skip to main content
DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: In-situ synchrotron x-ray studies of the microstructure and stability of In 2 O 3 epitaxial films

Abstract

We report on the synthesis, stability, and local structure of In2O3 thin films grown via rf-magnetron sputtering and characterized by in-situ x-ray scattering and focused x-ray nanodiffraction. We find that In2O3 deposited onto (0 0 1)-oriented single crystal yttria-stabilized zirconia substrates adopts a Stranski-Krastanov growth mode at a temperature of 850 degrees C, resulting in epitaxial, truncated square pyramids with (1 1 1) side walls. We find that at this temperature, the pyramids evaporate unless they are stabilized by a low flux of In2O3 from the magnetron source. We also find that the internal lattice structure of one such pyramid is made up of differently strained volumes, revealing local structural heterogeneity that may impact the properties of In2O3 nanostructures and films.

Authors:
; ; ; ORCiD logo; ; ; ; ; ORCiD logo; ORCiD logo; ; ; ; ;
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States); Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences and Engineering Division; USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Scientific User Facilities Division
OSTI Identifier:
1413931
Alternate Identifier(s):
OSTI ID: 1400329; OSTI ID: 1411041
Report Number(s):
BNL-114467-2017-JA
Journal ID: ISSN 0003-6951; 138150
Grant/Contract Number:  
AC02-06CH11357; SC0012704
Resource Type:
Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 111; Journal Issue: 16; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; X-rays; Epitaxy; Synchrotrons; Thin films; Radiowave and microwave technology

Citation Formats

Highland, M. J., Hruszkewycz, S. O., Fong, D. D., Thompson, Carol, Fuoss, P. H., Calvo-Almazan, I., Maddali, S., Ulvestad, A., Nazaretski, E., Huang, X., Yan, H., Chu, Y. S., Zhou, H., Baldo, P. M., and Eastman, J. A. In-situ synchrotron x-ray studies of the microstructure and stability of In 2 O 3 epitaxial films. United States: N. p., 2017. Web. doi:10.1063/1.4997773.
Highland, M. J., Hruszkewycz, S. O., Fong, D. D., Thompson, Carol, Fuoss, P. H., Calvo-Almazan, I., Maddali, S., Ulvestad, A., Nazaretski, E., Huang, X., Yan, H., Chu, Y. S., Zhou, H., Baldo, P. M., & Eastman, J. A. In-situ synchrotron x-ray studies of the microstructure and stability of In 2 O 3 epitaxial films. United States. doi:10.1063/1.4997773.
Highland, M. J., Hruszkewycz, S. O., Fong, D. D., Thompson, Carol, Fuoss, P. H., Calvo-Almazan, I., Maddali, S., Ulvestad, A., Nazaretski, E., Huang, X., Yan, H., Chu, Y. S., Zhou, H., Baldo, P. M., and Eastman, J. A. Mon . "In-situ synchrotron x-ray studies of the microstructure and stability of In 2 O 3 epitaxial films". United States. doi:10.1063/1.4997773. https://www.osti.gov/servlets/purl/1413931.
@article{osti_1413931,
title = {In-situ synchrotron x-ray studies of the microstructure and stability of In 2 O 3 epitaxial films},
author = {Highland, M. J. and Hruszkewycz, S. O. and Fong, D. D. and Thompson, Carol and Fuoss, P. H. and Calvo-Almazan, I. and Maddali, S. and Ulvestad, A. and Nazaretski, E. and Huang, X. and Yan, H. and Chu, Y. S. and Zhou, H. and Baldo, P. M. and Eastman, J. A.},
abstractNote = {We report on the synthesis, stability, and local structure of In2O3 thin films grown via rf-magnetron sputtering and characterized by in-situ x-ray scattering and focused x-ray nanodiffraction. We find that In2O3 deposited onto (0 0 1)-oriented single crystal yttria-stabilized zirconia substrates adopts a Stranski-Krastanov growth mode at a temperature of 850 degrees C, resulting in epitaxial, truncated square pyramids with (1 1 1) side walls. We find that at this temperature, the pyramids evaporate unless they are stabilized by a low flux of In2O3 from the magnetron source. We also find that the internal lattice structure of one such pyramid is made up of differently strained volumes, revealing local structural heterogeneity that may impact the properties of In2O3 nanostructures and films.},
doi = {10.1063/1.4997773},
journal = {Applied Physics Letters},
number = 16,
volume = 111,
place = {United States},
year = {2017},
month = {10}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record

Save / Share:

Works referenced in this record:

Growth of Microscale In 2 O 3 Islands on Y-Stabilized Zirconia(100) by Molecular Beam Epitaxy
journal, July 2008

  • Bourlange, A.; Payne, D. J.; Jacobs, R. M. J.
  • Chemistry of Materials, Vol. 20, Issue 14
  • DOI: 10.1021/cm800984r

In situ X-ray studies of vapor phase epitaxy of PbTiO3
journal, August 2003


Orientation dependent ionization potential of In 2 O 3 : a natural source for inhomogeneous barrier formation at electrode interfaces in organic electronics
journal, August 2011


Multimodality hard-x-ray imaging of a chromosome with nanoscale spatial resolution
journal, February 2016

  • Yan, Hanfei; Nazaretski, Evgeny; Lauer, Kenneth
  • Scientific Reports, Vol. 6, Issue 1
  • DOI: 10.1038/srep20112

Thermal expansion coefficient of yttria stabilized zirconia for various yttria contents
journal, February 2005


Influence of temperature on the epitaxial growth of In2O3 thin films on Y-ZrO2(111)
journal, March 2011


Energy-dispersive absorption spectroscopy for hard-X-ray micro-XAS applications
journal, August 2006


Real-Time Monitoring of Growing Nanoparticles
journal, May 2003


Design and performance of an X-ray scanning microscope at the Hard X-ray Nanoprobe beamline of NSLS-II
journal, October 2017


Nucleation of islands and continuous high-quality In2O3(001) films during plasma-assisted molecular beam epitaxy on Y-stabilized ZrO2(001)
journal, June 2010

  • Bierwagen, Oliver; Speck, James S.
  • Journal of Applied Physics, Vol. 107, Issue 11
  • DOI: 10.1063/1.3415539

Synthesis of bulk In2O3–Sc2O3 and their transparent conducting oxide films
journal, July 2002

  • Qadri, Syed B.; Kim, Heungsoo
  • Journal of Applied Physics, Vol. 92, Issue 1
  • DOI: 10.1063/1.1479466

Effect of SrO Doping on LaGaO 3 Synthesis via Magnetron Sputtering
journal, November 2016

  • Highland, Matthew J.; Perret, Edith; Folkman, Chad M.
  • Crystal Growth & Design, Vol. 16, Issue 12
  • DOI: 10.1021/acs.cgd.6b00914

Epitaxial growth and properties of thin film oxides
journal, August 2000


Modular instrument mounting system for variable environment in operando X-ray experiments
journal, February 2013

  • Folkman, C. M.; Highland, M. J.; Perret, E.
  • Review of Scientific Instruments, Vol. 84, Issue 2
  • DOI: 10.1063/1.4791799

Faceting control by the stoichiometry influence on the surface free energy of low-index bcc-In 2 O 3 surfaces
journal, March 2016


Size-Dependent Shape and Tilt Transitions in In 2 O 3 Nanoislands Grown on Cubic Y-Stabilized ZrO 2 (001) by Molecular Beam Epitaxy
journal, July 2012

  • Zhang, Kelvin H. L.; Bourlange, Anne; Egdell, Russell G.
  • ACS Nano, Vol. 6, Issue 8
  • DOI: 10.1021/nn301382j

Probing surface and interface morphology with Grazing Incidence Small Angle X-Ray Scattering
journal, August 2009


Surface Energies Control the Self-Organization of Oriented In 2 O 3 Nanostructures on Cubic Zirconia
journal, September 2010

  • Zhang, Kelvin H. L.; Walsh, Aron; Catlow, C. Richard A.
  • Nano Letters, Vol. 10, Issue 9
  • DOI: 10.1021/nl102403t

Physics of transparent conductors
journal, September 2016