Femtosecond laser patterning, synthesis, defect formation, and structural modification of atomic layered materials
Abstract
This article summarizes recent research on laser-based processing of twodimensional (2D) atomic layered materials, including graphene and transition metal dichalcogenides (TMDCs). Ultrafast lasers offer unique processing routes that take advantage of distinct interaction mechanisms with 2D materials to enable extremely localized energy deposition. Experiments have shown that ablative direct patterning of graphene by ultrafast lasers can achieve resolutions of tens of nanometers, as well as single-step pattern transfer. Ultrafast lasers also induce non-thermal excitation mechanisms that are useful for the thinning of TMDCs to tune the 2D material bandgap. Laser-assisted site-specific doping was recently demonstrated where ultrafast laser radiation under ambient air environment could be used for the direct writing of high-quality graphene patterns on insulating substrates. This article concludes with an outlook towards developing further advanced laser processing with scalability, in situ monitoring strategies and potential applications.
- Authors:
-
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Samsung Electronics, Suwon (South Korea)
- State Univ. of New York (SUNY), Stony Brook, NY (United States)
- Publication Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE; National Science Foundation (NSF); Ministry of Land, Infrastructure and Transport of the Korean Government
- OSTI Identifier:
- 1376044
- Report Number(s):
- LLNL-JRNL-702865
Journal ID: ISSN 0883-7694; applab; PII: S0883769416002487; TRN: US1702473
- Grant/Contract Number:
- AC52-07NA27344; EEC-1449305
- Resource Type:
- Accepted Manuscript
- Journal Name:
- MRS Bulletin
- Additional Journal Information:
- Journal Volume: 41; Journal Issue: 12; Journal ID: ISSN 0883-7694
- Publisher:
- Materials Research Society
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 42 ENGINEERING; laser; machining; electronic material
Citation Formats
Yoo, Jae-Hyuck, Kim, Eunpa, and Hwang, David J. Femtosecond laser patterning, synthesis, defect formation, and structural modification of atomic layered materials. United States: N. p., 2016.
Web. doi:10.1557/mrs.2016.248.
Yoo, Jae-Hyuck, Kim, Eunpa, & Hwang, David J. Femtosecond laser patterning, synthesis, defect formation, and structural modification of atomic layered materials. United States. https://doi.org/10.1557/mrs.2016.248
Yoo, Jae-Hyuck, Kim, Eunpa, and Hwang, David J. Tue .
"Femtosecond laser patterning, synthesis, defect formation, and structural modification of atomic layered materials". United States. https://doi.org/10.1557/mrs.2016.248. https://www.osti.gov/servlets/purl/1376044.
@article{osti_1376044,
title = {Femtosecond laser patterning, synthesis, defect formation, and structural modification of atomic layered materials},
author = {Yoo, Jae-Hyuck and Kim, Eunpa and Hwang, David J.},
abstractNote = {This article summarizes recent research on laser-based processing of twodimensional (2D) atomic layered materials, including graphene and transition metal dichalcogenides (TMDCs). Ultrafast lasers offer unique processing routes that take advantage of distinct interaction mechanisms with 2D materials to enable extremely localized energy deposition. Experiments have shown that ablative direct patterning of graphene by ultrafast lasers can achieve resolutions of tens of nanometers, as well as single-step pattern transfer. Ultrafast lasers also induce non-thermal excitation mechanisms that are useful for the thinning of TMDCs to tune the 2D material bandgap. Laser-assisted site-specific doping was recently demonstrated where ultrafast laser radiation under ambient air environment could be used for the direct writing of high-quality graphene patterns on insulating substrates. This article concludes with an outlook towards developing further advanced laser processing with scalability, in situ monitoring strategies and potential applications.},
doi = {10.1557/mrs.2016.248},
journal = {MRS Bulletin},
number = 12,
volume = 41,
place = {United States},
year = {Tue Dec 06 00:00:00 EST 2016},
month = {Tue Dec 06 00:00:00 EST 2016}
}
Web of Science
Works referenced in this record:
All-Optical High-Resolution Nanopatterning and 3D Suspending of Graphene
journal, May 2011
- Stöhr, Rainer J.; Kolesov, Roman; Xia, Kangwei
- ACS Nano, Vol. 5, Issue 6
Nanofabrication and atom manipulation by optical near-field and relevant quantum optical theory
journal, September 2000
- Ohtsu, M.; Kobayashi, K.; Ito, H.
- Proceedings of the IEEE, Vol. 88, Issue 9
Doping Graphene with Metal Contacts
journal, July 2008
- Giovannetti, G.; Khomyakov, P. A.; Brocks, G.
- Physical Review Letters, Vol. 101, Issue 2
Selective and directed growth of silicon nanowires by tip-enhanced local electric field
journal, August 2015
- Ryu, Sang-gil; Kim, Eunpa; Hwang, David J.
- Applied Physics A, Vol. 121, Issue 1
In situ photo-induced chemical doping of solution-processed graphene oxide for electronic applications
journal, January 2014
- Savva, K.; Lin, Y. -H.; Petridis, C.
- J. Mater. Chem. C, Vol. 2, Issue 29
How Good Can Monolayer MoS 2 Transistors Be?
journal, September 2011
- Yoon, Youngki; Ganapathi, Kartik; Salahuddin, Sayeef
- Nano Letters, Vol. 11, Issue 9
Single-Step Formation of Graphene on Dielectric Surfaces
journal, November 2012
- Xiong, Wei; Zhou, Yun Shen; Jiang, Li Jia
- Advanced Materials, Vol. 25, Issue 4
Laser crystallization and localized growth of nanomaterials for solar applications
conference, September 2013
- In, Jungbin; Ryu, Sang-Gil; Lee, Daeho
- SPIE Solar Energy + Technology, SPIE Proceedings
Toward Intrinsic Graphene Surfaces: A Systematic Study on Thermal Annealing and Wet-Chemical Treatment of SiO 2 -Supported Graphene Devices
journal, February 2011
- Cheng, Zengguang; Zhou, Qiaoyu; Wang, Chenxuan
- Nano Letters, Vol. 11, Issue 2
Ultrafast Saturable Absorption of Two-Dimensional MoS 2 Nanosheets
journal, September 2013
- Wang, Kangpeng; Wang, Jun; Fan, Jintai
- ACS Nano, Vol. 7, Issue 10
Quantifying pulsed laser induced damage to graphene
journal, November 2011
- Currie, Marc; Caldwell, Joshua D.; Bezares, Francisco J.
- Applied Physics Letters, Vol. 99, Issue 21
Facile fabrication of flexible all solid-state micro-supercapacitor by direct laser writing of porous carbon in polyimide
journal, March 2015
- In, Jung Bin; Hsia, Ben; Yoo, Jae-Hyuck
- Carbon, Vol. 83
Fast growth of graphene patterns by laser direct writing
journal, March 2011
- Park, J. B.; Xiong, W.; Gao, Y.
- Applied Physics Letters, Vol. 98, Issue 12
Transparent interconnections formed by rapid single-step fabrication of graphene patterns
journal, August 2011
- Park, J. B.; Xiong, W.; Xie, Z. Q.
- Applied Physics Letters, Vol. 99, Issue 5
Nanometer-Scale Laser Direct-Write Using Near-Field Optics
journal, January 2007
- Grigoropoulos, Costas P.; Hwang, David J.; Chimmalgi, Anant
- MRS Bulletin, Vol. 32, Issue 1
Laser-Induced Solid-Phase Doped Graphene
journal, July 2014
- Choi, Insung; Jeong, Hu Young; Jung, Dae Yool
- ACS Nano, Vol. 8, Issue 8
High-Throughput Near-Field Optical Nanoprocessing of Solution-Deposited Nanoparticles
journal, July 2010
- Pan, Heng; Hwang, David J.; Ko, Seung H.
- Small, Vol. 6, Issue 16
Nanoscopic Coulomb explosion in ultrafast graphite ablation
journal, April 2007
- Lenner, M.; Kaplan, A.; Palmer, R. E.
- Applied Physics Letters, Vol. 90, Issue 15
In Situ TEM Near-Field Optical Probing of Nanoscale Silicon Crystallization
journal, April 2012
- Xiang, Bin; Hwang, David J.; In, Jung Bin
- Nano Letters, Vol. 12, Issue 5
Laser Thinning for Monolayer Graphene Formation: Heat Sink and Interference Effect
journal, December 2010
- Han, Gang Hee; Chae, Seung Jin; Kim, Eun Sung
- ACS Nano, Vol. 5, Issue 1
Nanoscale laser processing and diagnostics
journal, April 2009
- Hwang, David; Ryu, Sang-Gil; Misra, Nipun
- Applied Physics A, Vol. 96, Issue 2
Energy Band-Gap Engineering of Graphene Nanoribbons
journal, May 2007
- Han, Melinda Y.; Özyilmaz, Barbaros; Zhang, Yuanbo
- Physical Review Letters, Vol. 98, Issue 20
Intense femtosecond photoexcitation of bulk and monolayer MoS 2
journal, July 2014
- Paradisanos, I.; Kymakis, E.; Fotakis, C.
- Applied Physics Letters, Vol. 105, Issue 4
Grains and grain boundaries in highly crystalline monolayer molybdenum disulphide
journal, May 2013
- van der Zande, Arend M.; Huang, Pinshane Y.; Chenet, Daniel A.
- Nature Materials, Vol. 12, Issue 6, p. 554-561
Two-Dimensional Transition Metal Dichalcogenides under Electron Irradiation: Defect Production and Doping
journal, July 2012
- Komsa, Hannu-Pekka; Kotakoski, Jani; Kurasch, Simon
- Physical Review Letters, Vol. 109, Issue 3
Laser-Induced Direct Graphene Patterning and Simultaneous Transferring Method for Graphene Sensor Platform
journal, July 2013
- Yoo, Jae-Hyuck; Park, Jong Bok; Ahn, Sanghoon
- Small, Vol. 9, Issue 24
Laser-Mediated Programmable N Doping and Simultaneous Reduction of Graphene Oxides
journal, December 2013
- Guo, Li; Zhang, Yong-Lai; Han, Dong-Dong
- Advanced Optical Materials, Vol. 2, Issue 2
Electronic, structural, and transport properties of Ni-doped graphene nanoribbons
journal, February 2009
- Rigo, V. A.; Martins, T. B.; da Silva, Antonio J. R.
- Physical Review B, Vol. 79, Issue 7
Electronics and optoelectronics of two-dimensional transition metal dichalcogenides
journal, November 2012
- Wang, Qing Hua; Kalantar-Zadeh, Kourosh; Kis, Andras
- Nature Nanotechnology, Vol. 7, Issue 11, p. 699-712
In-situ Raman Spectroscopy in a TEM
journal, August 2013
- Allen, F. I.; Kim, E.; Ryu, S. -G.
- Microscopy and Microanalysis, Vol. 19, Issue S2
Multi-scale graphene patterns on arbitrary substrates via laser-assisted transfer-printing process
journal, July 2012
- Park, J. B.; Yoo, J. -H.; Grigoropoulos, C. P.
- Applied Physics Letters, Vol. 101, Issue 4
The effect of chemical residues on the physical and electrical properties of chemical vapor deposited graphene transferred to SiO 2
journal, September 2011
- Pirkle, A.; Chan, J.; Venugopal, A.
- Applied Physics Letters, Vol. 99, Issue 12
Site Selective Doping of Ultrathin Metal Dichalcogenides by Laser-Assisted Reaction
journal, November 2015
- Kim, Eunpa; Ko, Changhyun; Kim, Kyunghoon
- Advanced Materials, Vol. 28, Issue 2
A roadmap for graphene
journal, October 2012
- Novoselov, K. S.; Fal′ko, V. I.; Colombo, L.
- Nature, Vol. 490, Issue 7419
Microstructuring of Graphene Oxide Nanosheets Using Direct Laser Writing
journal, January 2010
- Zhou, Yong; Bao, Qiaoliang; Varghese, Binni
- Advanced Materials, Vol. 22, Issue 1
Direct imprinting of microcircuits on graphene oxides film by femtosecond laser reduction
journal, February 2010
- Zhang, Yonglai; Guo, Li; Wei, Shu
- Nano Today, Vol. 5, Issue 1
Ultrafast laser ablation of graphite
journal, May 2009
- Lenner, M.; Kaplan, A.; Huchon, Ch.
- Physical Review B, Vol. 79, Issue 18
Graphene folds by femtosecond laser ablation
journal, June 2012
- Yoo, Jae-Hyuck; Bin In, Jung; Bok Park, Jong
- Applied Physics Letters, Vol. 100, Issue 23
Laser-Thinning of MoS 2 : On Demand Generation of a Single-Layer Semiconductor
journal, May 2012
- Castellanos-Gomez, A.; Barkelid, M.; Goossens, A. M.
- Nano Letters, Vol. 12, Issue 6
Single-layer MoS2 transistors
journal, January 2011
- Radisavljevic, B.; Radenovic, A.; Brivio, J.
- Nature Nanotechnology, Vol. 6, Issue 3, p. 147-150
Laser direct synthesis of graphene on quartz
journal, March 2013
- Wei, Dapeng; Mitchell, James I.; Tansarawiput, Chookiat
- Carbon, Vol. 53
In-situ monitoring of optical near-field material processing by electron microscopes
journal, September 2011
- Hwang, David J.; Xiang, Bin; Ryu, Sang-Gil
- Applied Physics A, Vol. 105, Issue 2
Works referencing / citing this record:
Ion beam modification of two-dimensional materials: Characterization, properties, and applications
journal, March 2017
- Li, Ziqi; Chen, Feng
- Applied Physics Reviews, Vol. 4, Issue 1
Laser Fabrication of Graphene-Based Electronic Skin
journal, June 2019
- Liu, Yu-Qing; Chen, Zhao-Di; Mao, Jiang-Wei
- Frontiers in Chemistry, Vol. 7
Recent Progress on Irradiation-Induced Defect Engineering of Two-Dimensional 2H-MoS2 Few Layers
journal, February 2019
- Zhao, Guang-Yi; Deng, Hua; Tyree, Nathaniel
- Applied Sciences, Vol. 9, Issue 4
Low-temperature solution-processed flexible metal oxide thin-film transistors via laser annealing
journal, July 2019
- Chen, Cihai; Yang, Huihuang; Yang, Qian
- Journal of Physics D: Applied Physics, Vol. 52, Issue 38
Optothermoplasmonic Nanolithography for On-Demand Patterning of 2D Materials
journal, August 2018
- Lin, Linhan; Li, Jingang; Li, Wei
- Advanced Functional Materials, Vol. 28, Issue 41
Optical Patterning of Two-Dimensional Materials
journal, January 2020
- Kollipara, Pavana Siddhartha; Li, Jingang; Zheng, Yuebing
- Research, Vol. 2020
Laser Fabrication of Graphene-Based Electronic Skin
journal, June 2019
- Liu, Yu-Qing; Chen, Zhao-Di; Mao, Jiang-Wei
- Frontiers in Chemistry, Vol. 7
Enhanced nonlinear optical response of graphene by silver-based nanoparticle modification for pulsed lasing
journal, January 2018
- Li, Ziqi; Dong, Ningning; Cheng, Chen
- Optical Materials Express, Vol. 8, Issue 5
Spontaneous micro-modification of single-layer graphene induced by femtosecond laser irradiation
journal, December 2017
- Cheng, Chen; He, Ruiyun; Romero, Carolina
- Applied Physics Letters, Vol. 111, Issue 24
Micropatterning MoS2/Polyamide Electrospun Nanofibrous Membranes Using Femtosecond Laser Pulses
journal, January 2019
- Paula, Kelly T.; Mercante, Luiza A.; Schneider, Rodrigo
- Photonics, Vol. 6, Issue 1
Optical Patterning of Two-Dimensional Materials
journal, January 2020
- Kollipara, Pavana Siddhartha; Li, Jingang; Zheng, Yuebing
- Research, Vol. 2020