Phonon wave effects in the thermal transport of epitaxial TiN/(Al,Sc)N metal/semiconductor superlattices
- Authors:
-
[4];
- Department of Materials Science and Engineering, University of California, Berkeley, California 94720, USA
- School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, USA, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA
- Department of Mechanical Engineering, University of Delaware, Newark, Delaware 19716, USA
- Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA, School of Mechanical Engineering, Purdue University, West Lafayette, Indiana 47907, USA
- Bradley Department of Electrical and Computer Engineering and Department of Materials Science and Engineering, Virginia Tech, Blacksburg, Virginia 24061, USA
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1361732
- Grant/Contract Number:
- CBET-1048616
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Journal of Applied Physics
- Additional Journal Information:
- Journal Name: Journal of Applied Physics Journal Volume: 121 Journal Issue: 1; Journal ID: ISSN 0021-8979
- Publisher:
- American Institute of Physics
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Saha, Bivas, Koh, Yee Rui, Feser, Joseph P., Sadasivam, Sridhar, Fisher, Timothy S., Shakouri, Ali, and Sands, Timothy D. Phonon wave effects in the thermal transport of epitaxial TiN/(Al,Sc)N metal/semiconductor superlattices. United States: N. p., 2017.
Web. doi:10.1063/1.4973681.
Saha, Bivas, Koh, Yee Rui, Feser, Joseph P., Sadasivam, Sridhar, Fisher, Timothy S., Shakouri, Ali, & Sands, Timothy D. Phonon wave effects in the thermal transport of epitaxial TiN/(Al,Sc)N metal/semiconductor superlattices. United States. https://doi.org/10.1063/1.4973681
Saha, Bivas, Koh, Yee Rui, Feser, Joseph P., Sadasivam, Sridhar, Fisher, Timothy S., Shakouri, Ali, and Sands, Timothy D. Sat .
"Phonon wave effects in the thermal transport of epitaxial TiN/(Al,Sc)N metal/semiconductor superlattices". United States. https://doi.org/10.1063/1.4973681.
@article{osti_1361732,
title = {Phonon wave effects in the thermal transport of epitaxial TiN/(Al,Sc)N metal/semiconductor superlattices},
author = {Saha, Bivas and Koh, Yee Rui and Feser, Joseph P. and Sadasivam, Sridhar and Fisher, Timothy S. and Shakouri, Ali and Sands, Timothy D.},
abstractNote = {},
doi = {10.1063/1.4973681},
journal = {Journal of Applied Physics},
number = 1,
volume = 121,
place = {United States},
year = {Sat Jan 07 00:00:00 EST 2017},
month = {Sat Jan 07 00:00:00 EST 2017}
}
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https://doi.org/10.1063/1.4973681
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