Impacts of Focused Ion Beam Processing on the Fabrication of Nanoscale Functionalized Probes

Wang, Xiang; Taylor, Sandra D.; Sassi, Michel J.; Xue, Sichuang; Yang, Zhenzhong; Liu, Jia; Liu, Lili; Li, Xiaoxu; Du, Yingge; Rosso, Kevin M.; Zhang, Xin

doi:10.1021/acs.inorgchem.4c05458

Title: Impacts of Focused Ion Beam Processing on the Fabrication of Nanoscale Functionalized Probes

Journal Article · Sat Apr 05 00:00:00 UTC 2025 · Inorganic Chemistry

DOI: https://doi.org/10.1021/acs.inorgchem.4c05458 · OSTI ID:3109233

Wang, Xiang ^[1];

^[1];

^[1]; Xue, Sichuang ^[1]; Yang, Zhenzhong ^[1]; Liu, Jia ^[1];

^[1]; Li, Xiaoxu ^[1];

^[1];

^[1]

Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)

Herein, we examine the impact of Ga⁺ ion kinetic energy and the target material type on the extent of ion implantation and structural damage in atomic force microscopy probes made of Al₂O₃ and ZnO manufactured by focused ion beam (FIB) using scanning transmission electron microscopy and energy-dispersive X-ray mapping. Penetration of Ga into the Al₂O₃ lattice induced structural distortions and amorphization. For ZnO probes, Ga is uniformly dispersed across the surface, resulting in the formation of distinct clusters. Atom probe tomography further validates the Ga distributions in Al₂O₃ and ZnO nanoprobes. Complementary Monte Carlo simulations with the transport of ions in the matter program indicated that the introduction of Ga⁺ prompts the generation of cation and anion vacancies, an occurrence more pronounced in Al₂O₃ compared to ZnO. In conclusion, this study not only enriches the knowledge of ion-matter interactions, but also serves as a practical guide for the fabrication of nanoscale functionalized AFM probes.

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Research Organization:: Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Chemical Sciences, Geosciences & Biosciences Division (CSGB); USDOE Office of Science (SC), Biological and Environmental Research (BER)

Grant/Contract Number:: AC05-76RL01830

OSTI ID:: 3109233

Report Number(s):: PNNL-SA-209097

Journal Information:: Inorganic Chemistry, Journal Name: Inorganic Chemistry Journal Issue: 15 Vol. 64; ISSN 0020-1669; ISSN 1520-510X

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

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Title: Impacts of Focused Ion Beam Processing on the Fabrication of Nanoscale Functionalized Probes

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