Characterization of hard nitride and carbide titanium and zirconium coatings on high-speed steel cutting tool inserts
Hard nitride and carbide coatings of titanium and zirconium deposited by reactive evaporation and reactive sputtering techniques were characterized by electron microscopy and Auger spectroscopy to determine the effect of coating process on coating composition and microstructure. Analysis of the chemical composition by Auger spectroscopy revealed the coatings were of high purity with slight differences in stoichiometry depending on the coating technique. Both techniques produced coatings with a columnar microstructure. However, the reactive sputtering technique produced coarser (shorter and wider) columnar grains than the reactive evaporation technique. Furthermore, selected area diffraction analysis of reactively sputtered ZrN coatings showed a two-phased zone (hcp Zr and fcc ZrN) near the substrate/coating interface, while TiC coatings deposited by reactive sputtering and evaporation only showed a single-phase region of fcc TiC.
- Research Organization:
- Argonne National Laboratory, Argonne, Illinois 60439
- DOE Contract Number:
- W-31-109-ENG-38
- OSTI ID:
- 7252813
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Vol. 4:6
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
CUTTING TOOLS
COATINGS
STEELS
TITANIUM CARBIDES
CHEMICAL COMPOSITION
CRYSTAL-PHASE TRANSFORMATIONS
MICROSTRUCTURE
SURFACE COATING
TITANIUM NITRIDES
ZIRCONIUM CARBIDES
ZIRCONIUM NITRIDES
INTERFACES
SPUTTERING
STOICHIOMETRY
VACUUM COATING
VACUUM EVAPORATION
ALLOYS
CARBIDES
CARBON COMPOUNDS
CRYSTAL STRUCTURE
DEPOSITION
EVAPORATION
IRON ALLOYS
IRON BASE ALLOYS
NITRIDES
NITROGEN COMPOUNDS
PHASE TRANSFORMATIONS
PNICTIDES
TITANIUM COMPOUNDS
TOOLS
TRANSITION ELEMENT COMPOUNDS
ZIRCONIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360202 - Ceramics
Cermets
& Refractories- Structure & Phase Studies