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Title: Interlaced zone plate optics for hard X-ray imaging in the 10 nm range

Abstract

Multi-keV X-ray microscopy has been particularly successful in bridging the resolution gap between optical and electron microscopy. However, resolutions below 20 nm are still considered challenging, as high throughput direct imaging methods are limited by the availability of suitable optical elements. In order to bridge this gap, we present a new type of Fresnel zone plate lenses aimed at the sub-20 and the sub-10 nm resolution range. By extending the concept of double-sided zone plate stacking, we demonstrate the doubling of the effective line density and thus the resolution and provide large aperture, single- chip optical devices with 15 and 7 nm smallest zone widths. The detailed characterization of these lenses shows excellent optical properties with focal spots down to 7.8 nm. Furthermore, beyond wave front characterization, the zone plates also excel in typical imaging scenarios, verifying their resolution close to their diffraction limited optical performance.

Authors:
 [1];  [2];  [3];  [3];  [3];  [4];  [4];  [4];  [3]
  1. Paul Scherrer Inst. (PSI), Villigen (Switzerland); Synchrotron SOLEIL, Saint-Aubin (France)
  2. Paul Scherrer Inst. (PSI), Villigen (Switzerland); Univ. of Eastern Finland, Joensuu (Finland)
  3. Paul Scherrer Inst. (PSI), Villigen (Switzerland)
  4. Argonne National Lab. (ANL), Lemont, IL (United States)
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22); Paul Scherrer Institut, Swiss Light Source
OSTI Identifier:
1374847
Grant/Contract Number:  
AC02-06CH11357
Resource Type:
Accepted Manuscript
Journal Name:
Scientific Reports
Additional Journal Information:
Journal Volume: 7; Journal ID: ISSN 2045-2322
Publisher:
Nature Publishing Group
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; Imaging techniques; X-rays

Citation Formats

Mohacsi, Istvan, Vartiainen, Ismo, Rosner, Benedikt, Guizar-Sicairos, Manuel, Guzenko, Vitaliy A., McNulty, Ian, Winarski, Robert, Holt, Martin V., and David, Christian. Interlaced zone plate optics for hard X-ray imaging in the 10 nm range. United States: N. p., 2017. Web. doi:10.1038/srep43624.
Mohacsi, Istvan, Vartiainen, Ismo, Rosner, Benedikt, Guizar-Sicairos, Manuel, Guzenko, Vitaliy A., McNulty, Ian, Winarski, Robert, Holt, Martin V., & David, Christian. Interlaced zone plate optics for hard X-ray imaging in the 10 nm range. United States. doi:10.1038/srep43624.
Mohacsi, Istvan, Vartiainen, Ismo, Rosner, Benedikt, Guizar-Sicairos, Manuel, Guzenko, Vitaliy A., McNulty, Ian, Winarski, Robert, Holt, Martin V., and David, Christian. Wed . "Interlaced zone plate optics for hard X-ray imaging in the 10 nm range". United States. doi:10.1038/srep43624. https://www.osti.gov/servlets/purl/1374847.
@article{osti_1374847,
title = {Interlaced zone plate optics for hard X-ray imaging in the 10 nm range},
author = {Mohacsi, Istvan and Vartiainen, Ismo and Rosner, Benedikt and Guizar-Sicairos, Manuel and Guzenko, Vitaliy A. and McNulty, Ian and Winarski, Robert and Holt, Martin V. and David, Christian},
abstractNote = {Multi-keV X-ray microscopy has been particularly successful in bridging the resolution gap between optical and electron microscopy. However, resolutions below 20 nm are still considered challenging, as high throughput direct imaging methods are limited by the availability of suitable optical elements. In order to bridge this gap, we present a new type of Fresnel zone plate lenses aimed at the sub-20 and the sub-10 nm resolution range. By extending the concept of double-sided zone plate stacking, we demonstrate the doubling of the effective line density and thus the resolution and provide large aperture, single- chip optical devices with 15 and 7 nm smallest zone widths. The detailed characterization of these lenses shows excellent optical properties with focal spots down to 7.8 nm. Furthermore, beyond wave front characterization, the zone plates also excel in typical imaging scenarios, verifying their resolution close to their diffraction limited optical performance.},
doi = {10.1038/srep43624},
journal = {Scientific Reports},
number = ,
volume = 7,
place = {United States},
year = {2017},
month = {3}
}

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Cited by: 20 works
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Works referenced in this record:

Focusing Hard X Rays to Nanometer Dimensions by Adiabatically Focusing Lenses
journal, February 2005


Zone-Doubling Technique to Produce Ultrahigh-Resolution X-Ray Optics
journal, December 2007


Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating
journal, July 2010


Optimization of overlap uniformness for ptychography
journal, January 2014

  • Huang, Xiaojing; Yan, Hanfei; Harder, Ross
  • Optics Express, Vol. 22, Issue 10
  • DOI: 10.1364/OE.22.012634

Maximum-likelihood refinement for coherent diffractive imaging
journal, June 2012


Fourier shell correlation threshold criteria
journal, September 2005


Ultrahigh-Resolution Soft-X-Ray Microscopy with Zone Plates in High Orders of Diffraction
journal, September 2009


Near field stacking of zone plates for reduction of their effective zone period
journal, January 2015

  • Rehbein, Stefan; Lyon, Alan; Leung, Raymond
  • Optics Express, Vol. 23, Issue 9
  • DOI: 10.1364/OE.23.011063

Multilayer Laue Lens: A Brief History and Current Status
journal, July 2016


Strehl ratio for primary aberrations: some analytical results for circular and annular pupils
journal, January 1982

  • Mahajan, Virendra N.
  • Journal of the Optical Society of America, Vol. 72, Issue 9
  • DOI: 10.1364/JOSA.72.001258

Atomic Layer Deposition of Iridium Thin Films
journal, January 2004

  • Aaltonen, Titta; Ritala, Mikko; Sammelselg, Väino
  • Journal of The Electrochemical Society, Vol. 151, Issue 8
  • DOI: 10.1149/1.1761011

Nanometer focusing properties of Fresnel zone plates described by dynamical diffraction theory
journal, June 2006


Absolute efficiency measurement of high-performance zone plates
conference, August 2009

  • Chen, Sharon; Lyon, Alan; Kirz, Janos
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.825367

Phase zone plates for x rays and the extreme uv
journal, January 1974


High-throughput ptychography using Eiger-scanning X-ray nano-imaging of extended regions
journal, January 2014

  • Guizar-Sicairos, Manuel; Johnson, Ian; Diaz, Ana
  • Optics Express, Vol. 22, Issue 12
  • DOI: 10.1364/OE.22.014859

Near-field stacking of zone plates for hard x-ray range
conference, November 2002

  • Maser, J÷rg; Lai, Barry P.; Yun, Wenbing
  • International Symposium on Optical Science and Technology, SPIE Proceedings
  • DOI: 10.1117/12.451396

Reconstruction of an astigmatic hard X-ray beam and alignment of K-B mirrors from ptychographic coherent diffraction data
journal, January 2010

  • Kewish, Cameron M.; Guizar-Sicairos, Manuel; Liu, Chian
  • Optics Express, Vol. 18, Issue 22
  • DOI: 10.1364/OE.18.023420

High numerical aperture multilayer Laue lenses
journal, June 2015

  • Morgan, Andrew J.; Prasciolu, Mauro; Andrejczuk, Andrzej
  • Scientific Reports, Vol. 5, Issue 1
  • DOI: 10.1038/srep09892

PILATUS: A single photon counting pixel detector for X-ray applications
journal, August 2009

  • Henrich, B.; Bergamaschi, A.; Broennimann, C.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 607, Issue 1
  • DOI: 10.1016/j.nima.2009.03.200

Zone plates with high efficiency in high orders of diffraction described by dynamical theory
journal, October 1997

  • Schneider, G.
  • Applied Physics Letters, Vol. 71, Issue 16
  • DOI: 10.1063/1.120069

High-Resolution Scanning X-ray Diffraction Microscopy
journal, July 2008


A hard X-ray nanoprobe beamline for nanoscale microscopy
journal, September 2012

  • Winarski, Robert P.; Holt, Martin V.; Rose, Volker
  • Journal of Synchrotron Radiation, Vol. 19, Issue 6
  • DOI: 10.1107/S0909049512036783

X-ray ptychographic computed tomography at 16 nm isotropic 3D resolution
journal, January 2014

  • Holler, M.; Diaz, A.; Guizar-Sicairos, M.
  • Scientific Reports, Vol. 4, Issue 1
  • DOI: 10.1038/srep03857

Efficiency of a multilayer-Laue-lens with a 102 μm aperture
journal, August 2015

  • Macrander, Albert T.; Kubec, Adam; Conley, Raymond
  • Applied Physics Letters, Vol. 107, Issue 8
  • DOI: 10.1063/1.4929505

Full-field X-ray microscopy with crossed partial multilayer Laue lenses
journal, January 2014

  • Niese, Sven; Krüger, Peter; Kubec, Adam
  • Optics Express, Vol. 22, Issue 17
  • DOI: 10.1364/OE.22.020008

Three-dimensional structured on-chip stacked zone plates for nanoscale X-ray imaging with high efficiency
journal, April 2014


Pushing the limits: an instrument for hard X-ray imaging below 20 nm
journal, January 2015


Chemical composition mapping with nanometre resolution by soft X-ray microscopy
journal, September 2014


Soft X-ray microscopy at a spatial resolution better than 15 nm
journal, June 2005

  • Chao, Weilun; Harteneck, Bruce D.; Liddle, J. Alexander
  • Nature, Vol. 435, Issue 7046
  • DOI: 10.1038/nature03719

Fabrication and characterization of high-efficiency double-sided blazed x-ray optics
journal, January 2016

  • Mohacsi, Istvan; Vartiainen, Ismo; Guizar-Sicairos, Manuel
  • Optics Letters, Vol. 41, Issue 2
  • DOI: 10.1364/OL.41.000281

Sub-5 nm hard x-ray point focusing by a combined Kirkpatrick-Baez mirror and multilayer zone plate
journal, January 2013

  • Döring, F.; Robisch, A. L.; Eberl, C.
  • Optics Express, Vol. 21, Issue 16
  • DOI: 10.1364/OE.21.019311

Erratum to “advanced thin film technology for ultrahigh resolution X-ray microscopy” [Ultramicroscopy 109 (2009) 1360–1364]
journal, January 2010


Coupled wave description of the diffraction by zone plates with high aspect ratios
journal, May 1992


High resolution double-sided diffractive optics for hard X-ray microscopy
journal, January 2015

  • Mohacsi, Istvan; Vartiainen, Ismo; Guizar-Sicairos, Manuel
  • Optics Express, Vol. 23, Issue 2
  • DOI: 10.1364/OE.23.000776

High efficiency x-ray nanofocusing by the blazed stacking of binary zone plates
conference, September 2013

  • Mohacsi, I.; Karvinen, P.; Vartiainen, I.
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.2022640

Achromatic and high-resolution full-field X-ray microscopy based on total-reflection mirrors
journal, January 2015

  • Matsuyama, Satoshi; Emi, Yoji; Kino, Hidetoshi
  • Optics Express, Vol. 23, Issue 8
  • DOI: 10.1364/OE.23.009746

Focusing X-Ray Beams to Nanometer Dimensions
journal, November 2003


Fresnel zone plate stacking in the intermediate field for high efficiency focusing in the hard X-ray regime
journal, January 2014

  • Gleber, Sophie-Charlotte; Wojcik, Michael; Liu, Jie
  • Optics Express, Vol. 22, Issue 23
  • DOI: 10.1364/OE.22.028142

Measurement of coherent x-ray focused beams by phase retrieval with transverse translation diversity
journal, January 2009

  • Guizar-Sicairos, Manuel; Fienup, James R.
  • Optics Express, Vol. 17, Issue 4
  • DOI: 10.1364/OE.17.002670

Ultra-high resolution zone-doubled 
diffractive X-ray optics for the multi-keV regime
journal, December 2010

  • Vila-Comamala, Joan; Gorelick, Sergey; Färm, Elina
  • Optics Express, Vol. 19, Issue 1
  • DOI: 10.1364/OE.19.000175

Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging
journal, January 2011

  • Vila-Comamala, Joan; Diaz, Ana; Guizar-Sicairos, Manuel
  • Optics Express, Vol. 19, Issue 22
  • DOI: 10.1364/OE.19.021333

Ultra-high aspect ratio high-resolution nanofabrication for hard X-ray diffractive optics
journal, June 2014

  • Chang, Chieh; Sakdinawat, Anne
  • Nature Communications, Vol. 5, Issue 1
  • DOI: 10.1038/ncomms5243

30nm resolution x-ray imaging at 8keV using third order diffraction of a zone plate lens objective in a transmission microscope
journal, November 2006

  • Yin, Gung-Chian; Song, Yen-Fang; Tang, Mau-Tsu
  • Applied Physics Letters, Vol. 89, Issue 22
  • DOI: 10.1063/1.2397483

    Works referencing / citing this record:

    Towards optimized illumination for high-resolution ptychography
    journal, January 2019

    • Odstrčil, Michal; Lebugle, Maxime; Guizar-Sicairos, Manuel
    • Optics Express, Vol. 27, Issue 10
    • DOI: 10.1364/oe.27.014981

    Ultimate limitations in the performance of kinoform lenses for hard x-ray focusing
    journal, January 2019


    Towards optimized illumination for high-resolution ptychography
    journal, January 2019

    • Odstrčil, Michal; Lebugle, Maxime; Guizar-Sicairos, Manuel
    • Optics Express, Vol. 27, Issue 10
    • DOI: 10.1364/oe.27.014981

    Ultimate limitations in the performance of kinoform lenses for hard x-ray focusing
    journal, January 2019