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Title: Similarity law and frequency scaling in low-pressure capacitive radio frequency plasmas

Authors:
ORCiD logo [1]; ORCiD logo [2]; ORCiD logo [1]; ORCiD logo [3]; ORCiD logo [4]; ORCiD logo [1]
  1. Department of Computational Mathematics, Science and Engineering, Michigan State University, East Lansing, Michigan 48824, USA, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, Michigan 48824, USA
  2. Fraunhofer Center for Coatings and Diamond Technologies, Michigan State University, East Lansing, Michigan 48824, USA
  3. Department of Electrical and Computer Engineering, Michigan State University, East Lansing, Michigan 48824, USA
  4. Department of Electrical and Computer Engineering, Michigan State University, East Lansing, Michigan 48824, USA, Fraunhofer Center for Coatings and Diamond Technologies, Michigan State University, East Lansing, Michigan 48824, USA, Department of Chemical Engineering and Materials Science, Michigan State University, East Lansing, Michigan 48824, USA
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1714403
Grant/Contract Number:  
SC0001939
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Name: Applied Physics Letters Journal Volume: 117 Journal Issue: 20; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Fu, Yangyang, Zheng, Bocong, Wen, De-Qi, Zhang, Peng, Fan, Qi Hua, and Verboncoeur, John P. Similarity law and frequency scaling in low-pressure capacitive radio frequency plasmas. United States: N. p., 2020. Web. https://doi.org/10.1063/5.0029518.
Fu, Yangyang, Zheng, Bocong, Wen, De-Qi, Zhang, Peng, Fan, Qi Hua, & Verboncoeur, John P. Similarity law and frequency scaling in low-pressure capacitive radio frequency plasmas. United States. https://doi.org/10.1063/5.0029518
Fu, Yangyang, Zheng, Bocong, Wen, De-Qi, Zhang, Peng, Fan, Qi Hua, and Verboncoeur, John P. Mon . "Similarity law and frequency scaling in low-pressure capacitive radio frequency plasmas". United States. https://doi.org/10.1063/5.0029518.
@article{osti_1714403,
title = {Similarity law and frequency scaling in low-pressure capacitive radio frequency plasmas},
author = {Fu, Yangyang and Zheng, Bocong and Wen, De-Qi and Zhang, Peng and Fan, Qi Hua and Verboncoeur, John P.},
abstractNote = {},
doi = {10.1063/5.0029518},
journal = {Applied Physics Letters},
number = 20,
volume = 117,
place = {United States},
year = {2020},
month = {11}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
https://doi.org/10.1063/5.0029518

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