Growth and stress-induced transformation of zinc blende AlN layers in Al-AlN-TiN multilayers
Abstract
We report that AlN nanolayers in sputter deposited {111}Al/AlN/TiN multilayers exhibit the metastable zinc-blende-structure (z-AlN). Based on density function theory calculations, the growth of the z-AlN is ascribed to the kinetically and energetically favored nitridation of the deposited aluminium layer. In situ nanoindentation of the as-deposited {111}Al/AlN/TiN multilayers in a high-resolution transmission electron microscope revealed the z-AlN to wurzite AlN phase transformation through collective glide of Shockley partial dislocations on every two {111} planes of the z-AlN.
- Authors:
-
- Los Alamos National Lab. (LANL), Los Alamos, NM (United States). Materials Physics and Applications Division
- Los Alamos National Lab. (LANL), Los Alamos, NM (United States). Materials Science and Technology Division
- Univ. of Nebraska, Lincoln, NE (United States)
- Univ. of Michigan, Ann Arbor, MI (United States)
- Publication Date:
- Research Org.:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1259302
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Scientific Reports
- Additional Journal Information:
- Journal Volume: 5; Journal ID: ISSN 2045-2322
- Publisher:
- Nature Publishing Group
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; structural properties; synthesis and processing
Citation Formats
Li, Nan, Yadav, Satyesh K., Wang, Jian, Liu, Xiang -Yang, and Misra, Amit. Growth and stress-induced transformation of zinc blende AlN layers in Al-AlN-TiN multilayers. United States: N. p., 2015.
Web. doi:10.1038/srep18554.
Li, Nan, Yadav, Satyesh K., Wang, Jian, Liu, Xiang -Yang, & Misra, Amit. Growth and stress-induced transformation of zinc blende AlN layers in Al-AlN-TiN multilayers. United States. https://doi.org/10.1038/srep18554
Li, Nan, Yadav, Satyesh K., Wang, Jian, Liu, Xiang -Yang, and Misra, Amit. Fri .
"Growth and stress-induced transformation of zinc blende AlN layers in Al-AlN-TiN multilayers". United States. https://doi.org/10.1038/srep18554. https://www.osti.gov/servlets/purl/1259302.
@article{osti_1259302,
title = {Growth and stress-induced transformation of zinc blende AlN layers in Al-AlN-TiN multilayers},
author = {Li, Nan and Yadav, Satyesh K. and Wang, Jian and Liu, Xiang -Yang and Misra, Amit},
abstractNote = {We report that AlN nanolayers in sputter deposited {111}Al/AlN/TiN multilayers exhibit the metastable zinc-blende-structure (z-AlN). Based on density function theory calculations, the growth of the z-AlN is ascribed to the kinetically and energetically favored nitridation of the deposited aluminium layer. In situ nanoindentation of the as-deposited {111}Al/AlN/TiN multilayers in a high-resolution transmission electron microscope revealed the z-AlN to wurzite AlN phase transformation through collective glide of Shockley partial dislocations on every two {111} planes of the z-AlN.},
doi = {10.1038/srep18554},
journal = {Scientific Reports},
number = ,
volume = 5,
place = {United States},
year = {Fri Dec 18 00:00:00 EST 2015},
month = {Fri Dec 18 00:00:00 EST 2015}
}
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Cited by: 23 works
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Figures / Tables:
Figure 1: (a) TEM image of the as-deposited films with the individual layer thickness 5 nm. (b) A magnified HRTEM image of the as-deposited films showing crystal structures of Al-AlN-TiN trilayers. (c) A magnified HRTEM image of the deformed film showing crystal structures of Al-AlN-TiN trilayers. The white dashed linesmore »
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Works referencing / citing this record:
Structural Engineering of Zinc-Blend/Wurtzite BN Superlattices
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Figures / Tables found in this record:
Figures/Tables have been extracted from DOE-funded journal article accepted manuscripts.