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Title: Structural and electronic properties of Ga2O3-Al2O3 alloys

Abstract

Ga2O3 is emerging as an important electronic material. Alloying with Al2O3 is a viable method to achieve carrier confinement, to increase the bandgap, or to modify the lattice parameters. However, the two materials have very different ground-state crystal structures (monoclinic β-gallia for Ga2O3 and corundum for Al2O3). Here in this paper, we use hybrid density functional theory calculations to assess the alloy stabilities and electronic properties of the alloys. We find that the monoclinic phase is the preferred structure for up to 71% Al incorporation, in close agreement with experimental phase diagrams, and that the ordered monoclinic AlGaO3 alloy is exceptionally stable. We also discuss bandgap bowing, lattice constants, and band offsets that can guide future synthesis and device design efforts.

Authors:
ORCiD logo [1];  [2];  [1]; ORCiD logo [1]
  1. Univ. of California, Santa Barbara, CA (United States). Materials Dept.
  2. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1497947
Alternate Identifier(s):
OSTI ID: 1441125
Report Number(s):
LLNL-JRNL-752768
Journal ID: ISSN 0003-6951; 938776
Grant/Contract Number:  
AC52-07NA27344
Resource Type:
Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 112; Journal Issue: 24; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Peelaers, Hartwin, Varley, Joel B., Speck, James S., and Van de Walle, Chris G. Structural and electronic properties of Ga2O3-Al2O3 alloys. United States: N. p., 2018. Web. doi:10.1063/1.5036991.
Peelaers, Hartwin, Varley, Joel B., Speck, James S., & Van de Walle, Chris G. Structural and electronic properties of Ga2O3-Al2O3 alloys. United States. https://doi.org/10.1063/1.5036991
Peelaers, Hartwin, Varley, Joel B., Speck, James S., and Van de Walle, Chris G. Mon . "Structural and electronic properties of Ga2O3-Al2O3 alloys". United States. https://doi.org/10.1063/1.5036991. https://www.osti.gov/servlets/purl/1497947.
@article{osti_1497947,
title = {Structural and electronic properties of Ga2O3-Al2O3 alloys},
author = {Peelaers, Hartwin and Varley, Joel B. and Speck, James S. and Van de Walle, Chris G.},
abstractNote = {Ga2O3 is emerging as an important electronic material. Alloying with Al2O3 is a viable method to achieve carrier confinement, to increase the bandgap, or to modify the lattice parameters. However, the two materials have very different ground-state crystal structures (monoclinic β-gallia for Ga2O3 and corundum for Al2O3). Here in this paper, we use hybrid density functional theory calculations to assess the alloy stabilities and electronic properties of the alloys. We find that the monoclinic phase is the preferred structure for up to 71% Al incorporation, in close agreement with experimental phase diagrams, and that the ordered monoclinic AlGaO3 alloy is exceptionally stable. We also discuss bandgap bowing, lattice constants, and band offsets that can guide future synthesis and device design efforts.},
doi = {10.1063/1.5036991},
journal = {Applied Physics Letters},
number = 24,
volume = 112,
place = {United States},
year = {Mon Jun 11 00:00:00 EDT 2018},
month = {Mon Jun 11 00:00:00 EDT 2018}
}

Journal Article:
Free Publicly Available Full Text
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Citation Metrics:
Cited by: 149 works
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Figures / Tables:

FIG. 1 FIG. 1: Pseudocubic lattice parameter as a function of alloy composition $x$ for the corundum and mono-clinic structures. Experimental values for mono-clinic are shown as solid black triangles (Ref. 24), open triangles (Ref. 19), and solid downward triangles (Ref. 25). The top inset shows the monoclinic unit cell and themore » bottom inset the corundum unit cell. Octahedrally coordinated sites are indicated in blue and tetrahedrally coordinated sites in green. Small red spheres depict O atoms.« less

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Works referenced in this record:

Hydrogenated cation vacancies in semiconducting oxides
journal, August 2011


The Liquidus Curve of the ZrO 2 -Y 2 O 3 System as Measured by a Solar Furnace
journal, August 1970

  • Noguchi, Tetsuo; Mizuno, Masao; Yamada, Toyoaki
  • Bulletin of the Chemical Society of Japan, Vol. 43, Issue 8
  • DOI: 10.1246/bcsj.43.2614

Phase Relations and Lattice Constants in the MgO-Al2O3-Ga2O3 System at 1550°C
journal, January 1997


β-Al 2 x Ga 2-2 x O 3 Thin Film Growth by Molecular Beam Epitaxy
journal, July 2009

  • Oshima, Takayoshi; Okuno, Takeya; Arai, Naoki
  • Japanese Journal of Applied Physics, Vol. 48, Issue 7
  • DOI: 10.1143/JJAP.48.070202

Epitaxial growth and electric properties of γ-Al 2 O 3 (110) films on β-Ga 2 O 3 (010) substrates
journal, October 2016

  • Hattori, Mai; Oshima, Takayoshi; Wakabayashi, Ryo
  • Japanese Journal of Applied Physics, Vol. 55, Issue 12
  • DOI: 10.7567/JJAP.55.1202B6

Projector augmented-wave method
journal, December 1994


Modulation-doped β-(Al 0.2 Ga 0.8 ) 2 O 3 /Ga 2 O 3 field-effect transistor
journal, July 2017

  • Krishnamoorthy, Sriram; Xia, Zhanbo; Joishi, Chandan
  • Applied Physics Letters, Vol. 111, Issue 2
  • DOI: 10.1063/1.4993569

Hybrid functionals based on a screened Coulomb potential
journal, May 2003

  • Heyd, Jochen; Scuseria, Gustavo E.; Ernzerhof, Matthias
  • The Journal of Chemical Physics, Vol. 118, Issue 18
  • DOI: 10.1063/1.1564060

High-voltage field effect transistors with wide-bandgap β -Ga 2 O 3 nanomembranes
journal, May 2014

  • Hwang, Wan Sik; Verma, Amit; Peelaers, Hartwin
  • Applied Physics Letters, Vol. 104, Issue 20
  • DOI: 10.1063/1.4879800

Refinement of the α Al 2 O 3 , Ti 2 O 3 , V 2 O 3 and Cr 2 O 3 structures*
journal, August 1962


Structures and transformation mechanisms of the η, γ and θ transition aluminas
journal, October 1991

  • Zhou, R. S.; Snyder, R. L.
  • Acta Crystallographica Section B Structural Science, Vol. 47, Issue 5
  • DOI: 10.1107/S0108768191002719

Carrier confinement observed at modulation-doped β-(Al x Ga 1− x ) 2 O 3 /Ga 2 O 3 heterojunction interface
journal, February 2017

  • Oshima, Takayoshi; Kato, Yuji; Kawano, Naoto
  • Applied Physics Express, Vol. 10, Issue 3
  • DOI: 10.7567/APEX.10.035701

A survey of acceptor dopants for β -Ga 2 O 3
journal, April 2018


( In x Ga 1 x ) 2 O 3 alloys for transparent electronics
journal, August 2015


Growth characteristics of corundum-structured α-(Al Ga1−)2O3/Ga2O3 heterostructures on sapphire substrates
journal, February 2016


Lattice parameters and Raman-active phonon modes of β -(Al x Ga 1− x ) 2 O 3
journal, March 2015

  • Kranert, Christian; Jenderka, Marcus; Lenzner, Jörg
  • Journal of Applied Physics, Vol. 117, Issue 12
  • DOI: 10.1063/1.4915627

Efficient iterative schemes for ab initio total-energy calculations using a plane-wave basis set
journal, October 1996


A Reinvestigation of β-Gallium Oxide
journal, June 1996

  • Åhman, J.; Svensson, G.; Albertsson, J.
  • Acta Crystallographica Section C Crystal Structure Communications, Vol. 52, Issue 6
  • DOI: 10.1107/S0108270195016404

Subsolidus Phase Relationships in the Ga2O3-Al2O3-TiO2 System
journal, September 2005


Deep ultraviolet photodiodes based on β-Ga 2 O 3 /SiC heterojunction
journal, August 2013

  • Nakagomi, Shinji; Momo, Toshihiro; Takahashi, Syuhei
  • Applied Physics Letters, Vol. 103, Issue 7
  • DOI: 10.1063/1.4818620

Energy band line-up of atomic layer deposited Al 2 O 3 on β-Ga 2 O 3
journal, April 2014

  • Hung, Ting-Hsiang; Sasaki, Kohei; Kuramata, Akito
  • Applied Physics Letters, Vol. 104, Issue 16
  • DOI: 10.1063/1.4873546

β -(Al x Ga 1−x ) 2 O 3 /Ga 2 O 3 (010) heterostructures grown on β -Ga 2 O 3 (010) substrates by plasma-assisted molecular beam epitaxy
journal, July 2015

  • Kaun, Stephen W.; Wu, Feng; Speck, James S.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 4
  • DOI: 10.1116/1.4922340

Bond Lengths in the α‐Ga 2 O 3 Structure and the High‐Pressure Phase of Ga 2− x Fe x O 3
journal, March 1967

  • Marezio, M.; Remeika, J. P.
  • The Journal of Chemical Physics, Vol. 46, Issue 5
  • DOI: 10.1063/1.1840945

Temperature dependence of Raman scattering in β-(AlGa)2O3 thin films
journal, January 2016

  • Wang, Xu; Chen, Zhengwei; Zhang, Fabi
  • AIP Advances, Vol. 6, Issue 1
  • DOI: 10.1063/1.4940763

Gallium oxide (Ga 2 O 3 ) metal-semiconductor field-effect transistors on single-crystal β-Ga 2 O 3 (010) substrates
journal, January 2012

  • Higashiwaki, Masataka; Sasaki, Kohei; Kuramata, Akito
  • Applied Physics Letters, Vol. 100, Issue 1
  • DOI: 10.1063/1.3674287

Dielectric function in the spectral range (0.5–8.5)eV of an (Al x Ga1−x) 2 O 3 thin film with continuous composition spread
journal, April 2015

  • Schmidt-Grund, R.; Kranert, C.; von Wenckstern, H.
  • Journal of Applied Physics, Vol. 117, Issue 16
  • DOI: 10.1063/1.4919088

Polymorphism of Ga 2 O 3 and the System Ga 2 O 3 —H 2 O
journal, February 1952

  • Roy, Rustum; Hill, V. G.; Osborn, E. F.
  • Journal of the American Chemical Society, Vol. 74, Issue 3
  • DOI: 10.1021/ja01123a039

Wide bandgap engineering of (AlGa) 2 O 3 films
journal, October 2014

  • Zhang, Fabi; Saito, Katsuhiko; Tanaka, Tooru
  • Applied Physics Letters, Vol. 105, Issue 16
  • DOI: 10.1063/1.4900522

Schottky barrier height of Ni to β -(Al x Ga 1−x ) 2 O 3 with different compositions grown by plasma-assisted molecular beam epitaxy
journal, January 2017

  • Ahmadi, Elaheh; Oshima, Yuichi; Wu, Feng
  • Semiconductor Science and Technology, Vol. 32, Issue 3
  • DOI: 10.1088/1361-6641/aa53a7

Valence band ordering in β-Ga 2 O 3 studied by polarized transmittance and reflectance spectroscopy
journal, October 2015

  • Onuma, Takeyoshi; Saito, Shingo; Sasaki, Kohei
  • Japanese Journal of Applied Physics, Vol. 54, Issue 11
  • DOI: 10.7567/JJAP.54.112601

(AlGa)_2O_3 solar-blind photodetectors on sapphire with wider bandgap and improved responsivity
journal, January 2017

  • Feng, Qian; Li, Xiang; Han, Genquan
  • Optical Materials Express, Vol. 7, Issue 4
  • DOI: 10.1364/OME.7.001240

Sub-band-gap absorption in Ga 2 O 3
journal, October 2017

  • Peelaers, Hartwin; Van de Walle, Chris G.
  • Applied Physics Letters, Vol. 111, Issue 18
  • DOI: 10.1063/1.5001323

Variation of Band Gap and Lattice Parameters of β−(Al x Ga 1− x ) 2 O 3 Powder Produced by Solution Combustion Synthesis
journal, March 2016

  • Krueger, Benjamin W.; Dandeneau, Christopher S.; Nelson, Evan M.
  • Journal of the American Ceramic Society, Vol. 99, Issue 7
  • DOI: 10.1111/jace.14222

Erratum: “Hybrid functionals based on a screened Coulomb potential” [J. Chem. Phys. 118, 8207 (2003)]
journal, June 2006

  • Heyd, Jochen; Scuseria, Gustavo E.; Ernzerhof, Matthias
  • The Journal of Chemical Physics, Vol. 124, Issue 21
  • DOI: 10.1063/1.2204597

High-Efficiency Cu 2 O-Based Heterojunction Solar Cells Fabricated Using a Ga 2 O 3 Thin Film as N-Type Layer
journal, April 2013

  • Minami, Tadatsugu; Nishi, Yuki; Miyata, Toshihiro
  • Applied Physics Express, Vol. 6, Issue 4
  • DOI: 10.7567/APEX.6.044101

The System Alumina-Gallia-Water
journal, June 1952


Absorption and Reflection of Vapor Grown Single Crystal Platelets of β-Ga 2 O 3
journal, October 1974

  • Matsumoto, Takashi; Aoki, Masaharu; Kinoshita, Akira
  • Japanese Journal of Applied Physics, Vol. 13, Issue 10
  • DOI: 10.1143/JJAP.13.1578

$\hbox{Ga}_{2} \hbox{O}_{3}$ Schottky Barrier Diodes Fabricated by Using Single-Crystal $\beta$– $\hbox{Ga}_{2} \hbox{O}_{3}$ (010) Substrates
journal, April 2013

  • Sasaki, Kohei; Higashiwaki, Masataka; Kuramata, Akito
  • IEEE Electron Device Letters, Vol. 34, Issue 4
  • DOI: 10.1109/LED.2013.2244057

Brillouin zone and band structure of β-Ga 2 O 3 : Brillouin zone and band structure of β-Ga
journal, January 2015

  • Peelaers, Hartwin; Van de Walle, Chris G.
  • physica status solidi (b), Vol. 252, Issue 4
  • DOI: 10.1002/pssb.201451551

On the feasibility of p-type Ga 2 O 3
journal, January 2018

  • Kyrtsos, Alexandros; Matsubara, Masahiko; Bellotti, Enrico
  • Applied Physics Letters, Vol. 112, Issue 3
  • DOI: 10.1063/1.5009423

Band alignment and electrical properties of Al 2 O 3 / β -Ga 2 O 3 heterojunctions
journal, May 2014

  • Kamimura, Takafumi; Sasaki, Kohei; Hoi Wong, Man
  • Applied Physics Letters, Vol. 104, Issue 19
  • DOI: 10.1063/1.4876920

Band alignment of Al 2 O 3 with (−201) β-Ga 2 O 3
journal, August 2017


Anisotropy of electrical and optical properties in β-Ga2O3 single crystals
journal, August 1997

  • Ueda, Naoyuki; Hosono, Hideo; Waseda, Ryuta
  • Applied Physics Letters, Vol. 71, Issue 7
  • DOI: 10.1063/1.119693

Growth and Band Gap Control of Corundum-Structured $\alpha$-(AlGa)$_{2}$O$_{3}$ Thin Films on Sapphire by Spray-Assisted Mist Chemical Vapor Deposition
journal, October 2012

  • Ito, Hiroshi; Kaneko, Kentaro; Fujita, Shizuo
  • Japanese Journal of Applied Physics, Vol. 51
  • DOI: 10.1143/JJAP.51.100207

Enhanced thermal stability of alpha gallium oxide films supported by aluminum doping
journal, February 2015

  • Lee, Sam-Dong; Ito, Yoshito; Kaneko, Kentaro
  • Japanese Journal of Applied Physics, Vol. 54, Issue 3
  • DOI: 10.7567/JJAP.54.030301

Oxygen vacancies and donor impurities in β-Ga2O3
journal, October 2010

  • Varley, J. B.; Weber, J. R.; Janotti, A.
  • Applied Physics Letters, Vol. 97, Issue 14
  • DOI: 10.1063/1.3499306

Electronic Band Structure of Al2O3, with Comparison to Alon and AIN
journal, March 1990


Electronic structure of AlFeN films exhibiting crystallographic orientation change from c- to a-axis with Fe concentrations and annealing effect
journal, February 2020


Works referencing / citing this record:

Quasiparticle Self‐Consistent GW Study of (Ga 1− x Al x ) 2 O 3 Alloys in Monoclinic and Corundum Structures
journal, September 2019

  • Ratnaparkhe, Amol; Lambrecht, Walter R. L.
  • physica status solidi (b), Vol. 257, Issue 1
  • DOI: 10.1002/pssb.201900317

Mechanism Behind the Easy Exfoliation of Ga 2 O 3 Ultra‐Thin Film Along (100) Surface
journal, January 2019

  • Barman, Sajib K.; Huda, Muhammad N.
  • physica status solidi (RRL) – Rapid Research Letters, Vol. 13, Issue 5
  • DOI: 10.1002/pssr.201800554

Valence- and Conduction-Band Offsets for Atomic-Layer-Deposited Al2O3 on (010) (Al0.14Ga0.86)2O3
journal, January 2019


Transition from electron accumulation to depletion at β-Ga 2 O 3 surfaces: The role of hydrogen and the charge neutrality level
journal, February 2019

  • Swallow, J. E. N.; Varley, J. B.; Jones, L. A. H.
  • APL Materials, Vol. 7, Issue 2
  • DOI: 10.1063/1.5054091

Valence band offsets for CuI on (-201) bulk Ga 2 O 3 and epitaxial (010) (Al 0.14 Ga 0.86 ) 2 O 3
journal, October 2018

  • Fares, Chaker; Ren, F.; Hays, David C.
  • Applied Physics Letters, Vol. 113, Issue 18
  • DOI: 10.1063/1.5055941

Perspective: Ga 2 O 3 for ultra-high power rectifiers and MOSFETS
journal, December 2018

  • Pearton, S. J.; Ren, Fan; Tadjer, Marko
  • Journal of Applied Physics, Vol. 124, Issue 22
  • DOI: 10.1063/1.5062841

Electronic properties of monoclinic (In x Ga 1-x ) 2 O 3 alloys by first-principle
journal, March 2019


Dielectric function tensor (1.5 eV to 9.0 eV), anisotropy, and band to band transitions of monoclinic β -(Al x Ga 1– x ) 2 O 3 ( x ≤ 0.21) films
journal, June 2019

  • Hilfiker, Matthew; Kilic, Ufuk; Mock, Alyssa
  • Applied Physics Letters, Vol. 114, Issue 23
  • DOI: 10.1063/1.5097780

MOCVD epitaxy of β -(Al x Ga 1−x ) 2 O 3 thin films on (010) Ga 2 O 3 substrates and N-type doping
journal, September 2019

  • Anhar Uddin Bhuiyan, A. F. M.; Feng, Zixuan; Johnson, Jared M.
  • Applied Physics Letters, Vol. 115, Issue 12
  • DOI: 10.1063/1.5123495

Erratum: “Structural and electronic properties of Ga 2 O 3 -Al 2 O 3 alloys” [Appl. Phys. Lett. 112 , 242101 (2018)]
journal, October 2019

  • Peelaers, Hartwin; Varley, Joel B.; Speck, James S.
  • Applied Physics Letters, Vol. 115, Issue 15
  • DOI: 10.1063/1.5127763

Ab initio study of enhanced thermal conductivity in ordered AlGaO 3 alloys
journal, December 2019

  • Mu, Sai; Peelaers, Hartwin; Van de Walle, Chris G.
  • Applied Physics Letters, Vol. 115, Issue 24
  • DOI: 10.1063/1.5131755

Phase transformation in MOCVD growth of (Al x Ga 1−x ) 2 O 3 thin films
journal, March 2020

  • Bhuiyan, A. F. M. Anhar Uddin; Feng, Zixuan; Johnson, Jared M.
  • APL Materials, Vol. 8, Issue 3
  • DOI: 10.1063/1.5140345

The diverse electronic properties of C/BN heteronanotubes with polar discontinuity
journal, March 2019

  • Wang, Yuanyuan; Wei, Wei; Wang, Hao
  • Journal of Physics D: Applied Physics, Vol. 52, Issue 21
  • DOI: 10.1088/1361-6463/ab035f

Valence and conduction band offsets for sputtered AZO and ITO on (010) (Al 0.14 Ga 0.86 ) 2 O 3
journal, January 2019

  • Fares, Chaker; Ren, F.; Lambers, Eric
  • Semiconductor Science and Technology, Vol. 34, Issue 2
  • DOI: 10.1088/1361-6641/aaf8d7

First-principle investigation of monoclinic (Al x In y Ga 1− xy ) 2 O 3 quaternary alloys
journal, January 2020


Band Offsets for Atomic Layer Deposited HfSiO 4 on (Al 0.14 Ga 0.86 ) 2 O 3
journal, January 2018

  • Fares, Chaker; Ren, F.; Lambers, Eric
  • ECS Journal of Solid State Science and Technology, Vol. 7, Issue 10
  • DOI: 10.1149/2.0041810jss

Electronic Properties of Ga 2 O 3 Polymorphs
journal, January 2019

  • Lyons, John L.
  • ECS Journal of Solid State Science and Technology, Vol. 8, Issue 7
  • DOI: 10.1149/2.0331907jss

Erratum: “Structural and electronic properties of Ga 2 O 3 -Al 2 O 3 alloys” [Appl. Phys. Lett. 112 , 242101 (2018)]
journal, June 2021

  • Peelaers, Hartwin; Varley, Joel B.; Speck, James S.
  • Applied Physics Letters, Vol. 118, Issue 25
  • DOI: 10.1063/5.0059239

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