Electron-beam-evaporated thin films of hafnium dioxide for fabricating electronic devices
Abstract
Thin films of hafnium dioxide (HfO2) are widely used as the gate oxide in fabricating integrated circuits because of their high dielectric constants. In this paper, the authors report the growth of thin films of HfO2 using e-beam evaporation, and the fabrication of complementary metal-oxide semiconductor (CMOS) integrated circuits using this HfO2 thin film as the gate oxide. The authors analyzed the thin films using high-resolution transmission electron microscopy and electron diffraction, thereby demonstrating that the e-beam-evaporation-grown HfO2 film has a polycrystalline structure and forms an excellent interface with silicon. Accordingly, we fabricated 31-stage CMOS ring oscillator to test the quality of the HfO2 thin film as the gate oxide, and obtained excellent rail-to-rail oscillation waveforms from it, denoting that the HfO2 thin film functioned very well as the gate oxide.
- Authors:
-
- Alabama A&M Univ., Normal, AL (United States)
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Publication Date:
- Research Org.:
- Brookhaven National Laboratory (BNL), Upton, NY (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1224764
- Report Number(s):
- BNL-108477-2015-JA
Journal ID: ISSN 2166-2746; JVTBD9; KC0403020
- Grant/Contract Number:
- SC00112704
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Journal of Vacuum Science and Technology B
- Additional Journal Information:
- Journal Volume: 33; Journal Issue: 4; Journal ID: ISSN 2166-2746
- Publisher:
- American Vacuum Society/AIP
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; hafnium dioxide (HfO2) thin films; complementary metal-oxide semiconductor (CMOS) electronic circuits; silicon ring oscillator; Center for Functional Nanomaterials
Citation Formats
Xiao, Zhigang, and Kisslinger, Kim. Electron-beam-evaporated thin films of hafnium dioxide for fabricating electronic devices. United States: N. p., 2015.
Web. doi:10.1116/1.4922627.
Xiao, Zhigang, & Kisslinger, Kim. Electron-beam-evaporated thin films of hafnium dioxide for fabricating electronic devices. United States. https://doi.org/10.1116/1.4922627
Xiao, Zhigang, and Kisslinger, Kim. Wed .
"Electron-beam-evaporated thin films of hafnium dioxide for fabricating electronic devices". United States. https://doi.org/10.1116/1.4922627. https://www.osti.gov/servlets/purl/1224764.
@article{osti_1224764,
title = {Electron-beam-evaporated thin films of hafnium dioxide for fabricating electronic devices},
author = {Xiao, Zhigang and Kisslinger, Kim},
abstractNote = {Thin films of hafnium dioxide (HfO2) are widely used as the gate oxide in fabricating integrated circuits because of their high dielectric constants. In this paper, the authors report the growth of thin films of HfO2 using e-beam evaporation, and the fabrication of complementary metal-oxide semiconductor (CMOS) integrated circuits using this HfO2 thin film as the gate oxide. The authors analyzed the thin films using high-resolution transmission electron microscopy and electron diffraction, thereby demonstrating that the e-beam-evaporation-grown HfO2 film has a polycrystalline structure and forms an excellent interface with silicon. Accordingly, we fabricated 31-stage CMOS ring oscillator to test the quality of the HfO2 thin film as the gate oxide, and obtained excellent rail-to-rail oscillation waveforms from it, denoting that the HfO2 thin film functioned very well as the gate oxide.},
doi = {10.1116/1.4922627},
journal = {Journal of Vacuum Science and Technology B},
number = 4,
volume = 33,
place = {United States},
year = {Wed Jun 17 00:00:00 EDT 2015},
month = {Wed Jun 17 00:00:00 EDT 2015}
}
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Works referencing / citing this record:
Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials
journal, February 2020
- Xiao, Zhigang; Kisslinger, Kim; Chance, Sam
- Crystals, Vol. 10, Issue 2