Title: Efficient and compact thermo-optic phase shifter in silicon-rich silicon nitride

Abstract

The design, fabrication, and characterization of low-loss ultra-compact bends in high-index ( $n=3.1$ at $\mathrm{\lambda \; <\#comment/>}=1550\mathrm{n}\mathrm{m}$ ) plasma-enhanced chemical vapor deposition silicon-rich silicon nitride (SRN) were demonstrated and utilized to realize efficient, small footprint thermo-optic phase shifter. Compact bends were structured into a folded waveguide geometry to form a rectangular spiral within an area of $65\times \; <\#comment/>65\text{µ <\#comment/>}{\mathrm{m}}^2$ , having a total active waveguide length of 1.2 mm. The device featured a phase-shifting efficiency of $8\mathrm{m}\mathrm{W}/\mathrm{\pi \; <\#comment/>}$ and a 3 dB switching bandwidth of 15 KHz. We propose SRN as a promising thermo-optic platform that combines the properties of silicon and stoichiometric silicon nitride.

Authors:

Nejadriahi, Hani ;

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Pappert, Steve; Fainman, Yeshaiahu; Yu, Paul

Publication Date:

Tue Sep 14 00:00:00 EDT 2021

Sponsoring Org.:

USDOE

OSTI Identifier:

1819771

Grant/Contract Number:  

SC0019273

Resource Type:

Publisher's Accepted Manuscript

Journal Name:

Optics Letters

Additional Journal Information:

Journal Name: Optics Letters Journal Volume: 46 Journal Issue: 18; Journal ID: ISSN 0146-9592

Publisher:

Optical Society of America

Country of Publication:

United States

Language:

English