Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices
- Publication Date:
- Grant/Contract Number:
- CBET-1048616
- Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Volume: 105; Journal Issue: 15; Related Information: CHORUS Timestamp: 2016-12-29 12:36:14; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics
- Sponsoring Org:
- USDOE
- Country of Publication:
- United States
- Language:
- English
- OSTI Identifier:
- 1223555