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Title: Pyroelectric and electrocaloric effects in ferroelectric silicon-doped hafnium oxide thin films

Abstract

The emergent ferroelectricity in HfO 2 -based systems has attracted significant attention as this simple binary high- k dielectric now offers the possibility of nonvolatile function. Here we employ zero-field and field-dependent pyroelectricity to show that thin films of silicon-doped HfO 2 do exhibit a broken-inversion symmetry and are indeed ferroelectric. In addition, the pyroelectric response is found to exhibit a wake-up behavior akin to the wake-up phenomenon observed in the ferroelectric polarization with electric-field cycling. Using polarization-electric field hysteresis measurements, this wake-up phenomenon is attributed to the presence of defect dipoles which explains the measured pyroelectric response. Finally, direct electrocaloric measurements are performed on these silicon-doped HfO 2 thin films, revealing an electrocaloric coefficient ~ 4 times larger in magnitude than that expected for the measured pyroelectric coefficient. This enhancement is explained using the plausible role played by defect dipoles that contribute to additional configurational or dipolar entropy.

Authors:
 [1];  [1];  [1];  [2]
  1. Univ. of California, Berkeley, CA (United States). Dept. of Materials Science and Engineering
  2. Univ. of California, Berkeley, CA (United States). Dept. of Materials Science and Engineering; Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Materials Sciences Division
Publication Date:
Research Org.:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division; US Army Research Office (ARO); National Science Foundation (NSF)
OSTI Identifier:
1633226
Alternate Identifier(s):
OSTI ID: 1489071
Grant/Contract Number:  
AC02-05CH11231; SC-0012375; W911NF-14-1-0104; DMR-1708615
Resource Type:
Accepted Manuscript
Journal Name:
Physical Review Materials
Additional Journal Information:
Journal Volume: 2; Journal Issue: 12; Journal ID: ISSN 2475-9953
Publisher:
American Physical Society (APS)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; electrocaloric effect; ferroelectricity; pyroelectricity; thin films

Citation Formats

Pandya, Shishir, Velarde, Gabriel, Zhang, Lei, and Martin, Lane W. Pyroelectric and electrocaloric effects in ferroelectric silicon-doped hafnium oxide thin films. United States: N. p., 2018. Web. doi:10.1103/physrevmaterials.2.124405.
Pandya, Shishir, Velarde, Gabriel, Zhang, Lei, & Martin, Lane W. Pyroelectric and electrocaloric effects in ferroelectric silicon-doped hafnium oxide thin films. United States. https://doi.org/10.1103/physrevmaterials.2.124405
Pandya, Shishir, Velarde, Gabriel, Zhang, Lei, and Martin, Lane W. Fri . "Pyroelectric and electrocaloric effects in ferroelectric silicon-doped hafnium oxide thin films". United States. https://doi.org/10.1103/physrevmaterials.2.124405. https://www.osti.gov/servlets/purl/1633226.
@article{osti_1633226,
title = {Pyroelectric and electrocaloric effects in ferroelectric silicon-doped hafnium oxide thin films},
author = {Pandya, Shishir and Velarde, Gabriel and Zhang, Lei and Martin, Lane W.},
abstractNote = {The emergent ferroelectricity in HfO2-based systems has attracted significant attention as this simple binary high-k dielectric now offers the possibility of nonvolatile function. Here we employ zero-field and field-dependent pyroelectricity to show that thin films of silicon-doped HfO2 do exhibit a broken-inversion symmetry and are indeed ferroelectric. In addition, the pyroelectric response is found to exhibit a wake-up behavior akin to the wake-up phenomenon observed in the ferroelectric polarization with electric-field cycling. Using polarization-electric field hysteresis measurements, this wake-up phenomenon is attributed to the presence of defect dipoles which explains the measured pyroelectric response. Finally, direct electrocaloric measurements are performed on these silicon-doped HfO2 thin films, revealing an electrocaloric coefficient ~4 times larger in magnitude than that expected for the measured pyroelectric coefficient. This enhancement is explained using the plausible role played by defect dipoles that contribute to additional configurational or dipolar entropy.},
doi = {10.1103/physrevmaterials.2.124405},
journal = {Physical Review Materials},
number = 12,
volume = 2,
place = {United States},
year = {Fri Dec 28 00:00:00 EST 2018},
month = {Fri Dec 28 00:00:00 EST 2018}
}

Journal Article:

Citation Metrics:
Cited by: 29 works
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Figures / Tables:

FIG. 1 FIG. 1: (a)–(e) Schematic illustration showing the fabrication of the electrothermal device through the various processing steps. (f) Cross-section view of the final device showing the various layers in the heterostructure.

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Works referenced in this record:

Ferroelectricity in Si-Doped HfO 2 Revealed: A Binary Lead-Free Ferroelectric
journal, October 2014

  • Martin, Dominik; Müller, Johannes; Schenk, Tony
  • Advanced Materials, Vol. 26, Issue 48
  • DOI: 10.1002/adma.201403115

Ferroelectric, dielectric and piezoelectric properties of ferroelectric thin films and ceramics
journal, September 1998


Layer thickness scaling and wake-up effect of pyroelectric response in Si-doped HfO 2
journal, January 2018

  • Mart, C.; Kämpfe, T.; Zybell, S.
  • Applied Physics Letters, Vol. 112, Issue 5
  • DOI: 10.1063/1.5019308

Photoacoustic measurement of thermal properties of TiN thin films
journal, December 2007

  • Albert Irudayaraj, A.; Srinivasan, R.; Kuppusami, P.
  • Journal of Materials Science, Vol. 43, Issue 3
  • DOI: 10.1007/s10853-007-2248-8

Pyroelectric energy conversion with large energy and power density in relaxor ferroelectric thin films
journal, April 2018


Thermal Properties of Ultrathin Hafnium Oxide Gate Dielectric Films
journal, December 2009

  • Panzer, M. A.; Shandalov, M.; Rowlette, J. A.
  • IEEE Electron Device Letters, Vol. 30, Issue 12
  • DOI: 10.1109/LED.2009.2032937

Thermal Conductivity of Silicon from 300 to 1400°K
journal, June 1963


TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO 2 thin films
journal, April 2015

  • Lomenzo, Patrick D.; Takmeel, Qanit; Zhou, Chuanzhen
  • Journal of Applied Physics, Vol. 117, Issue 13
  • DOI: 10.1063/1.4916715

Heat Capacities at Low Temperatures and Entropies at 298.16°K. of Hafnium Dioxide and Hafnium Tetrachloride
journal, June 1953

  • Todd, S. S.
  • Journal of the American Chemical Society, Vol. 75, Issue 12
  • DOI: 10.1021/ja01108a520

Complex Internal Bias Fields in Ferroelectric Hafnium Oxide
journal, August 2015

  • Schenk, Tony; Hoffmann, Michael; Ocker, Johannes
  • ACS Applied Materials & Interfaces, Vol. 7, Issue 36
  • DOI: 10.1021/acsami.5b05773

Removal of 90° domain pinning in (100) Pb(Zr0.15Ti0.85)O3 thin films by pulsed operation
journal, June 1998

  • Kohli, Markus; Muralt, Paul; Setter, Nava
  • Applied Physics Letters, Vol. 72, Issue 24
  • DOI: 10.1063/1.121554

Si Doped Hafnium Oxide-A “Fragile” Ferroelectric System
journal, August 2017

  • Richter, Claudia; Schenk, Tony; Park, Min Hyuk
  • Advanced Electronic Materials, Vol. 3, Issue 10
  • DOI: 10.1002/aelm.201700131

Direct Measurement of Pyroelectric and Electrocaloric Effects in Thin Films
journal, March 2017


Ferroelectric Hafnium Oxide Based Materials and Devices: Assessment of Current Status and Future Prospects
journal, January 2015

  • Müller, J.; Polakowski, P.; Mueller, S.
  • ECS Journal of Solid State Science and Technology, Vol. 4, Issue 5
  • DOI: 10.1149/2.0081505jss

Incipient Ferroelectricity in Al-Doped HfO2 Thin Films
journal, March 2012

  • Mueller, Stefan; Mueller, Johannes; Singh, Aarti
  • Advanced Functional Materials, Vol. 22, Issue 11
  • DOI: 10.1002/adfm.201103119

Highly efficient electrocaloric cooling with electrostatic actuation
journal, September 2017


Pyroelectricity of silicon-doped hafnium oxide thin films
journal, April 2018

  • Jachalke, Sven; Schenk, Tony; Park, Min Hyuk
  • Applied Physics Letters, Vol. 112, Issue 14
  • DOI: 10.1063/1.5023390

Pressure-Induced Phase Transformation of HfO2
journal, April 1992


Direct and indirect measurements on electrocaloric effect: Recent developments and perspectives
journal, September 2016

  • Liu, Yang; Scott, James F.; Dkhil, Brahim
  • Applied Physics Reviews, Vol. 3, Issue 3
  • DOI: 10.1063/1.4958327

Influence of defects on ferroelectric and electrocaloric properties of BaTiO 3
journal, April 2016


Ferroelectricity in yttrium-doped hafnium oxide
journal, December 2011

  • Müller, J.; Schröder, U.; Böscke, T. S.
  • Journal of Applied Physics, Vol. 110, Issue 11
  • DOI: 10.1063/1.3667205

Analysis of Performance Instabilities of Hafnia-Based Ferroelectrics Using Modulus Spectroscopy and Thermally Stimulated Depolarization Currents
journal, February 2018

  • Fengler, Franz P. G.; Nigon, Robin; Muralt, Paul
  • Advanced Electronic Materials, Vol. 4, Issue 3
  • DOI: 10.1002/aelm.201700547

De-aging of Fe-doped lead-zirconate-titanate ceramics by electric field cycling: 180°- vs. non-180° domain wall processes
journal, August 2012

  • Glaum, Julia; Genenko, Yuri A.; Kungl, Hans
  • Journal of Applied Physics, Vol. 112, Issue 3
  • DOI: 10.1063/1.4739721

Ferroelectricity in Simple Binary ZrO 2 and HfO 2
journal, July 2012

  • Müller, Johannes; Böscke, Tim S.; Schröder, Uwe
  • Nano Letters, Vol. 12, Issue 8
  • DOI: 10.1021/nl302049k

Wake-up effects in Si-doped hafnium oxide ferroelectric thin films
journal, November 2013

  • Zhou, Dayu; Xu, Jin; Li, Qing
  • Applied Physics Letters, Vol. 103, Issue 19
  • DOI: 10.1063/1.4829064

Internal bias in ferroelectric ceramics: Origin and time dependence
journal, November 1988


Reduction of the electrocaloric entropy change of ferroelectric PbZr 1 x Ti x O 3 epitaxial layers due to an elastocaloric effect
journal, September 2014


Use of low‐frequency sinusoidal temperature waves to separate pyroelectric currents from nonpyroelectric currents. Part II. Experiment
journal, December 1982

  • Sharp, Edward J.; Garn, Lynn E.
  • Journal of Applied Physics, Vol. 53, Issue 12
  • DOI: 10.1063/1.330455

Use of low‐frequency sinusoidal temperature waves to separate pyroelectric currents from nonpyroelectric currents. Part I. Theory
journal, December 1982

  • Garn, Lynn E.; Sharp, Edward J.
  • Journal of Applied Physics, Vol. 53, Issue 12
  • DOI: 10.1063/1.330454

Ferroelectric Conversion of Heat to Electrical EnergyA Demonstration
journal, March 1982

  • Olsen, Randall B.
  • Journal of Energy, Vol. 6, Issue 2
  • DOI: 10.2514/3.62580

Electronic domain pinning in Pb(Zr,Ti)O 3 thin films and its role in fatigue
journal, August 1994

  • Warren, W. L.; Dimos, D.; Tuttle, B. A.
  • Applied Physics Letters, Vol. 65, Issue 8
  • DOI: 10.1063/1.112211

Ferroelectric properties of lightly doped La:HfO 2 thin films grown by plasma-assisted atomic layer deposition
journal, September 2017

  • Kozodaev, M. G.; Chernikova, A. G.; Korostylev, E. V.
  • Applied Physics Letters, Vol. 111, Issue 13
  • DOI: 10.1063/1.4999291

Specific heat and thermal conductivity of low-stress amorphous Si–N membranes
journal, January 2004


Ferroelectric phase transitions in nanoscale HfO 2 films enable giant pyroelectric energy conversion and highly efficient supercapacitors
journal, November 2015


Positive and negative electrocaloric effect in BaTiO 3 in the presence of defect dipoles
journal, September 2016


First-principles study of structural, vibrational, and lattice dielectric properties of hafnium oxide
journal, June 2002


Ferroelectricity in undoped hafnium oxide
journal, June 2015

  • Polakowski, Patrick; Müller, Johannes
  • Applied Physics Letters, Vol. 106, Issue 23
  • DOI: 10.1063/1.4922272

Electrical after-effects in Pb(Ti, Zr)O3 ceramics
journal, January 1977


Giant Negative Electrocaloric Effects of Hf 0.5 Zr 0.5 O 2 Thin Films
journal, July 2016

  • Park, Min Hyuk; Kim, Han Joon; Kim, Yu Jin
  • Advanced Materials, Vol. 28, Issue 36
  • DOI: 10.1002/adma.201602787

Pyroelectric response in crystalline hafnium zirconium oxide (Hf 1- x Zr x O 2 ) thin films
journal, February 2017

  • Smith, S. W.; Kitahara, A. R.; Rodriguez, M. A.
  • Applied Physics Letters, Vol. 110, Issue 7
  • DOI: 10.1063/1.4976519

Crystal Structures of Two Orthorhombic Zirconias
journal, September 1991


Ferroelectricity in Gd-Doped HfO 2 Thin Films
journal, January 2012

  • Mueller, S.; Adelmann, C.; Singh, A.
  • ECS Journal of Solid State Science and Technology, Vol. 1, Issue 6
  • DOI: 10.1149/2.002301jss

Pathways towards ferroelectricity in hafnia
journal, August 2014


Ferroelectricity and Antiferroelectricity of Doped Thin HfO 2 -Based Films
journal, February 2015

  • Park, Min Hyuk; Lee, Young Hwan; Kim, Han Joon
  • Advanced Materials, Vol. 27, Issue 11
  • DOI: 10.1002/adma.201404531

In situ observation of reversible domain switching in aged Mn-doped BaTiO 3 single crystals
journal, May 2005


Ferroelectricity in hafnium oxide thin films
journal, September 2011

  • Böscke, T. S.; Müller, J.; Bräuhaus, D.
  • Applied Physics Letters, Vol. 99, Issue 10
  • DOI: 10.1063/1.3634052

Analysis of grain-boundary effects on the electrical properties of Pb(Zr,Ti)O3 thin films
journal, September 2002

  • Lee, Jang-Sik; Joo, Seung-Ki
  • Applied Physics Letters, Vol. 81, Issue 14
  • DOI: 10.1063/1.1511280

Voltage offsets in (Pb,La)(Zr,Ti)O 3 thin films
journal, January 1995

  • Pike, G. E.; Warren, W. L.; Dimos, D.
  • Applied Physics Letters, Vol. 66, Issue 4
  • DOI: 10.1063/1.114064

Silicon-doped hafnium oxide anti-ferroelectric thin films for energy storage
journal, October 2017

  • Ali, Faizan; Liu, Xiaohua; Zhou, Dayu
  • Journal of Applied Physics, Vol. 122, Issue 14
  • DOI: 10.1063/1.4989908

Works referencing / citing this record:

Pyroelectric Energy Conversion in Doped Hafnium Oxide (HfO 2 ) Thin Films on Area‐Enhanced Substrates
journal, July 2019

  • Hanrahan, Brendan; Mart, Clemens; Kämpfe, Thomas
  • Energy Technology, Vol. 7, Issue 10
  • DOI: 10.1002/ente.201900515

Enhanced electrocaloric effect in a Si-doped PbZr 0.95 Ti 0.05 O 3 film deposited on FTO substrate
journal, July 2019

  • Wang, Jinxin; Jiang, Guicheng; Huang, Weicheng
  • Applied Physics Letters, Vol. 115, Issue 5
  • DOI: 10.1063/1.5093697

Stabilization of ferroelectric phase of Hf 0.58 Zr 0.42 O 2 on NbN at 4 K
journal, March 2019

  • Henry, M. D.; Smith, S. W.; Lewis, R. M.
  • Applied Physics Letters, Vol. 114, Issue 9
  • DOI: 10.1063/1.5052435

Ferroelectric and pyroelectric properties of polycrystalline La-doped HfO 2 thin films
journal, March 2019

  • Mart, C.; Kühnel, K.; Kämpfe, T.
  • Applied Physics Letters, Vol. 114, Issue 10
  • DOI: 10.1063/1.5089821

Pyroelectric Energy Conversion in Doped Hafnium Oxide (HfO 2 ) Thin Films on Area‐Enhanced Substrates
journal, August 2019

  • Hanrahan, Brendan; Mart, Clemens; Kämpfe, Thomas
  • Energy Technology, Vol. 7, Issue 10
  • DOI: 10.1002/ente.201980371

Enhanced pyroelectric properties of Bi 1−x La x FeO 3 thin films
journal, November 2019

  • Zhang, Lei; Huang, Yen-Lin; Velarde, Gabriel
  • APL Materials, Vol. 7, Issue 11
  • DOI: 10.1063/1.5128413

Figures/Tables have been extracted from DOE-funded journal article accepted manuscripts.