Fluidized Bed Chemical Vapor Deposition of Zirconium Nitride Films
Abstract
A fluidized bed-chemical vapor deposition (FB-CVD) process was designed and established in a two-part experiment to produce zirconium nitride barrier coatings on uranium-molybdenum particles for a reduced enrichment dispersion fuel concept. A hot-wall, inverted fluidized bed reaction vessel was developed for this process, and coatings were produced from thermal decomposition of the metallo-organic precursor tetrakis(dimethylamino)zirconium (TDMAZ) in high purity argon gas. Experiments were executed at atmospheric pressure and low substrate temperatures (i.e., 500 to 550 K). Deposited coatings were characterized using scanning electron microscopy, energy dispersive spectroscopy, and wavelength dispersive spectroscopy. Successful depositions were produced on 1 mm diameter tungsten wires and fluidized ZrO2 -SiO2 microspheres (185 to 250 µm diameter) with coating thicknesses ranging from 0.5 to 30 µm. The coating deposition rate was nominally estimated to be 0.04 ± 0.02 µm/h. The ZrN coating adhered to the microspheres but there was a significant oxygen and possible carbon contamination.
- Authors:
-
[2];
[3]
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Idaho National Lab. (INL), Idaho Falls, ID (United States)
- Texas A & M Univ., College Station, TX (United States)
- Publication Date:
- Research Org.:
- Idaho National Lab. (INL), Idaho Falls, ID (United States)
- Sponsoring Org.:
- USDOE Office of Energy Efficiency and Renewable Energy (EERE)
- OSTI Identifier:
- 1631702
- Report Number(s):
- INL/JOU-17-42260-Rev000
Journal ID: ISSN 0029-5450; TRN: US2201008
- Grant/Contract Number:
- AC07-05ID14517
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Nuclear Technology
- Additional Journal Information:
- Journal Volume: 199; Journal Issue: 2; Journal ID: ISSN 0029-5450
- Publisher:
- Taylor & Francis - formerly American Nuclear Society (ANS)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS; FB-CVD; ZrN coatings and uranium-molybdenum particles
Citation Formats
Arrieta, Marie Y., Keiser, Jr, Dennis D., Perez-Nunez, Delia, and McDeavitt, Sean M. Fluidized Bed Chemical Vapor Deposition of Zirconium Nitride Films. United States: N. p., 2017.
Web. doi:10.1080/00295450.2017.1336028.
Arrieta, Marie Y., Keiser, Jr, Dennis D., Perez-Nunez, Delia, & McDeavitt, Sean M. Fluidized Bed Chemical Vapor Deposition of Zirconium Nitride Films. United States. https://doi.org/10.1080/00295450.2017.1336028
Arrieta, Marie Y., Keiser, Jr, Dennis D., Perez-Nunez, Delia, and McDeavitt, Sean M. Thu .
"Fluidized Bed Chemical Vapor Deposition of Zirconium Nitride Films". United States. https://doi.org/10.1080/00295450.2017.1336028. https://www.osti.gov/servlets/purl/1631702.
@article{osti_1631702,
title = {Fluidized Bed Chemical Vapor Deposition of Zirconium Nitride Films},
author = {Arrieta, Marie Y. and Keiser, Jr, Dennis D. and Perez-Nunez, Delia and McDeavitt, Sean M.},
abstractNote = {A fluidized bed-chemical vapor deposition (FB-CVD) process was designed and established in a two-part experiment to produce zirconium nitride barrier coatings on uranium-molybdenum particles for a reduced enrichment dispersion fuel concept. A hot-wall, inverted fluidized bed reaction vessel was developed for this process, and coatings were produced from thermal decomposition of the metallo-organic precursor tetrakis(dimethylamino)zirconium (TDMAZ) in high purity argon gas. Experiments were executed at atmospheric pressure and low substrate temperatures (i.e., 500 to 550 K). Deposited coatings were characterized using scanning electron microscopy, energy dispersive spectroscopy, and wavelength dispersive spectroscopy. Successful depositions were produced on 1 mm diameter tungsten wires and fluidized ZrO2 -SiO2 microspheres (185 to 250 µm diameter) with coating thicknesses ranging from 0.5 to 30 µm. The coating deposition rate was nominally estimated to be 0.04 ± 0.02 µm/h. The ZrN coating adhered to the microspheres but there was a significant oxygen and possible carbon contamination.},
doi = {10.1080/00295450.2017.1336028},
journal = {Nuclear Technology},
number = 2,
volume = 199,
place = {United States},
year = {Thu Jul 27 00:00:00 EDT 2017},
month = {Thu Jul 27 00:00:00 EDT 2017}
}
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Works referencing / citing this record:
Fabrication of ZrN Barrier Coatings for U-Mo Microspheres Via Fluidized Bed Chemical Vapor Deposition Using a Metalorganic Precursor
journal, February 2018
- Sudderth, L.; Perez-Nunez, D.; Keiser, D.
- Nuclear Technology, Vol. 202, Issue 1