Porous but Mechanically Robust All-Inorganic Antireflective Coatings Synthesized using Polymers of Intrinsic Microporosity

Ji, Cheng; Zhang, Zhongbo; Omotosho, Khalil D.; Berman, Diana; Lee, Byeongdu; Divan, Ralu; Guha, Supratik; Shevchenko, Elena V.

doi:10.1021/acsnano.2c05592

Title: Porous but Mechanically Robust All-Inorganic Antireflective Coatings Synthesized using Polymers of Intrinsic Microporosity

Journal Article · 01 September 2022 · ACS Nano

DOI: https://doi.org/10.1021/acsnano.2c05592 · OSTI ID:1969403

Ji, Cheng ^[1];

^[1]; Omotosho, Khalil D. ^[2];

^[2];

^[3]; Divan, Ralu ^[4];

^[1];

^[5]

Argonne National Lab. (ANL), Argonne, IL (United States); Univ. of Chicago, IL (United States)
Univ. of North Texas, Denton, TX (United States). Advance Materials and Manufacturing Processes Institute (AMMPI)
Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
Argonne National Lab. (ANL), Argonne, IL (United States). Center for Nanoscale Materials
Argonne National Lab. (ANL), Argonne, IL (United States). Center for Nanoscale Materials; Univ. of Chicago, IL (United States). James Frank Institute

Herein, we introduce polymer of intrinsic microporosity 1 (PIM-1) to design single-layer and multilayered all-inorganic antireflective coatings (ARCs) with excellent mechanical properties. Using PIM-1 as a template in sequential infiltration synthesis (SIS), we can fabricate highly uniform, mechanically stable conformal coatings of AlO_x with porosities of ~50% and a refractive index of 1.41 compared to 1.76 for nonporous AlO_x that is perfectly suited for substrates commonly used in high-end optical systems or touch screens (e.g., sapphire, conductive glass, bendable glass, etc.). We show that such films can be used as a single-layer ARC capable of reduction of the Fresnel reflections of sapphire to as low as 0.1% at 500 nm being deposited only on one side of the substrate. We also demonstrate that deposition of the second layer with higher porosity using block copolymers enables the design of graded-index double-layered coatings. AlO_x structures with just two layers and a total thickness of less than 200 nm are capable of reduction of Fresnel reflections under normal illumination to below 0.5% in a broad spectral range with 0.1% reflection at 700 nm. Additionally, and most importantly, we show that highly porous single-layer and graded-index double-layered ARCs are characterized by high hardness and scratch resistivity. The hardness and the maximum reached load were 7.5 GPa and 13 mN with a scratch depth of about 130 nm, respectively, that is very promising for the structures consisting of two porous AlO_x layers with 50% and 85% porosities, correspondingly. Such mechanical properties of coatings can also allow their application as protective layers for other optical coatings.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: National Science Foundation (NSF); Office of Naval Research; U.S. Department of Defense (DOD). Vannevar Bush Faculty Fellowship; USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1969403

Journal Information:: ACS Nano, Journal Name: ACS Nano Journal Issue: 9 Vol. 16; ISSN 1936-0851

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

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Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
PIM-1
anti-reflective coatings
coating materials
deposition
layers
low refractive index
optical coating
optical properties
polymer of intrinsic microporosity
porosity
porous alumina
sequential infiltration synthesis

Title: Porous but Mechanically Robust All-Inorganic Antireflective Coatings Synthesized using Polymers of Intrinsic Microporosity

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