6 Search Results

Mirror-based and zone plate-based imaging systems are being used in actinic extreme ultraviolet (EUV) reticle review tools. With regard to zone plates, a short working distance is advantageous in terms of the required spectral bandwidth, manufacturability, and potential throughput and imaging performance. Zone plates therefore typically have a short working distance. The industry has adopted the use of an EUV pellicle to protect the photomask. Imaging photomask through-pellicle requires a working distance larger than 2.5 mm. A zone-plate-based EUV mask microscope with a 3-mm working distance has been commissioned at beamline 11.3.2 of the Advanced Light Source. Through-pellicle imaging atmore » an exposure time of 2 s is demonstrated. The instrument achieves an image contrast of 95% on large features on a photomask with a tantalum-based absorber. Imaging down to 45-nm half pitch (mask scale) is demonstrated. A NILS of 2.55 is achieved on 60-nm half-pitch (mask scale) lines and spaces. These results demonstrate that zone-plate-based imaging systems can meet the requirements of an actinic EUV mask review tool in terms of imaging performance and throughput in an instrument compatible with EUV pellicles.« less

During hypersonic flight, compressional and viscous heating of the air can form a plasma layer which encases the aircraft. If the boundary layer becomes turbulent, then the electron density fluctuations can effect a parasitic modulation in microwave signals transmitted through the plasma. We developed an approach for studying the interaction of microwave signals with a turbulent, hypersonic plasma layer. The approach affords a great deal of flexibility in both the plasma layer model and the antenna configuration. We then analyzed a situation in which microwaves, transmitted from a rectangular aperture antenna, propagate through a turbulent plasma layer to a distantmore » receiver. We characterized the first-and second-order statistics of the computed parasitic modulation and quantified the depolarization of the signal. The amplitude fluctuations are lognormally distributed at low frequencies and Rice-distributed at high frequencies. Fluctuations in the copolarized phase and amplitude of the far-field signal are strongly anticorrelated. Here, we used a multioutput Gaussian process (MOGP) to model these quantities. The efficacy of the MOGP model is demonstrated by recovering the time evolution of the copolarized phase given the copolarized amplitude and occasional measurements of the phase.« less

Diffusive molecular communications (DiMC) have recently gained attention as a candidate for nano- to micro- and macro-scale communications due to its simplicity and energy efficiency. As signal propagation is solely enabled by Brownian motion mechanics, DiMC faces severe inter-symbol interference (ISI), which limits reliable and high data-rate communications. Herein, recent literature on DiMC performance enhancement strategies is surveyed; key research directions are identified. Signaling design and associated design constraints are presented. Here, studies on fundamental information theoretic limits of DiMC channel are reviewed. Classical and novel transceiver designs are discussed with an emphasis on methods for ISI mitigation and performance-complexitymore » tradeoffs. Key parameter estimation strategies such as synchronization and channel estimation are considered in conjunction with asynchronous and timing error robust receiver methods. Finally, source and channel coding in the context of DiMC is presented.« less

High-voltage, direct current (HVDC) transmission lines are increasingly being installed in power systems around the world, and this trend is expected to continue with advancements in power electronics technology. These advancements are also bringing multi-terminal direct current (MTDC) systems closer to practical application. In addition, the continued deployment of phasor measurement units (PMUs) makes dynamic information about a large power system readily available for highly controllable components, such as HVDC lines. All these trends have increased the appeal of modulating HVDC lines and MTDC systems to provide grid services in addition to bulk power transfers. This paper provides a literaturemore » survey of HVDC and MTDC damping controllers for interarea oscillations in large interconnected power systems. The literature shows a progression from theoretical research to practical applications. Finally, there are already practical implementations of HVDC modulation for lines in point-to-point configuration, although the modulation of MTDC systems is still in the research stage. As a conclusion, this paper identifies and summarizes open questions that remain to be tackled by researchers and engineers.« less

We report on thermally tunable modulators, with efficiencies up to 2.16 nm/mW. Efficient performance was accomplished through integrated heater design and Si substrate removal, where the heavily N+ doped Si heater element is integrated into the body of the microdisk. For comparison, modulators with an external heater design were also tested with small diameter Si substrate removed. The external heavily doped N+Si heater bars were fabricated outside the diameter of the microdisk. Efficiency for external heater design was 0.68 nm/mW with substrate removed. Both types of thermal modulators were experimentally tested and simulated for a complete understanding of the Simore » substrate's influence on heat dissipation with both types benefiting significantly from substrate removal. Agreement between simulation and experimental results was greater than 80% in all instances.« less