5},
journal = {Applied Physics. A, Materials Science and Processing},
number = 2,
volume = 120,
place = {United States},
year = {Thu Jun 04 00:00:00 EDT 2015},
month = {Thu Jun 04 00:00:00 EDT 2015}
}
Web of Science
Works referenced in this record:
Femtosecond laser micromachining in transparent materials
journal, April 2008
- Gattass, Rafael R.; Mazur, Eric
- Nature Photonics, Vol. 2, Issue 4
Confined micro-explosion induced by ultrashort laser pulse at SiO2/Si interface
journal, November 2013
- Rapp, Ludovic; Haberl, Bianca; Bradby, Jodie E.
- Applied Physics A, Vol. 114, Issue 1
Direct-write UV-laser microfabrication of 3D structures in lithium-aluminosilicate glass
conference, May 1997
- Hansen, William W.; Janson, Siegfried W.; Helvajian, Henry
- Photonics West '97, SPIE Proceedings
Modification and Machining on Back Surface of a Silicon Substrate by Femtosecond Laser Pulses at 1552 nm
journal, June 2014
- Ito, Yoshiro
- Journal of Laser Micro/Nanoengineering, Vol. 9, Issue 2
Inscription of optical waveguides in crystalline silicon by mid-infrared femtosecond laser pulses
journal, January 2005
- Nejadmalayeri, Amir H.; Herman, Peter R.; Burghoff, Jonas
- Optics Letters, Vol. 30, Issue 9
Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser
journal, January 2003
- Cheng, Ya; Sugioka, Koji; Midorikawa, Katsumi
- Optics Letters, Vol. 28, Issue 13
Delocalization of femtosecond radiation in silicon
journal, January 2012
- Kononenko, Vitali V.; Konov, Vitali V.; Dianov, Evgeny M.
- Optics Letters, Vol. 37, Issue 16
Three-dimensional optical storage inside transparent materials
journal, January 1996
- Glezer, E. N.; Milosavljevic, M.; Huang, L.
- Optics Letters, Vol. 21, Issue 24
A Laser-Trimmed Rail-to-Rail Precision CMOS Operational Amplifier
journal, February 2011
- Singh, Rahul; Audet, Yves; Gagnon, Yves
- IEEE Transactions on Circuits and Systems II: Express Briefs, Vol. 58, Issue 2
Arbitrary-lattice photonic crystals created by multiphoton microfabrication
journal, January 2001
- Sun, Hong-Bo; Xu, Ying; Juodkazis, Saulius
- Optics Letters, Vol. 26, Issue 6
Fabrication of 3D microoptical lenses in photosensitive glass using femtosecond laser micromachining
journal, August 2006
- Cheng, Y.; Tsai, H. L.; Sugioka, K.
- Applied Physics A, Vol. 85, Issue 1
3D microfluidic chips with integrated functional microelements fabricated by a femtosecond laser for studying the gliding mechanism of cyanobacteria
journal, January 2011
- Hanada, Yasutaka; Sugioka, Koji; Shihira-Ishikawa, Ikuko
- Lab on a Chip, Vol. 11, Issue 12
Photoinduced multiple microchannels inside silicon produced by a femtosecond laser
journal, September 2009
- Li, C.; Shi, X.; Si, J.
- Applied Physics B, Vol. 98, Issue 2-3
Optical absorption coefficient of silicon at 1.152 μ at elevated temperatures
journal, October 1982
- Jellison, G. E.; Lowndes, D. H.
- Applied Physics Letters, Vol. 41, Issue 7
Molecular-Dynamics Study of Void-Formation inside Silicon Wafers in Stealth Dicing
journal, December 2012
- Shimamura, K.; Okuma, J.; Ohmura, S.
- Journal of Physics: Conference Series, Vol. 402
Laser microfabrication and rotation of ship-in-a-bottle optical rotators
journal, August 2008
- Matsuo, Shigeki; Kiyama, Satoshi; Shichijo, Yoshinori
- Applied Physics Letters, Vol. 93, Issue 5
Photowritten optical waveguides in various glasses with ultrashort pulse laser
journal, December 1997
- Miura, K.; Qiu, Jianrong; Inouye, H.
- Applied Physics Letters, Vol. 71, Issue 23
Overcoming the brittleness of glass through bio-inspiration and micro-architecture
journal, January 2014
- Mirkhalaf, M.; Dastjerdi, A. Khayer; Barthelat, F.
- Nature Communications, Vol. 5, Issue 1
Formation and growth of nanoindentation-induced high pressure phases in crystalline and amorphous silicon
journal, September 2007
- Ruffell, S.; Bradby, J. E.; Williams, J. S.
- Journal of Applied Physics, Vol. 102, Issue 6
The origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation
journal, October 2012
- Smith, Matthew J.; Sher, Meng-Ju; Franta, Benjamin
- Journal of Applied Physics, Vol. 112, Issue 8
Kinetic Origin of Divergent Decompression Pathways in Silicon and Germanium
journal, April 2013
- Wang, Jian-Tao; Chen, Changfeng; Mizuseki, Hiroshi
- Physical Review Letters, Vol. 110, Issue 16
Two-photon–induced internal modification of silicon by erbium-doped fiber laser
journal, January 2014
- Verburg, P. C.; Römer, G. R. B. E.; Huis in ’t Veld, A. J.
- Optics Express, Vol. 22, Issue 18
Multiphoton absorption of 1.3 μm wavelength femtosecond laser pulses focused inside Si and SiO 2
conference, March 2013
- Leyder, S.; Grojo, D.; Delaporte, P.
- Seventeenth International School on Quantum Electronics: Laser Physics and Applications, SPIE Proceedings
Orientation dependence of high speed silicon crystal growth from the melt
journal, September 1984
- Cullis, A. G.; Chew, N. G.; Webber, H. C.
- Journal of Crystal Growth, Vol. 68, Issue 2
Direct fabrication of freely movable microplate inside photosensitive glass by femtosecond laser for lab-on-chip application
journal, April 2004
- Masuda, M.; Sugioka, K.; Cheng, Y.
- Applied Physics A, Vol. 78, Issue 7
Laser-matter interaction in the bulk of a transparent solid: Confined microexplosion and void formation
journal, June 2006
- Gamaly, Eugene G.; Juodkazis, Saulius; Nishimura, Koichi
- Physical Review B, Vol. 73, Issue 21
Ultrafast-laser driven micro-explosions in transparent materials
journal, August 1997
- Glezer, E. N.; Mazur, E.
- Applied Physics Letters, Vol. 71, Issue 7
Two-temperature model for pulsed-laser-induced subsurface modifications in Si
journal, March 2013
- Verburg, P. C.; Römer, G. R. B. E.; Huis in ’t Veld, A. J.
- Applied Physics A, Vol. 114, Issue 4
Development of refractory ohmic contact materials for gallium arsenide compound semiconductors
journal, January 2002
- Murakami, Masanori
- Science and Technology of Advanced Materials, Vol. 3, Issue 1
Temperature–pressure phase diagram of silicon determined by Clapeyron equation
journal, February 2004
- Yang, C. C.; Li, J. C.; Jiang, Q.
- Solid State Communications, Vol. 129, Issue 7
Photoinduced microchannels inside silicon by femtosecond pulses
journal, August 2008
- Chen, Tao; Si, Jinhai; Hou, Xun
- Applied Physics Letters, Vol. 93, Issue 5
Selective metallization of internal walls of hollow structures inside glass using femtosecond laser
journal, April 2005
- Sugioka, Koji; Hongo, Tomohiro; Takai, Hiroshi
- Applied Physics Letters, Vol. 86, Issue 17
Laser-Induced Microexplosion Confined in the Bulk of a Sapphire Crystal: Evidence of Multimegabar Pressures
journal, April 2006
- Juodkazis, S.; Nishimura, K.; Tanaka, S.
- Physical Review Letters, Vol. 96, Issue 16
Microsized subsurface modification of mono-crystalline silicon via non-linear absorption
journal, January 2012
- Sreenivas, V. V. Parsi; Bülters, M.; Bergmann, R. B.
- Journal of the European Optical Society: Rapid Publications, Vol. 7
Laser-Induced Resistance Fine Tuning of Integrated Polysilicon Thin-Film Resistors
journal, February 2011
- Boulais, Etienne; Fantoni, Julie; Chateauneuf, Alexandre
- IEEE Transactions on Electron Devices, Vol. 58, Issue 2
Modeling the effect of fs light delocalization in Si bulk
journal, January 2014
- Zavedeev, E. V.; Kononenko, V. V.; Gololobov, V. M.
- Laser Physics Letters, Vol. 11, Issue 3
Works referencing / citing this record:
Influence of Burstein–Moss effect on photoexcitation and heating of silicon by short and ultrashort laser pulses at wavelength 1.06 $$\upmu \mathrm{m}$$ μ m
journal, November 2018
- Polyakov, Dmitry S.; Yakovlev, Evgeny B.
- Applied Physics A, Vol. 124, Issue 12
Inscribing diffraction gratings in bulk silicon with nanosecond laser pulses
journal, January 2018
- Chambonneau, M.; Richter, D.; Nolte, S.
- Optics Letters, Vol. 43, Issue 24
Positive- and negative-tone structuring of crystalline silicon by laser-assisted chemical etching
journal, January 2019
- Chambonneau, M.; Wang, X.; Yu, X.
- Optics Letters, Vol. 44, Issue 7