Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices
- Authors:
-
- School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA
- School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA
- Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden
- School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA, School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, USA
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1223555
- Grant/Contract Number:
- CBET-1048616
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Name: Applied Physics Letters Journal Volume: 105 Journal Issue: 15; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Saha, Bivas, Lawrence, Samantha K., Schroeder, Jeremy L., Birch, Jens, Bahr, David F., and Sands, Timothy D. Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices. United States: N. p., 2014.
Web. doi:10.1063/1.4898067.
Saha, Bivas, Lawrence, Samantha K., Schroeder, Jeremy L., Birch, Jens, Bahr, David F., & Sands, Timothy D. Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices. United States. doi:10.1063/1.4898067.
Saha, Bivas, Lawrence, Samantha K., Schroeder, Jeremy L., Birch, Jens, Bahr, David F., and Sands, Timothy D. Tue .
"Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices". United States. doi:10.1063/1.4898067.
@article{osti_1223555,
title = {Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices},
author = {Saha, Bivas and Lawrence, Samantha K. and Schroeder, Jeremy L. and Birch, Jens and Bahr, David F. and Sands, Timothy D.},
abstractNote = {},
doi = {10.1063/1.4898067},
journal = {Applied Physics Letters},
number = 15,
volume = 105,
place = {United States},
year = {2014},
month = {10}
}
Free Publicly Available Full Text
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DOI: 10.1063/1.4898067
DOI: 10.1063/1.4898067
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Cited by: 9 works
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Works referenced in this record:
Thermal stability of TiN/AlN superlattices
journal, March 1999
- Setoyama, M.; Irie, M.; Ohara, H.
- Thin Solid Films, Vol. 341, Issue 1-2
High textured AlN thin films grown by RF magnetron sputtering; composition, structure, morphology and hardness
journal, August 2004
- Oliveira, I. C.; Grigorov, K. G.; Maciel, H. S.
- Vacuum, Vol. 75, Issue 4
Self-organized nanostructures in the Ti–Al–N system
journal, September 2003
- Mayrhofer, Paul H.; Hörling, Anders; Karlsson, Lennart
- Applied Physics Letters, Vol. 83, Issue 10
Effects of annealing on the microstructures and mechanical properties of TiN/AlN nano-multilayer films prepared by ion-beam assisted deposition
journal, April 2002
- Kim, Do-Geun; Seong, Tae-Yeon; Baik, Young-Joon
- Surface and Coatings Technology, Vol. 153, Issue 1
Single layer and multilayer wear resistant coatings of (Ti,Al)N: a review
journal, February 2003
- PalDey, S.; Deevi, S. C.
- Materials Science and Engineering: A, Vol. 342, Issue 1-2
Growth of single‐crystal TiN/VN strained‐layer superlattices with extremely high mechanical hardness
journal, July 1987
- Helmersson, U.; Todorova, S.; Barnett, S. A.
- Journal of Applied Physics, Vol. 62, Issue 2
Single-dislocation-based strengthening mechanisms in nanoscale metallic multilayers
journal, November 2002
- Misra, A.; Hirth, J. P.; Kung, H.
- Philosophical Magazine A, Vol. 82, Issue 16
MATERIALS SCIENCE: Designing Superhard Materials
journal, May 2005
- Kaner, R. B.
- Science, Vol. 308, Issue 5726
TiN/(Al,Sc)N metal/dielectric superlattices and multilayers as hyperbolic metamaterials in the visible spectral range
journal, September 2014
- Saha, Bivas; Naik, Gururaj V.; Saber, Sammy
- Physical Review B, Vol. 90, Issue 12
Deformation at the nanometer and micrometer length scales: Effects of strain gradients and dislocation starvation
journal, February 2007
- Nix, William D.; Greer, Julia R.; Feng, Gang
- Thin Solid Films, Vol. 515, Issue 6
Structure, hardness and thermal stability of nanolayered TiN/CrN multilayer coatings
journal, November 2003
- Barshilia, Harish C.; Jain, Anjana; Rajam, K. S.
- Vacuum, Vol. 72, Issue 3
TiN coating of tool steels: a review
journal, October 1993
- Zhang, Shanyong; Zhu, Weiguang
- Journal of Materials Processing Technology, Vol. 39, Issue 1-2
Thermal Expansion of Diamond at Low Temperatures
journal, February 2010
- Stoupin, Stanislav; Shvyd’ko, Yuri V.
- Physical Review Letters, Vol. 104, Issue 8
Growth of poly- and single-crystal ScN on MgO(001): Role of low-energy N2+ irradiation in determining texture, microstructure evolution, and mechanical properties
journal, December 1998
- Gall, D.; Petrov, I.; Hellgren, N.
- Journal of Applied Physics, Vol. 84, Issue 11
An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
journal, June 1992
- Oliver, W. C.; Pharr, G. M.
- Journal of Materials Research, Vol. 7, Issue 06, p. 1564-1583
Structure and properties of TiN coatings
journal, June 1985
- Sundgren, J. -E.
- Thin Solid Films, Vol. 128, Issue 1-2
Stabilization of Cubic AlN in Epitaxial AlN/TiN Superlattices
journal, March 1997
- Madan, A.; Kim, I. W.; Cheng, S. C.
- Physical Review Letters, Vol. 78, Issue 9
On dislocation storage and the mechanical response of fine scale microstructures
journal, June 1994
- Embury, J. D.; Hirth, J. P.
- Acta Metallurgica et Materialia, Vol. 42, Issue 6
Titanium nitride oxidation chemistry: An x‐ray photoelectron spectroscopy study
journal, October 1992
- Saha, Naresh C.; Tompkins, Harland G.
- Journal of Applied Physics, Vol. 72, Issue 7
Hard protective overlayers on viscoelastic-plastic substrates
journal, June 1999
- Gerberich, W. W.; Strojny, A.; Yoder, K.
- Journal of Materials Research, Vol. 14, Issue 6
Development of epitaxial Al x Sc 1− x N for artificially structured metal/semiconductor superlattice metamaterials : Epitaxial Al
journal, September 2014
- Saha, Bivas; Saber, Sammy; Naik, Gururaj V.
- physica status solidi (b), Vol. 252, Issue 2
Dependence of hardness on modulation amplitude in electrodeposited Cu-Ni compositionally modulated thin films
journal, February 1995
- Oberle, R. R.; Cammarata, R. C.
- Scripta Metallurgica et Materialia, Vol. 32, Issue 4
On the strengthening effects of interfaces in multilayer fee metallic composites
journal, March 2002
- Hoagland, R. G.; Mitchell, T. E.; Hirth, J. P.
- Philosophical Magazine A, Vol. 82, Issue 4
Epitaxial superlattices with titanium nitride as a plasmonic component for optical hyperbolic metamaterials
journal, May 2014
- Naik, G. V.; Saha, B.; Liu, J.
- Proceedings of the National Academy of Sciences, Vol. 111, Issue 21
Effects of volume mismatch and electronic structure on the decomposition of ScAlN and TiAlN solid solutions
journal, June 2010
- Höglund, Carina; Alling, Björn; Birch, Jens
- Physical Review B, Vol. 81, Issue 22
Nanoindentation hardness, abrasive wear, and microstructure of TiN/NbN polycrystalline nanostructured multilayer films grown by reactive magnetron sputtering
journal, September 1998
- Ljungcrantz, H.; Engström, C.; Hultman, L.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 16, Issue 5
On the hardness of coated systems
journal, February 1998
- Korsunsky, A. M.; McGurk, M. R.; Bull, S. J.
- Surface and Coatings Technology, Vol. 99, Issue 1-2
Electronic structure, phonons, and thermal properties of ScN, ZrN, and HfN: A first-principles study
journal, February 2010
- Saha, Bivas; Acharya, Jagaran; Sands, Timothy D.
- Journal of Applied Physics, Vol. 107, Issue 3
New Routes in the Preparation of Mechanically Hard Films
journal, August 1996
- Sproul, W. D.
- Science, Vol. 273, Issue 5277
Hardness enhancement and elastic modulus behaviour in sputtered Ag/Ni multilayers with different modulation wavelengths
journal, February 1999
- Geisler, H.; Schweitz, K. O.; Chevallier, J.
- Philosophical Magazine A, Vol. 79, Issue 2
Preparation and characterization of AlN/ZrN and AlN/TiN nanolaminate coatings
journal, November 2000
- Wong, Ming-Show; Hsiao, Gwo-Yih; Yang, Sheng-Yu
- Surface and Coatings Technology, Vol. 133-134
Hard and superhard nanocomposite coatings
journal, March 2000
- Musil, J.
- Surface and Coatings Technology, Vol. 125, Issue 1-3
Attempt to Design a Strong Solid
journal, July 1970
- Koehler, J. S.
- Physical Review B, Vol. 2, Issue 2