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Title: Crystallization of electrically conductive visibly transparent ITO thin films by wavelength-range-specific pulsed Xe arc lamp annealing

Abstract

Here, the transparent electric conductors made of indium tin oxide (ITO)-doped glass prepared by a flash lamp annealing (FLA) process were compared with ITO-doped glass prepared via a conventional rapid thermal annealing (RTA) process. Stylus surface profilometry was used to determine thicknesses, scanning electron microscopy was used to image surfaces, X-ray diffraction was used to determine film structures, X-ray photoelectron spectroscopy was used to determine oxidation states and film compositions, 4-point probe measurements were used to determine electrical conductivities, UV–Vis spectroscopy was used to determine film transparencies, and selective light filtering was used to determine which wavelengths of light are needed to anneal ITO into a visibly transparent electrically conductive thin film via an FLA process. The results showed that FLA with visible light can be used to nearly instantaneously anneal ITO to create visibly transparent and electrically conductive ITO thin films on glass. The FLA process achieved this by predominately exciting unoxidized indium, unoxidized tin, tin monoxide (SnO), and non-stoichiometric indium oxide (InO x ), appropriately distributed in an electron beam physical vapor-deposited amorphous ITO thin film, to allow their oxidation and crystallization into an electrically conductive visibly transparent ITO. Though it is possible to prepare ITO-doped glass thatmore » is more transparent with an RTA process, the FLA process is significantly faster, has comparable electrical conductivity, and can strongly localize heating to areas of the as-deposited ITO thin film that are not electrically conductive and visibly transparent.« less

Authors:
ORCiD logo [1]; ORCiD logo [2]; ORCiD logo [3]; ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [3]; ORCiD logo [4]
+ Show Author Affiliations
  1. Univ. of New Mexico, Albuquerque, NM (United States)
  2. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
  3. Kirtland Air Force Base, Albuquerque, NM (United States)
  4. Univ. of New Mexico, Albuquerque, NM (United States); Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1482732
Report Number(s):
SAND-2018-12167J
Journal ID: ISSN 0022-2461; 669073
Grant/Contract Number:  
AC04-94AL85000
Resource Type:
Accepted Manuscript
Journal Name:
Journal of Materials Science
Additional Journal Information:
Journal Volume: 53; Journal Issue: 18; Journal ID: ISSN 0022-2461
Publisher:
Springer
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; Thin films; flash lamp annealing; rapid thermal annealing; indium tin oxide; resistivity; transparent conducting oxide

Citation Formats

Plumley, John Bryan, Cook, Adam W., Larsen, Christopher A., Artyushkova, Kateryna, Han, Sang M., Peng, Thomas L., and Kemp, Richard A. Crystallization of electrically conductive visibly transparent ITO thin films by wavelength-range-specific pulsed Xe arc lamp annealing. United States: N. p., 2018. Web. doi:10.1007/s10853-018-2534-7.
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Plumley, John Bryan, Cook, Adam W., Larsen, Christopher A., Artyushkova, Kateryna, Han, Sang M., Peng, Thomas L., & Kemp, Richard A. Crystallization of electrically conductive visibly transparent ITO thin films by wavelength-range-specific pulsed Xe arc lamp annealing. United States. https://doi.org/10.1007/s10853-018-2534-7
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Plumley, John Bryan, Cook, Adam W., Larsen, Christopher A., Artyushkova, Kateryna, Han, Sang M., Peng, Thomas L., and Kemp, Richard A. Fri . "Crystallization of electrically conductive visibly transparent ITO thin films by wavelength-range-specific pulsed Xe arc lamp annealing". United States. https://doi.org/10.1007/s10853-018-2534-7. https://www.osti.gov/servlets/purl/1482732.
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@article{osti_1482732,
title = {Crystallization of electrically conductive visibly transparent ITO thin films by wavelength-range-specific pulsed Xe arc lamp annealing},
author = {Plumley, John Bryan and Cook, Adam W. and Larsen, Christopher A. and Artyushkova, Kateryna and Han, Sang M. and Peng, Thomas L. and Kemp, Richard A.},
abstractNote = {Here, the transparent electric conductors made of indium tin oxide (ITO)-doped glass prepared by a flash lamp annealing (FLA) process were compared with ITO-doped glass prepared via a conventional rapid thermal annealing (RTA) process. Stylus surface profilometry was used to determine thicknesses, scanning electron microscopy was used to image surfaces, X-ray diffraction was used to determine film structures, X-ray photoelectron spectroscopy was used to determine oxidation states and film compositions, 4-point probe measurements were used to determine electrical conductivities, UV–Vis spectroscopy was used to determine film transparencies, and selective light filtering was used to determine which wavelengths of light are needed to anneal ITO into a visibly transparent electrically conductive thin film via an FLA process. The results showed that FLA with visible light can be used to nearly instantaneously anneal ITO to create visibly transparent and electrically conductive ITO thin films on glass. The FLA process achieved this by predominately exciting unoxidized indium, unoxidized tin, tin monoxide (SnO), and non-stoichiometric indium oxide (InO x ), appropriately distributed in an electron beam physical vapor-deposited amorphous ITO thin film, to allow their oxidation and crystallization into an electrically conductive visibly transparent ITO. Though it is possible to prepare ITO-doped glass that is more transparent with an RTA process, the FLA process is significantly faster, has comparable electrical conductivity, and can strongly localize heating to areas of the as-deposited ITO thin film that are not electrically conductive and visibly transparent.},
doi = {10.1007/s10853-018-2534-7},
journal = {Journal of Materials Science},
number = 18,
volume = 53,
place = {United States},
year = {2018},
month = {6}
}
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Journal Article:
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Publisher's Version of Record
https://doi.org/10.1007/s10853-018-2534-7
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Figures / Tables:

Fig. 1 Fig. 1: 200Å of ITO deposited onto a glass substrate (a) as deposited, (b) after FLA treatment in a circular area, and (c) after RTA treatment
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    Works referencing / citing this record:

    Preparation of Pd/GO/ITO composite electrode and degradation of 2,4-chlorophene
    journal, October 2019

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      Figures / Tables found in this record:

      Fig. 1 (p. 7)figure
      Fig. 2 (p. 8)figure
      Fig. 3 (p. 9)figure
      Fig. 4 (p. 10)figure
      Table 1 (p. 10)table
      Table 2 (p. 11)table
      Fig. 5 (p. 12)figure
      Fig. 6 (p. 13)figure
      Fig. 7 (p. 14)figure
      Fig. 8 (p. 14)figure
      Table 3 (p. 15)table
      Fig. 9 (p. 17)figure
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