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Title: Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices

Authors:
 [1];  [2];  [3];  [3];  [2];  [4]
  1. School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA
  2. School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA
  3. Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden
  4. School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA, School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, USA
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1223555
Grant/Contract Number:  
CBET-1048616
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Name: Applied Physics Letters Journal Volume: 105 Journal Issue: 15; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Saha, Bivas, Lawrence, Samantha K., Schroeder, Jeremy L., Birch, Jens, Bahr, David F., and Sands, Timothy D. Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices. United States: N. p., 2014. Web. doi:10.1063/1.4898067.
Saha, Bivas, Lawrence, Samantha K., Schroeder, Jeremy L., Birch, Jens, Bahr, David F., & Sands, Timothy D. Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices. United States. doi:10.1063/1.4898067.
Saha, Bivas, Lawrence, Samantha K., Schroeder, Jeremy L., Birch, Jens, Bahr, David F., and Sands, Timothy D. Tue . "Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices". United States. doi:10.1063/1.4898067.
@article{osti_1223555,
title = {Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices},
author = {Saha, Bivas and Lawrence, Samantha K. and Schroeder, Jeremy L. and Birch, Jens and Bahr, David F. and Sands, Timothy D.},
abstractNote = {},
doi = {10.1063/1.4898067},
journal = {Applied Physics Letters},
number = 15,
volume = 105,
place = {United States},
year = {2014},
month = {10}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1063/1.4898067

Citation Metrics:
Cited by: 9 works
Citation information provided by
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