Interlaced zone plate optics for hard X-ray imaging in the 10 nm range
Abstract
Multi-keV X-ray microscopy has been particularly successful in bridging the resolution gap between optical and electron microscopy. However, resolutions below 20 nm are still considered challenging, as high throughput direct imaging methods are limited by the availability of suitable optical elements. In order to bridge this gap, we present a new type of Fresnel zone plate lenses aimed at the sub-20 and the sub-10 nm resolution range. By extending the concept of double-sided zone plate stacking, we demonstrate the doubling of the effective line density and thus the resolution and provide large aperture, single- chip optical devices with 15 and 7 nm smallest zone widths. The detailed characterization of these lenses shows excellent optical properties with focal spots down to 7.8 nm. Furthermore, beyond wave front characterization, the zone plates also excel in typical imaging scenarios, verifying their resolution close to their diffraction limited optical performance.
- Authors:
-
- Paul Scherrer Inst. (PSI), Villigen (Switzerland); Synchrotron SOLEIL, Saint-Aubin (France)
- Paul Scherrer Inst. (PSI), Villigen (Switzerland); Univ. of Eastern Finland, Joensuu (Finland)
- Paul Scherrer Inst. (PSI), Villigen (Switzerland)
- Argonne National Lab. (ANL), Lemont, IL (United States)
- Publication Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES); Paul Scherrer Institut, Swiss Light Source
- OSTI Identifier:
- 1374847
- Grant/Contract Number:
- AC02-06CH11357
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Scientific Reports
- Additional Journal Information:
- Journal Volume: 7; Journal ID: ISSN 2045-2322
- Publisher:
- Nature Publishing Group
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; Imaging techniques; X-rays
Citation Formats
Mohacsi, Istvan, Vartiainen, Ismo, Rosner, Benedikt, Guizar-Sicairos, Manuel, Guzenko, Vitaliy A., McNulty, Ian, Winarski, Robert, Holt, Martin V., and David, Christian. Interlaced zone plate optics for hard X-ray imaging in the 10 nm range. United States: N. p., 2017.
Web. doi:10.1038/srep43624.
Mohacsi, Istvan, Vartiainen, Ismo, Rosner, Benedikt, Guizar-Sicairos, Manuel, Guzenko, Vitaliy A., McNulty, Ian, Winarski, Robert, Holt, Martin V., & David, Christian. Interlaced zone plate optics for hard X-ray imaging in the 10 nm range. United States. https://doi.org/10.1038/srep43624
Mohacsi, Istvan, Vartiainen, Ismo, Rosner, Benedikt, Guizar-Sicairos, Manuel, Guzenko, Vitaliy A., McNulty, Ian, Winarski, Robert, Holt, Martin V., and David, Christian. Wed .
"Interlaced zone plate optics for hard X-ray imaging in the 10 nm range". United States. https://doi.org/10.1038/srep43624. https://www.osti.gov/servlets/purl/1374847.
@article{osti_1374847,
title = {Interlaced zone plate optics for hard X-ray imaging in the 10 nm range},
author = {Mohacsi, Istvan and Vartiainen, Ismo and Rosner, Benedikt and Guizar-Sicairos, Manuel and Guzenko, Vitaliy A. and McNulty, Ian and Winarski, Robert and Holt, Martin V. and David, Christian},
abstractNote = {Multi-keV X-ray microscopy has been particularly successful in bridging the resolution gap between optical and electron microscopy. However, resolutions below 20 nm are still considered challenging, as high throughput direct imaging methods are limited by the availability of suitable optical elements. In order to bridge this gap, we present a new type of Fresnel zone plate lenses aimed at the sub-20 and the sub-10 nm resolution range. By extending the concept of double-sided zone plate stacking, we demonstrate the doubling of the effective line density and thus the resolution and provide large aperture, single- chip optical devices with 15 and 7 nm smallest zone widths. The detailed characterization of these lenses shows excellent optical properties with focal spots down to 7.8 nm. Furthermore, beyond wave front characterization, the zone plates also excel in typical imaging scenarios, verifying their resolution close to their diffraction limited optical performance.},
doi = {10.1038/srep43624},
journal = {Scientific Reports},
number = ,
volume = 7,
place = {United States},
year = {Wed Mar 08 00:00:00 EST 2017},
month = {Wed Mar 08 00:00:00 EST 2017}
}
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