Scalable Nanoimprint Manufacturing of Functional Multilayer Metasurface Devices

Journal Article · 16 June 2024 · Advanced Functional Materials

DOI: https://doi.org/10.1002/adfm.202404852 · OSTI ID:2574130

Choi, Shinhyuk ^[1]; Zuo, Jiawei ^[1]; Das, Nabasindhu ^[1]; Yao, Yu  ^[1]; Wang, Chao  ^[1]

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1. Arizona State University, Tempe, AZ (United States)

Optical metasurfaces, consisting of subwavelength-scale meta-atom arrays, hold great promise of overcoming the fundamental limitations of conventional optics. Due to their structural complexity, metasurfaces usually require high-resolution yet slow and expensive fabrication processes. Here, using a metasurface polarimetric imaging device as an example, the photonic structures and the Nanoimprint lithography (NIL) processes are designed, creating two separate NIL molds over a patterning area of > 20 mm2 with designed Moiré alignment markers by electron-beam writing, and further subsequently integrate silicon and aluminum metasurface structures on a chip. Uniquely, the silicon and aluminum metasurfaces are fabricated by using the nanolithography and 3D pattern-transfer capabilities of NIL, respectively, achieving nanometer-scale linewidth uniformity, sub-200 nm translational overlay accuracy, and <0.017 rotational alignment error while significantly reducing fabrication complexity and surface roughness. Here, the micro-sized multilayer metasurfaces have high circular polarization extinction ratios as large as ≈20 and ≈80 in blue and red wavelengths. Further, the metasurface chip-integrated CMOS imager demonstrates high accuracy in broad-band, full Stokes parameter analysis in the visible wavelength ranges and single-shot polarimetric imaging. This novel, NIL-based, multilayered nanomanufacturing approach is applicable to the scalable production of large-area functional structures for ultra-compact optic, electronic, and quantum devices.

• Research Organization: Arizona State University, Tempe, AZ (United States)
• Sponsoring Organization: USDOE Office of Energy Efficiency and Renewable Energy (EERE), Renewable Power Office. Solar Energy Technologies Office; National Science Foundation
• Grant/Contract Number: EE0008999
• OSTI ID: 2574130
• Journal Information: Advanced Functional Materials, Journal Name: Advanced Functional Materials Journal Issue: 45 Vol. 34; ISSN 1616-3028; ISSN 1616-301X
• Publisher: WileyCopyright Statement
• Country of Publication: United States
• Language: English