Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices
- Authors:
-
- School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA
- School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA
- Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden
- School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA, School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, USA
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1223555
- Grant/Contract Number:
- CBET-1048616
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Name: Applied Physics Letters Journal Volume: 105 Journal Issue: 15; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Saha, Bivas, Lawrence, Samantha K., Schroeder, Jeremy L., Birch, Jens, Bahr, David F., and Sands, Timothy D. Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices. United States: N. p., 2014.
Web. doi:10.1063/1.4898067.
Saha, Bivas, Lawrence, Samantha K., Schroeder, Jeremy L., Birch, Jens, Bahr, David F., & Sands, Timothy D. Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices. United States. doi:10.1063/1.4898067.
Saha, Bivas, Lawrence, Samantha K., Schroeder, Jeremy L., Birch, Jens, Bahr, David F., and Sands, Timothy D. Tue .
"Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices". United States. doi:10.1063/1.4898067.
@article{osti_1223555,
title = {Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices},
author = {Saha, Bivas and Lawrence, Samantha K. and Schroeder, Jeremy L. and Birch, Jens and Bahr, David F. and Sands, Timothy D.},
abstractNote = {},
doi = {10.1063/1.4898067},
journal = {Applied Physics Letters},
number = 15,
volume = 105,
place = {United States},
year = {2014},
month = {10}
}
Free Publicly Available Full Text
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DOI: 10.1063/1.4898067
DOI: 10.1063/1.4898067
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