Similarity law and frequency scaling in low-pressure capacitive radio frequency plasmas
Abstract
We verify the similarity law (SL) and show a violation of frequency scaling (f-scaling) in low-pressure capacitive radio frequency (rf) plasmas via fully kinetic particle-in-cell simulations. The SL scaling relations for electron density and electron power absorption are first confirmed in similar rf discharges. Based on these results, with only the driving frequency varied, the f-scaling for electron density is also validated, showing almost the same trend as the SL scaling, across most of the frequency regime. However, violations of the f-scaling are observed at lower frequencies, which are found to be relevant to the electron heating mode transition from stochastic to Ohmic heating. Electron kinetic invariance is illustrated for the SL and f-scaling being valid, respectively, whereas the electron kinetic variation is observed when the f-scaling is violated.
- Authors:
-
[1];
[2];
[1];
[3];
[4];
[1]
- Michigan State Univ., East Lansing, MI (United States). Department of Computational Mathematics, Science and Engineering; Michigan State Univ., East Lansing, MI (United States). Department of Electrical and Computer Engineering
- Michigan State Univ., East Lansing, MI (United States). Fraunhofer Center for Coatings and Diamond Technologies
- Michigan State Univ., East Lansing, MI (United States). Department of Electrical and Computer Engineering
- Michigan State Univ., East Lansing, MI (United States). Department of Electrical and Computer Engineering; Michigan State Univ., East Lansing, MI (United States). Fraunhofer Center for Coatings and Diamond Technologies; Michigan State Univ., East Lansing, MI (United States). Department of Chemical Engineering and Materials Science
- Publication Date:
- Research Org.:
- Univ. of Michigan, Ann Arbor, MI (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Fusion Energy Sciences (FES); US Air Force Office of Scientific Research (AFOSR)
- OSTI Identifier:
- 1850771
- Alternate Identifier(s):
- OSTI ID: 1714403
- Grant/Contract Number:
- SC0001939; FA9550-18-1-0062; FA9550-18-1-0061; 1917577; 1724941
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Volume: 117; Journal Issue: 20; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; Physics
Citation Formats
Fu, Yangyang, Zheng, Bocong, Wen, De-Qi, Zhang, Peng, Fan, Qi Hua, and Verboncoeur, John P. Similarity law and frequency scaling in low-pressure capacitive radio frequency plasmas. United States: N. p., 2020.
Web. doi:10.1063/5.0029518.
Fu, Yangyang, Zheng, Bocong, Wen, De-Qi, Zhang, Peng, Fan, Qi Hua, & Verboncoeur, John P. Similarity law and frequency scaling in low-pressure capacitive radio frequency plasmas. United States. https://doi.org/10.1063/5.0029518
Fu, Yangyang, Zheng, Bocong, Wen, De-Qi, Zhang, Peng, Fan, Qi Hua, and Verboncoeur, John P. Mon .
"Similarity law and frequency scaling in low-pressure capacitive radio frequency plasmas". United States. https://doi.org/10.1063/5.0029518. https://www.osti.gov/servlets/purl/1850771.
@article{osti_1850771,
title = {Similarity law and frequency scaling in low-pressure capacitive radio frequency plasmas},
author = {Fu, Yangyang and Zheng, Bocong and Wen, De-Qi and Zhang, Peng and Fan, Qi Hua and Verboncoeur, John P.},
abstractNote = {We verify the similarity law (SL) and show a violation of frequency scaling (f-scaling) in low-pressure capacitive radio frequency (rf) plasmas via fully kinetic particle-in-cell simulations. The SL scaling relations for electron density and electron power absorption are first confirmed in similar rf discharges. Based on these results, with only the driving frequency varied, the f-scaling for electron density is also validated, showing almost the same trend as the SL scaling, across most of the frequency regime. However, violations of the f-scaling are observed at lower frequencies, which are found to be relevant to the electron heating mode transition from stochastic to Ohmic heating. Electron kinetic invariance is illustrated for the SL and f-scaling being valid, respectively, whereas the electron kinetic variation is observed when the f-scaling is violated.},
doi = {10.1063/5.0029518},
journal = {Applied Physics Letters},
number = 20,
volume = 117,
place = {United States},
year = {Mon Nov 16 00:00:00 EST 2020},
month = {Mon Nov 16 00:00:00 EST 2020}
}
Free Publicly Available Full Text
Publisher's Version of Record
Other availability
Search WorldCat to find libraries that may hold this journal
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Strongly Emitting Surfaces Unable to Float below Plasma Potential
journal, February 2016
- Campanell, M. D.; Umansky, M. V.
- Physical Review Letters, Vol. 116, Issue 8
Capacitively coupled glow discharges at frequencies above 13.56 MHz
journal, October 1991
- Surendra, M.; Graves, D. B.
- Applied Physics Letters, Vol. 59, Issue 17
Probe diagnostics of non‐Maxwellian plasmas
journal, April 1993
- Godyak, V. A.; Piejak, R. B.; Alexandrovich, B. M.
- Journal of Applied Physics, Vol. 73, Issue 8
Principles of Plasma Discharges and Materials Processing
book, January 2005
- Lieberman, Michael A.; Lichtenberg, Allan J.
Scaling laws verification for capacitive rf‐discharge Ar plasma using particle‐in‐cell simulations
journal, December 1995
- Chung, T. H.; Yoon, H. S.; Lee, J. K.
- Journal of Applied Physics, Vol. 78, Issue 11
Scaling laws for gas breakdown for nanoscale to microscale gaps at atmospheric pressure
journal, June 2016
- Loveless, Amanda M.; Garner, Allen L.
- Applied Physics Letters, Vol. 108, Issue 23
On the Similarities of Low-Temperature Plasma Discharges
journal, May 2019
- Fu, Yangyang; Verboncoeur, John P.
- IEEE Transactions on Plasma Science, Vol. 47, Issue 5
Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation
journal, May 2018
- Schulze, J.; Donkó, Z.; Lafleur, T.
- Plasma Sources Science and Technology, Vol. 27, Issue 5
Effects of interelectrode gap on high frequency and very high frequency capacitively coupled plasmas
journal, July 2009
- Bera, Kallol; Rauf, Shahid; Ramaswamy, Kartik
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 27, Issue 4
Extended scaling and Paschen law for micro-sized radiofrequency plasma breakdown
journal, February 2017
- Lee, Min Uk; Lee, Jimo; Lee, Jae Koo
- Plasma Sources Science and Technology, Vol. 26, Issue 3
Influence of excitation frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge
journal, June 2018
- Sharma, S.; Sirse, N.; Turner, M. M.
- Physics of Plasmas, Vol. 25, Issue 6
Atmospheric-pressure gas breakdown from 2 to 100 MHz
journal, December 2008
- Walsh, J. L.; Zhang, Y. T.; Iza, F.
- Applied Physics Letters, Vol. 93, Issue 22
Investigation on the effect of nonlinear processes on similarity law in high-pressure argon discharges
journal, November 2017
- Fu, Yangyang; Parsey, Guy M.; Verboncoeur, John P.
- Physics of Plasmas, Vol. 24, Issue 11
The effect of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in single- and dual-frequency capacitively coupled plasmas
journal, July 2017
- Daksha, M.; Derzsi, A.; Wilczek, S.
- Plasma Sources Science and Technology, Vol. 26, Issue 8
Scaling law for direct current field emission-driven microscale gas breakdown
journal, December 2012
- Venkattraman, A.; Alexeenko, A. A.
- Physics of Plasmas, Vol. 19, Issue 12
Plasma density and ion energy control via driving frequency and applied voltage in a collisionless capacitively coupled plasma discharge
journal, August 2018
- Sharma, Sarveshwar; Sen, Abhijit; Sirse, N.
- Physics of Plasmas, Vol. 25, Issue 8
Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms
journal, March 2015
- Bruneau, Bastien; Gans, Timo; O’Connell, Deborah
- Physical Review Letters, Vol. 114, Issue 12
Enhancement of Ohmic and Stochastic Heating by Resonance Effects in Capacitive Radio Frequency Discharges: A Theoretical Approach
journal, August 2008
- Mussenbrock, T.; Brinkmann, R. P.; Lieberman, M. A.
- Physical Review Letters, Vol. 101, Issue 8
Ionization by Drift and Ambipolar Electric Fields in Electronegative Capacitive Radio Frequency Plasmas
journal, December 2011
- Schulze, J.; Derzsi, A.; Dittmann, K.
- Physical Review Letters, Vol. 107, Issue 27
Ion energy distribution control in single and dual frequency capacitive plasma sources
journal, January 2005
- Lee, J. K.; Manuilenko, O. V.; Babaeva, N. Yu
- Plasma Sources Science and Technology, Vol. 14, Issue 1
High-energy ballistic electrons in low-pressure radio-frequency plasmas
journal, September 2020
- Fu, Yangyang; Zheng, Bocong; Wen, De-Qi
- Plasma Sources Science and Technology, Vol. 29, Issue 9
Electron dynamics in low pressure capacitively coupled radio frequency discharges
journal, May 2020
- Wilczek, S.; Schulze, J.; Brinkmann, R. P.
- Journal of Applied Physics, Vol. 127, Issue 18
Abnormal Heating of Low-Energy Electrons in Low-Pressure Capacitively Coupled Discharges
journal, February 2007
- Park, G. Y.; You, S. J.; Iza, F.
- Physical Review Letters, Vol. 98, Issue 8
Verification of frequency scaling laws for capacitive radio‐frequency discharges using two‐dimensional simulations*
journal, July 1993
- Vahedi, V.; Birdsall, C. K.; Lieberman, M. A.
- Physics of Fluids B: Plasma Physics, Vol. 5, Issue 7
Collisionless Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Plasmas
journal, July 2011
- Liu, Yong-Xin; Zhang, Quan-Zhi; Jiang, Wei
- Physical Review Letters, Vol. 107, Issue 5
Transition of low-temperature plasma similarity laws from low to high ionization degree regimes
journal, September 2019
- Fu, Yangyang; Krek, Janez; Wen, Deqi
- Plasma Sources Science and Technology, Vol. 28, Issue 9
Paschen's curve in microgaps with an electrode surface protrusion
journal, July 2018
- Fu, Yangyang; Zhang, Peng; Verboncoeur, John P.
- Applied Physics Letters, Vol. 113, Issue 5
Kinetic interpretation of resonance phenomena in low pressure capacitively coupled radio frequency plasmas
journal, June 2016
- Wilczek, Sebastian; Trieschmann, Jan; Eremin, Denis
- Physics of Plasmas, Vol. 23, Issue 6
Enhancement of Ohmic heating by Hall current in magnetized capacitively coupled discharges
journal, September 2019
- Zheng, Bocong; Wang, Keliang; Grotjohn, Timothy
- Plasma Sources Science and Technology, Vol. 28, Issue 9
The effect of electron induced secondary electrons on the characteristics of low-pressure capacitively coupled radio frequency plasmas
journal, August 2018
- Horváth, B.; Schulze, J.; Donkó, Z.
- Journal of Physics D: Applied Physics, Vol. 51, Issue 35
The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges
journal, March 2015
- Wilczek, S.; Trieschmann, J.; Schulze, J.
- Plasma Sources Science and Technology, Vol. 24, Issue 2
Similarity relations for low-temperature nonisothermal discharges
journal, September 1991
- Rukhadze, Anri A.; Sobolev, N. N.; Sokovikov, Vasilii V.
- Soviet Physics Uspekhi, Vol. 34, Issue 9
Similarity of capacitive radio-frequency discharges in nonlocal regimes
journal, November 2020
- Fu, Yangyang; Zheng, Bocong; Zhang, Peng
- Physics of Plasmas, Vol. 27, Issue 11
The characteristics of atmospheric radio frequency discharges with frequency increasing at a constant power density
journal, October 2010
- Zhang, Yuan Tao; Li, Qing Quan; Lou, Jie
- Applied Physics Letters, Vol. 97, Issue 14
Electrical breakdown from macro to micro/nano scales: a tutorial and a review of the state of the art
journal, February 2020
- Fu, Yangyang; Zhang, Peng; Verboncoeur, John P.
- Plasma Research Express, Vol. 2, Issue 1
The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges
journal, August 2010
- Donkó, Z.; Schulze, J.; Hartmann, P.
- Applied Physics Letters, Vol. 97, Issue 8
Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure
journal, August 2020
- Vass, Máté; Wilczek, Sebastian; Lafleur, Trevor
- Plasma Sources Science and Technology, Vol. 29, Issue 8
Diagnostics of ballistic electrons in a dc/rf hybrid capacitively coupled discharge
journal, December 2008
- Xu, Lin; Chen, Lee; Funk, Merritt
- Applied Physics Letters, Vol. 93, Issue 26
Gas breakdown and its scaling law in microgaps with multiple concentric cathode protrusions
journal, January 2019
- Fu, Yangyang; Zhang, Peng; Krek, Janez
- Applied Physics Letters, Vol. 114, Issue 1
Heating of a dual frequency capacitively coupled plasma via the plasma series resonance
journal, October 2007
- Semmler, E.; Awakowicz, P.; von Keudell, A.
- Plasma Sources Science and Technology, Vol. 16, Issue 4
Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma
journal, November 2016
- Sharma, S.; Sirse, N.; Kaw, P. K.
- Physics of Plasmas, Vol. 23, Issue 11
Influence of metastable atoms in low pressure magnetized radio-frequency argon discharges
journal, July 2020
- Zheng, Bocong; Fu, Yangyang; Wen, De-qi
- Journal of Physics D: Applied Physics, Vol. 53, Issue 43