Mechanisms of alumina growth via atomic layer deposition on nickel oxide and metallic nickel surfaces
Abstract
We aim at elucidating the mechanism of the trimethyl aluminum (TMA) decomposition on oxidized nickel (NiO) and metallic nickel (Ni) facets in the absence of a source of hydroxyl groups. This TMA decomposition mechanism constitutes the earliest stage of growth of Al2O3 coatings with the atomic layer decomposition (ALD) method, which stabilizes nickel catalysts in energy-intensive processes such as the dry reforming of methane. Our first-principles calculations suggest thermodynamic favorability for the TMA decomposition on metallic nickel compared to oxidized nickel. Moreover, the decomposition of TMA on metallic nickel showed almost no differences in terms of energy barriers between flat and stepped surfaces. Regarding the impact of the CH3 radicals formed after TMA decomposition, we calculated stronger adsorption on metallic nickel facets than on oxidized nickel, and these adsorption energies are comparable to the adsorption energies calculated in earlier works on Al2O3 ALD growth on palladium surfaces. These results lead us to believe in the growth of porous Al2O3 coatings triggered by CH3 contamination rather than due to preferential TMA decomposition on stepped and/or defective facets. The CH3 radicals are likely to be thermally stable at temperatures used during Al2O3 ALD processes, partially passivating the surface towards further TMA decomposition.
- Authors:
-
- Texas A & M Univ., College Station, TX (United States)
- Publication Date:
- Research Org.:
- Texas A & M Univ., College Station, TX (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1803738
- Alternate Identifier(s):
- OSTI ID: 1572421
- Grant/Contract Number:
- SC0019379; SC00193979
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Physical Chemistry Chemical Physics. PCCP
- Additional Journal Information:
- Journal Volume: 21; Journal Issue: 44; Journal ID: ISSN 1463-9076
- Publisher:
- Royal Society of Chemistry
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
Citation Formats
Ospina-Acevedo, Francisco Alejandro, Perez Beltran, Saul, and Balbuena, Perla B. Mechanisms of alumina growth via atomic layer deposition on nickel oxide and metallic nickel surfaces. United States: N. p., 2019.
Web. doi:10.1039/c9cp05688b.
Ospina-Acevedo, Francisco Alejandro, Perez Beltran, Saul, & Balbuena, Perla B. Mechanisms of alumina growth via atomic layer deposition on nickel oxide and metallic nickel surfaces. United States. https://doi.org/10.1039/c9cp05688b
Ospina-Acevedo, Francisco Alejandro, Perez Beltran, Saul, and Balbuena, Perla B. Thu .
"Mechanisms of alumina growth via atomic layer deposition on nickel oxide and metallic nickel surfaces". United States. https://doi.org/10.1039/c9cp05688b. https://www.osti.gov/servlets/purl/1803738.
@article{osti_1803738,
title = {Mechanisms of alumina growth via atomic layer deposition on nickel oxide and metallic nickel surfaces},
author = {Ospina-Acevedo, Francisco Alejandro and Perez Beltran, Saul and Balbuena, Perla B.},
abstractNote = {We aim at elucidating the mechanism of the trimethyl aluminum (TMA) decomposition on oxidized nickel (NiO) and metallic nickel (Ni) facets in the absence of a source of hydroxyl groups. This TMA decomposition mechanism constitutes the earliest stage of growth of Al2O3 coatings with the atomic layer decomposition (ALD) method, which stabilizes nickel catalysts in energy-intensive processes such as the dry reforming of methane. Our first-principles calculations suggest thermodynamic favorability for the TMA decomposition on metallic nickel compared to oxidized nickel. Moreover, the decomposition of TMA on metallic nickel showed almost no differences in terms of energy barriers between flat and stepped surfaces. Regarding the impact of the CH3 radicals formed after TMA decomposition, we calculated stronger adsorption on metallic nickel facets than on oxidized nickel, and these adsorption energies are comparable to the adsorption energies calculated in earlier works on Al2O3 ALD growth on palladium surfaces. These results lead us to believe in the growth of porous Al2O3 coatings triggered by CH3 contamination rather than due to preferential TMA decomposition on stepped and/or defective facets. The CH3 radicals are likely to be thermally stable at temperatures used during Al2O3 ALD processes, partially passivating the surface towards further TMA decomposition.},
doi = {10.1039/c9cp05688b},
journal = {Physical Chemistry Chemical Physics. PCCP},
number = 44,
volume = 21,
place = {United States},
year = {Thu Oct 24 00:00:00 EDT 2019},
month = {Thu Oct 24 00:00:00 EDT 2019}
}
Web of Science
Works referenced in this record:
CO 2 Reforming of CH 4 on Ni(111): A Density Functional Theory Calculation
journal, May 2006
- Wang, Sheng-Guang; Cao, Dong-Bo; Li, Yong-Wang
- The Journal of Physical Chemistry B, Vol. 110, Issue 20
Generalized Gradient Approximation Made Simple
journal, October 1996
- Perdew, John P.; Burke, Kieron; Ernzerhof, Matthias
- Physical Review Letters, Vol. 77, Issue 18, p. 3865-3868
LDA+U calculated electronic and structural properties of NiO(001) and NiO(111) p(2×2) surfaces
journal, May 2002
- Bengone, O.; Alouani, M.; Hugel, J.
- Computational Materials Science, Vol. 24, Issue 1-2
Porous Alumina Protective Coatings on Palladium Nanoparticles by Self-Poisoned Atomic Layer Deposition
journal, May 2012
- Lu, Junling; Liu, Bin; Greeley, Jeffrey P.
- Chemistry of Materials, Vol. 24, Issue 11
Alumina coated nickel nanoparticles as a highly active catalyst for dry reforming of methane
journal, December 2015
- Baktash, Elham; Littlewood, Patrick; Schomäcker, Reinhard
- Applied Catalysis B: Environmental, Vol. 179
Stabilization of Copper Catalysts for Liquid-Phase Reactions by Atomic Layer Deposition
journal, November 2013
- O'Neill, Brandon J.; Jackson, David H. K.; Crisci, Anthony J.
- Angewandte Chemie International Edition, Vol. 52, Issue 51
First-Principles Predictions and in Situ Experimental Validation of Alumina Atomic Layer Deposition on Metal Surfaces
journal, November 2014
- Lu, Junling; Liu, Bin; Guisinger, Nathan P.
- Chemistry of Materials, Vol. 26, Issue 23
Projector augmented-wave method
journal, December 1994
- Blöchl, P. E.
- Physical Review B, Vol. 50, Issue 24, p. 17953-17979
Carbon Dioxide Reforming of Methane To Produce Synthesis Gas over Metal-Supported Catalysts: State of the Art
journal, January 1996
- Wang, Shaobin; Lu, G. Q. (Max); Millar, Graeme J.
- Energy & Fuels, Vol. 10, Issue 4
Dry reforming of methane over nickel catalysts supported on magnesium aluminate spinels
journal, October 2004
- Guo, Jianjun; Lou, Hui; Zhao, Hong
- Applied Catalysis A: General, Vol. 273, Issue 1-2
Dry reforming of methane: Influence of process parameters—A review
journal, May 2015
- Usman, Muhammad; Wan Daud, W. M. A.; Abbas, Hazzim F.
- Renewable and Sustainable Energy Reviews, Vol. 45
Structural investigation of the NiO(111) single crystal surface
journal, December 1997
- Barbier, A.; Renaud, G.
- Surface Science, Vol. 392, Issue 1-3
Implementation of the projector augmented-wave LDA+U method: Application to the electronic structure of NiO
journal, December 2000
- Bengone, O.; Alouani, M.; Blöchl, P.
- Physical Review B, Vol. 62, Issue 24
Atomic Layer Deposition of Ta–N-Based Thin Films Using a Tantalum Source
journal, January 2010
- Schmidt, D.; Knaut, M.; Hossbach, C.
- Journal of The Electrochemical Society, Vol. 157, Issue 6
Atomic layer deposition—Sequential self-limiting surface reactions for advanced catalyst “bottom-up” synthesis
journal, June 2016
- Lu, Junling; Elam, Jeffrey W.; Stair, Peter C.
- Surface Science Reports, Vol. 71, Issue 2
Special points for Brillouin-zone integrations
journal, June 1976
- Monkhorst, Hendrik J.; Pack, James D.
- Physical Review B, Vol. 13, Issue 12, p. 5188-5192
Molecular adsorption on the surface of strongly correlated transition-metal oxides: A case study for CO/NiO(100)
journal, February 2004
- Rohrbach, A.; Hafner, J.; Kresse, G.
- Physical Review B, Vol. 69, Issue 7
Reconstruction of NaCl surfaces from a dipolar solution to the Madelung problem
journal, June 1992
- Wolf, Dieter
- Physical Review Letters, Vol. 68, Issue 22
Toward atomically-precise synthesis of supported bimetallic nanoparticles using atomic layer deposition
journal, February 2014
- Lu, Junling; Low, Ke-Bin; Lei, Yu
- Nature Communications, Vol. 5, Issue 1
Molecular dynamics simulations of reconstructed NiO surfaces
journal, April 2004
- Fisher, Craig A. J.
- Scripta Materialia, Vol. 50, Issue 7
Coking- and Sintering-Resistant Palladium Catalysts Achieved Through Atomic Layer Deposition
journal, March 2012
- Lu, Junling; Fu, Baosong; Kung, Mayfair C.
- Science, Vol. 335, Issue 6073
Band theory and Mott insulators: Hubbard U instead of Stoner I
journal, July 1991
- Anisimov, Vladimir I.; Zaanen, Jan; Andersen, Ole K.
- Physical Review B, Vol. 44, Issue 3, p. 943-954
A fast and robust algorithm for Bader decomposition of charge density
journal, June 2006
- Henkelman, Graeme; Arnaldsson, Andri; Jónsson, Hannes
- Computational Materials Science, Vol. 36, Issue 3
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
journal, June 2005
- Puurunen, Riikka L.
- Journal of Applied Physics, Vol. 97, Issue 12, Article No. 121301
Atomic layer deposition (ALD): from precursors to thin film structures
journal, April 2002
- Leskelä, Markku; Ritala, Mikko
- Thin Solid Films, Vol. 409, Issue 1, p. 138-146
Trimethylaluminum as a Reducing Agent in the Atomic Layer Deposition of Ti(Al)N Thin Films
journal, September 2001
- Juppo, M.; Alén, P.; Ritala, M.
- Chemical Vapor Deposition, Vol. 7, Issue 5
Stabilization of Copper Catalysts for Liquid-Phase Reactions by Atomic Layer Deposition
journal, November 2013
- O'Neill, Brandon J.; Jackson, David H. K.; Crisci, Anthony J.
- Angewandte Chemie, Vol. 125, Issue 51
Precisely Controlled Porous Alumina Overcoating on Pd Catalyst by Atomic Layer Deposition: Enhanced Selectivity and Durability in Hydrogenation of 1,3-Butadiene
journal, March 2015
- Yi, Hong; Du, Hongyi; Hu, Yingli
- ACS Catalysis, Vol. 5, Issue 5
Atomic Layer Deposition of Ta(Al)N(C) Thin Films Using Trimethylaluminum as a Reducing Agent
journal, January 2001
- Alén, Petra; Juppo, Marika; Ritala, Mikko
- Journal of The Electrochemical Society, Vol. 148, Issue 10
In Situ Quartz Crystal Microbalance and Quadrupole Mass Spectrometry Studies of Atomic Layer Deposition of Aluminum Oxide from Trimethylaluminum and Water
journal, October 2001
- Rahtu, Antti; Alaranta, Teemu; Ritala, Mikko
- Langmuir, Vol. 17, Issue 21
A climbing image nudged elastic band method for finding saddle points and minimum energy paths
journal, December 2000
- Henkelman, Graeme; Uberuaga, Blas P.; Jónsson, Hannes
- The Journal of Chemical Physics, Vol. 113, Issue 22, p. 9901-9904
Improved grid-based algorithm for Bader charge allocation
journal, January 2007
- Sanville, Edward; Kenny, Steven D.; Smith, Roger
- Journal of Computational Chemistry, Vol. 28, Issue 5
Well-Ordered Transition Metal Oxide Layers in Model Catalysis – A Series of Case Studies
journal, December 2012
- Kuhlenbeck, Helmut; Shaikhutdinov, Shamil; Freund, Hans-Joachim
- Chemical Reviews, Vol. 113, Issue 6
High-precision sampling for Brillouin-zone integration in metals
journal, August 1989
- Methfessel, M.; Paxton, A. T.
- Physical Review B, Vol. 40, Issue 6
First-principles study of the reconstruction and hydroxylation of the polar NiO(111) surface
journal, July 2011
- Ebensperger, Christina; Meyer, Bernd
- physica status solidi (b), Vol. 248, Issue 10
Stability of the polar NiO(111) surface
journal, March 2008
- Zhang, Wei-Bing; Tang, Bi-Yu
- The Journal of Chemical Physics, Vol. 128, Issue 12
Hydroxyl groups on oxide surfaces: NiO(100), NiO(111) and Cr2O3(111)
journal, November 1993
- Cappus, D.; Xu, C.; Ehrlich, D.
- Chemical Physics, Vol. 177, Issue 2
Perfectly Conformal TiN and Al2O3 Films Deposited by Atomic Layer Deposition
journal, January 1999
- Ritala, Mikko; Leskelä, Markku; Dekker, Jan-Pieter
- Chemical Vapor Deposition, Vol. 5, Issue 1
Improved tangent estimate in the nudged elastic band method for finding minimum energy paths and saddle points
journal, December 2000
- Henkelman, Graeme; Jónsson, Hannes
- The Journal of Chemical Physics, Vol. 113, Issue 22
DFT studies of dry reforming of methane on Ni catalyst
journal, November 2009
- Zhu, Yi-An; Chen, De; Zhou, Xing-Gui
- Catalysis Today, Vol. 148, Issue 3-4
Thermal decomposition of methanol absorbed on palladium{111}. A new reaction pathway involving methyl formation
journal, June 1989
- Levis, Robert J.; Zhicheng, Jiang; Winograd, Nicholas
- Journal of the American Chemical Society, Vol. 111, Issue 13
Methanol decomposition on Pd(111) single crystal surfaces
journal, November 1990
- Kruse, N.; Rebholz, M.; Matolin, V.
- Surface Science, Vol. 238, Issue 1-3
Improved tetrahedron method for Brillouin-zone integrations
journal, June 1994
- Blöchl, Peter E.; Jepsen, O.; Andersen, O. K.
- Physical Review B, Vol. 49, Issue 23
A review of dry (CO 2 ) reforming of methane over noble metal catalysts
journal, January 2014
- Pakhare, Devendra; Spivey, James
- Chem. Soc. Rev., Vol. 43, Issue 22
Stabilizing Ni Catalysts by Molecular Layer Deposition for Harsh, Dry Reforming Conditions
journal, July 2014
- Gould, Troy D.; Izar, Alan; Weimer, Alan W.
- ACS Catalysis, Vol. 4, Issue 8
Implementation of the Projector Augmented Wave LDA+U Method: Application to the Electronic Structure of NiO
text, January 2000
- Bengone, O.; Alouani, M.; Bloechl, P.
- arXiv