DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Review of phase measuring deflectometry

Abstract

As a low cost, full-field three-dimensional shape measurement technique with high dynamic range, Phase Measuring Deflectometry (PMD) has been studied and improved to be a simple and effective manner to inspect specular reflecting surfaces. In this review, the fundamental principle and the basic concepts of PMD technique are introduced and followed by a brief overview of its key developments since it was first proposed. In addition, the similarities and differences compared with other related techniques are discussed to highlight the distinguishing features of the PMD technique. In conclusion, we will address the major challenges, the existing solutions and the remaining limitations in this technique to provide some suggestions for potential future investigations.

Authors:
 [1];  [1];  [2];  [3]
  1. Brookhaven National Lab. (BNL), Upton, NY (United States)
  2. Nanjing Univ. of Science and Technology, Nanjing (China)
  3. Nanyang Technological Univ. (Singapore)
Publication Date:
Research Org.:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1438323
Alternate Identifier(s):
OSTI ID: 1630197
Report Number(s):
BNL-205684-2018-JAAM
Journal ID: ISSN 0143-8166
Grant/Contract Number:  
SC0012704
Resource Type:
Accepted Manuscript
Journal Name:
Optics and Lasers in Engineering
Additional Journal Information:
Journal Volume: 107; Journal Issue: C; Journal ID: ISSN 0143-8166
Publisher:
Elsevier
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; Phase measuring deflectometry; Structure light illumination; Phase retrieval; Fringe analysis; Phase shift; Wavefront reconstruction

Citation Formats

Huang, Lei, Idir, Mourad, Zuo, Chao, and Asundi, Anand. Review of phase measuring deflectometry. United States: N. p., 2018. Web. doi:10.1016/j.optlaseng.2018.03.026.
Huang, Lei, Idir, Mourad, Zuo, Chao, & Asundi, Anand. Review of phase measuring deflectometry. United States. https://doi.org/10.1016/j.optlaseng.2018.03.026
Huang, Lei, Idir, Mourad, Zuo, Chao, and Asundi, Anand. Sat . "Review of phase measuring deflectometry". United States. https://doi.org/10.1016/j.optlaseng.2018.03.026. https://www.osti.gov/servlets/purl/1438323.
@article{osti_1438323,
title = {Review of phase measuring deflectometry},
author = {Huang, Lei and Idir, Mourad and Zuo, Chao and Asundi, Anand},
abstractNote = {As a low cost, full-field three-dimensional shape measurement technique with high dynamic range, Phase Measuring Deflectometry (PMD) has been studied and improved to be a simple and effective manner to inspect specular reflecting surfaces. In this review, the fundamental principle and the basic concepts of PMD technique are introduced and followed by a brief overview of its key developments since it was first proposed. In addition, the similarities and differences compared with other related techniques are discussed to highlight the distinguishing features of the PMD technique. In conclusion, we will address the major challenges, the existing solutions and the remaining limitations in this technique to provide some suggestions for potential future investigations.},
doi = {10.1016/j.optlaseng.2018.03.026},
journal = {Optics and Lasers in Engineering},
number = C,
volume = 107,
place = {United States},
year = {Sat Apr 07 00:00:00 EDT 2018},
month = {Sat Apr 07 00:00:00 EDT 2018}
}

Journal Article:

Citation Metrics:
Cited by: 115 works
Citation information provided by
Web of Science

Save / Share:

Works referenced in this record:

Combination of a Vision System and a Coordinate Measuring Machine for the Reverse Engineering of Freeform Surfaces
journal, January 2001

  • Carbone, V.; Carocci, M.; Savio, E.
  • The International Journal of Advanced Manufacturing Technology, Vol. 17, Issue 4
  • DOI: 10.1007/s001700170179

New developments in fast 3D-surface quality control
journal, March 2003


An approach to computer-aided quality control based on 3D coordinate metrology
journal, November 2000


Computer aided parametric design for 3D tire mold production
journal, January 2006


Fabrication of X-ray mirrors for synchrotron applications
journal, May 2010

  • Thiess, H.; Lasser, H.; Siewert, F.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3
  • DOI: 10.1016/j.nima.2009.10.077

Engineering precision
journal, November 2008


Overview of three-dimensional shape measurement using optical methods
journal, January 2000


Structured-light 3D surface imaging: a tutorial
journal, January 2011


CAD-based path planning for 3-D line laser scanning
journal, June 1999


Fringe projection techniques: Whither we are?
journal, February 2010


Automated phase-measuring profilometry of 3-D diffuse objects
journal, January 1984

  • Srinivasan, V.; Liu, H. C.; Halioua, M.
  • Applied Optics, Vol. 23, Issue 18
  • DOI: 10.1364/AO.23.003105

Fast three-step phase-shifting algorithm
journal, January 2006


Design of algorithms for phase measurements by the use of phase stepping
journal, January 1996


Windowed Fourier transform for fringe pattern analysis
journal, January 2004


Reflection grating photogrammetry: a technique for absolute shape measurement of specular free-form surfaces
conference, September 2005

  • Petz, Marcus; Tutsch, Rainer
  • Optics & Photonics 2005, SPIE Proceedings
  • DOI: 10.1117/12.617325

Phase measuring deflectometry: a new approach to measure specular free-form surfaces
conference, September 2004

  • Knauer, Markus C.; Kaminski, Jurgen; Hausler, Gerd
  • Photonics Europe, SPIE Proceedings
  • DOI: 10.1117/12.545704

High-resolution 3D shape measurement on specular surfaces by fringe reflection
conference, September 2004

  • Bothe, Thorsten; Li, Wansong; von Kopylow, Christoph
  • Photonics Europe, SPIE Proceedings
  • DOI: 10.1117/12.545987

Measurement of optically effective surfaces by imaging of gratings
conference, May 2003

  • Petz, Marcus; Tutsch, Rainer
  • Optical Metrology, SPIE Proceedings
  • DOI: 10.1117/12.500601

Reflection grating method for 3D measurement of reflecting surfaces
conference, October 2001

  • Petz, Marcus; Ritter, Reinhold
  • Lasers in Metrology and Art Conservation, SPIE Proceedings
  • DOI: 10.1117/12.445587

Principles of Shape from Specular Reflection
journal, December 2010


Optical 3D measurement of scattering and specular reflecting surfaces
journal, November 2008


Three-Dimensional Shape Measurements of Specular Objects Using Phase-Measuring Deflectometry
journal, December 2017

  • Zhang, Zonghua; Wang, Yuemin; Huang, Shujun
  • Sensors, Vol. 17, Issue 12
  • DOI: 10.3390/s17122835

Development of a portable deflectometry system for high spatial resolution surface measurements
journal, January 2014

  • Maldonado, Alejandro V.; Su, Peng; Burge, James H.
  • Applied Optics, Vol. 53, Issue 18
  • DOI: 10.1364/AO.53.004023

Improved zonal integration method for high accurate surface reconstruction in quantitative deflectometry
journal, January 2017

  • Li, Mengyang; Li, Dahai; Jin, Chengying
  • Applied Optics, Vol. 56, Issue 13
  • DOI: 10.1364/AO.56.00F144

Dynamic three-dimensional sensing for specular surface with monoscopic fringe reflectometry
journal, January 2011

  • Huang, Lei; Ng, Chi Seng; Asundi, Anand Krishna
  • Optics Express, Vol. 19, Issue 13
  • DOI: 10.1364/OE.19.012809

Fast full-field out-of-plane deformation measurement using fringe reflectometry
journal, April 2012


3D shape measurement of the aspheric mirror by advanced phase measuring deflectometry
journal, January 2008


Specular surface measurement by using least squares light tracking technique
journal, February 2010


Optical fringe-reflection deflectometry with bundle adjustment
journal, June 2018


Absolute optical surface measurement with deflectometry
conference, September 2012

  • Li, Wansong; Sandner, Marc; Gesierich, Achim
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.928690

Full-field 3D shape measurement of discontinuous specular objects by direct phase measuring deflectometry
journal, August 2017


Reliability-guided phase unwrapping algorithm: a review
journal, September 2004


Quality-guided phase unwrapping technique: comparison of quality maps and guiding strategies
journal, January 2011


Temporal phase-unwrapping algorithm for automated interferogram analysis
journal, January 1993


A generalized temporal phase unwrapping algorithm for three-dimensional profilometry
journal, April 2008


Temporal phase unwrapping algorithms for fringe projection profilometry: A comparative review
journal, October 2016


A flexible new technique for camera calibration
journal, January 2000

  • Zhang, Z.
  • IEEE Transactions on Pattern Analysis and Machine Intelligence, Vol. 22, Issue 11
  • DOI: 10.1109/34.888718

Least-square fitting a wave-front distortion estimate to an array of phase-difference measurements
journal, January 1977


Wave-front reconstruction for compensated imaging
journal, January 1977


Optimal wave-front estimation
journal, January 1977


Wave-front estimation from wave-front slope measurements
journal, January 1980


Improvement of least-squares integration method with iterative compensations in fringe reflectometry
journal, January 2012


Improving wavefront reconstruction accuracy by using integration equations with higher-order truncation errors in the Southwell geometry
journal, January 2013

  • Li, Guanghui; Li, Yanqiu; Liu, Ke
  • Journal of the Optical Society of America A, Vol. 30, Issue 7
  • DOI: 10.1364/JOSAA.30.001448

Improvement of high-order least-squares integration method for stereo deflectometry
journal, January 2015

  • Ren, Hongyu; Gao, Feng; Jiang, Xiangqian
  • Applied Optics, Vol. 54, Issue 34
  • DOI: 10.1364/AO.54.010249

Least-squares method for data reconstruction from gradient data in deflectometry
journal, January 2016

  • Ren, Hongyu; Gao, Feng; Jiang, Xiangqian
  • Applied Optics, Vol. 55, Issue 22
  • DOI: 10.1364/AO.55.006052

Spline based least squares integration for two-dimensional shape or wavefront reconstruction
journal, April 2017


Zonal wavefront reconstruction in quadrilateral geometry for phase measuring deflectometry
journal, January 2017


Modal wave-front reconstruction with Zernike polynomials and Karhunen–Loève functions
journal, January 1996


Comparison of cubic B-spline and Zernike-fitting techniques in complex wavefront reconstruction
journal, January 2006


Modal wavefront reconstruction based on Zernike polynomials for lateral shearing interferometry: comparisons of existing algorithms
journal, January 2012

  • Dai, Fengzhao; Tang, Feng; Wang, Xiangzhao
  • Applied Optics, Vol. 51, Issue 21
  • DOI: 10.1364/AO.51.005028

Modal wavefront reconstruction from its gradient
journal, January 2015


Modal estimation of a wave front from difference measurements using the discrete Fourier transform
journal, January 1986

  • Freischlad, Klaus R.; Koliopoulos, Chris L.
  • Journal of the Optical Society of America A, Vol. 3, Issue 11
  • DOI: 10.1364/JOSAA.3.001852

Shape reconstruction from gradient data
journal, January 2008

  • Ettl, Svenja; Kaminski, Jürgen; Knauer, Markus C.
  • Applied Optics, Vol. 47, Issue 12
  • DOI: 10.1364/AO.47.002091

Framework for gradient integration by combining radial basis functions method and least-squares method
journal, January 2013


Microdeflectometry—a novel tool to acquire three-dimensional microtopography with nanometer height resolution
journal, January 2008

  • Häusler, Gerd; Richter, Claus; Leitz, Karl-Heinz
  • Optics Letters, Vol. 33, Issue 4
  • DOI: 10.1364/OL.33.000396

Software configurable optical test system: a computerized reverse Hartmann test
journal, January 2010

  • Su, Peng; Parks, Robert E.; Wang, Lirong
  • Applied Optics, Vol. 49, Issue 23
  • DOI: 10.1364/AO.49.004404

Non-null full field X-ray mirror metrology using SCOTS: a reflection deflectometry approach
journal, January 2012

  • Su, Peng; Wang, Yuhao; Burge, James H.
  • Optics Express, Vol. 20, Issue 11
  • DOI: 10.1364/OE.20.012393

High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry
journal, August 2015


Deflectometry vs. interferometry
conference, May 2013

  • Häusler, Gerd; Faber, Christian; Olesch, Evelyn
  • SPIE Optical Metrology 2013, SPIE Proceedings
  • DOI: 10.1117/12.2020578

Performance analysis and evaluation of direct phase measuring deflectometry
journal, April 2018


Measuring deformations with deflectometry
conference, August 2014

  • Li, Wansong; Huke, Philipp; Burke, Jan
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.2063446

Aligning and testing non-null optical system with deflectometry
conference, September 2014

  • Zhao, Weirui; Huang, Run; Su, Peng
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.2062510

Phase measuring deflectometry for determining 5 DOF misalignment of segmented mirrors
conference, September 2017

  • Davies, Angela; Vann, Trent; Evans, Chris
  • Applied Optical Metrology II
  • DOI: 10.1117/12.2276947

Measuring rough optical surfaces using scanning long-wave optical test system 1 Principle and implementation
journal, January 2013

  • Su, Tianquan; Wang, Shanshan; Parks, Robert E.
  • Applied Optics, Vol. 52, Issue 29
  • DOI: 10.1364/AO.52.007117

Gamma correction for digital fringe projection profilometry
journal, January 2004

  • Guo, Hongwei; He, Haitao; Chen, Mingyi
  • Applied Optics, Vol. 43, Issue 14
  • DOI: 10.1364/AO.43.002906

Generic nonsinusoidal phase error correction for three-dimensional shape measurement using a digital video projector
journal, January 2007


Phase error analysis and compensation for nonsinusoidal waveforms in phase-shifting digital fringe projection profilometry
journal, January 2009


Generic gamma correction for accuracy enhancement in fringe-projection profilometry
journal, January 2010


The Nanometer Optical Component Measuring Machine: a new Sub-nm Topography Measuring Device for X-ray Optics at BESSY
conference, January 2004

  • Siewert, Frank
  • SYNCHROTRON RADIATION INSTRUMENTATION: Eighth International Conference on Synchrotron Radiation Instrumentation, AIP Conference Proceedings
  • DOI: 10.1063/1.1757928

Nano-accuracy measurement technology of optical-surface profiles
conference, October 2016

  • Qian, Shinan; Gao, Bo
  • Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), SPIE Proceedings
  • DOI: 10.1117/12.2247578

Innovative nano-accuracy surface profiler for sub-50 nrad rms mirror test
conference, October 2016

  • Qian, Shinan; Idir, Mourad
  • Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), SPIE Proceedings
  • DOI: 10.1117/12.2247575

Dynamic Hartmann Wavefront Sensor In Applications
conference, November 1982

  • Tarabocchia, M.; Holly, S.
  • 1982 Technical Symposium East, SPIE Proceedings
  • DOI: 10.1117/12.933742

Optical network: CERNET's experiences and prospective
conference, April 2004

  • Li, Xing; Bao, Congxiao
  • Asia-Pacific Optical and Wireless Communications, SPIE Proceedings
  • DOI: 10.1117/12.525431

Flexible geometrical calibration for fringe-reflection 3D measurement
journal, January 2012

  • Xiao, Yong-Liang; Su, Xianyu; Chen, Wenjing
  • Optics Letters, Vol. 37, Issue 4
  • DOI: 10.1364/OL.37.000620

Iterative optimization calibration method for stereo deflectometry
journal, January 2015

  • Ren, Hongyu; Gao, Feng; Jiang, Xiangqian
  • Optics Express, Vol. 23, Issue 17
  • DOI: 10.1364/OE.23.022060

Improved system calibration for specular surface measurement by using reflections from a plane mirror
journal, January 2016


Modal phase measuring deflectometry
journal, January 2016


Model mismatch analysis and compensation for modal phase measuring deflectometry
journal, January 2017


Mirror Surface Reconstruction from a Single Image
journal, April 2015

  • Liu, Miaomiao; Hartley, Richard; Salzmann, Mathieu
  • IEEE Transactions on Pattern Analysis and Machine Intelligence, Vol. 37, Issue 4
  • DOI: 10.1109/TPAMI.2014.2353622

Comparison of two-dimensional integration methods for shape reconstruction from gradient data
journal, January 2015


Optical fringe-reflection deflectometry with sparse representation
journal, May 2018


Improved method for rapid shape recovery of large specular surfaces based on phase measuring deflectometry
journal, January 2016


Works referencing / citing this record:

Dual-projector structured light 3D shape measurement
journal, January 2020

  • Yu, Ying; Lau, Daniel L.; Ruffner, Matthew P.
  • Applied Optics, Vol. 59, Issue 4
  • DOI: 10.1364/ao.378363

Solution to the slope-height ambiguity problem in phase measuring deflectometry based on a co-axial telecentric optical path
journal, January 2020

  • Yue, Hui-Min; Wu, Yu-Xiang; Song, Yi-Ping
  • Measurement Science and Technology, Vol. 31, Issue 4
  • DOI: 10.1088/1361-6501/ab472f

Extra-detection-free monoscopic deflectometry for the in situ measurement of freeform specular surfaces
journal, January 2019

  • Xu, Xueyang; Zhang, Xiangchao; Niu, Zhenqi
  • Optics Letters, Vol. 44, Issue 17
  • DOI: 10.1364/ol.44.004271

Measurement of the Three-Dimensional Shape of Discontinuous Specular Objects Using Infrared Phase-Measuring Deflectometry
journal, October 2019

  • Chang, Caixia; Zhang, Zonghua; Gao, Nan
  • Sensors, Vol. 19, Issue 21
  • DOI: 10.3390/s19214621

Deflectometry in cylindrical coordinates using a conical mirror: principles and proof of concept
journal, August 2019

  • Carvalho, Marcos José Ferreira; Veiga, Celso Luiz Nickel; Albertazzi, Armando
  • Journal of the Brazilian Society of Mechanical Sciences and Engineering, Vol. 41, Issue 9
  • DOI: 10.1007/s40430-019-1885-6

Improving the calibration of phase measuring deflectometry by a polynomial representation of the display shape
journal, September 2019

  • Bartsch, Jonas; Kalms, Michael; Bergmann, Ralf B.
  • Journal of the European Optical Society-Rapid Publications, Vol. 15, Issue 1
  • DOI: 10.1186/s41476-019-0116-1

An Accurate Calibration Means for the Phase Measuring Deflectometry System
journal, December 2019

  • Han, Hao; Wu, Shiqian; Song, Zhan
  • Sensors, Vol. 19, Issue 24
  • DOI: 10.3390/s19245377

Structured Light Profilometry on m-PTC
journal, October 2020

  • Marotta, Gianluca; Sansoni, Paola; Francini, Franco
  • Energies, Vol. 13, Issue 21
  • DOI: 10.3390/en13215671

Measurement of the Three-Dimensional Shape of Discontinuous Specular Objects Using Infrared Phase-Measuring Deflectometry
journal, October 2019

  • Chang, Caixia; Zhang, Zonghua; Gao, Nan
  • Sensors, Vol. 19, Issue 21
  • DOI: 10.3390/s19214621

An Accurate Calibration Means for the Phase Measuring Deflectometry System
journal, December 2019

  • Han, Hao; Wu, Shiqian; Song, Zhan
  • Sensors, Vol. 19, Issue 24
  • DOI: 10.3390/s19245377