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Title: Growth and stress-induced transformation of zinc blende AlN layers in Al-AlN-TiN multilayers

Abstract

We report that AlN nanolayers in sputter deposited {111}Al/AlN/TiN multilayers exhibit the metastable zinc-blende-structure (z-AlN). Based on density function theory calculations, the growth of the z-AlN is ascribed to the kinetically and energetically favored nitridation of the deposited aluminium layer. In situ nanoindentation of the as-deposited {111}Al/AlN/TiN multilayers in a high-resolution transmission electron microscope revealed the z-AlN to wurzite AlN phase transformation through collective glide of Shockley partial dislocations on every two {111} planes of the z-AlN.

Authors:
 [1];  [2];  [3];  [2];  [4]
  1. Los Alamos National Lab. (LANL), Los Alamos, NM (United States). Materials Physics and Applications Division
  2. Los Alamos National Lab. (LANL), Los Alamos, NM (United States). Materials Science and Technology Division
  3. Univ. of Nebraska, Lincoln, NE (United States)
  4. Univ. of Michigan, Ann Arbor, MI (United States)
Publication Date:
Research Org.:
Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1259302
Resource Type:
Accepted Manuscript
Journal Name:
Scientific Reports
Additional Journal Information:
Journal Volume: 5; Journal ID: ISSN 2045-2322
Publisher:
Nature Publishing Group
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; structural properties; synthesis and processing

Citation Formats

Li, Nan, Yadav, Satyesh K., Wang, Jian, Liu, Xiang -Yang, and Misra, Amit. Growth and stress-induced transformation of zinc blende AlN layers in Al-AlN-TiN multilayers. United States: N. p., 2015. Web. doi:10.1038/srep18554.
Li, Nan, Yadav, Satyesh K., Wang, Jian, Liu, Xiang -Yang, & Misra, Amit. Growth and stress-induced transformation of zinc blende AlN layers in Al-AlN-TiN multilayers. United States. https://doi.org/10.1038/srep18554
Li, Nan, Yadav, Satyesh K., Wang, Jian, Liu, Xiang -Yang, and Misra, Amit. Fri . "Growth and stress-induced transformation of zinc blende AlN layers in Al-AlN-TiN multilayers". United States. https://doi.org/10.1038/srep18554. https://www.osti.gov/servlets/purl/1259302.
@article{osti_1259302,
title = {Growth and stress-induced transformation of zinc blende AlN layers in Al-AlN-TiN multilayers},
author = {Li, Nan and Yadav, Satyesh K. and Wang, Jian and Liu, Xiang -Yang and Misra, Amit},
abstractNote = {We report that AlN nanolayers in sputter deposited {111}Al/AlN/TiN multilayers exhibit the metastable zinc-blende-structure (z-AlN). Based on density function theory calculations, the growth of the z-AlN is ascribed to the kinetically and energetically favored nitridation of the deposited aluminium layer. In situ nanoindentation of the as-deposited {111}Al/AlN/TiN multilayers in a high-resolution transmission electron microscope revealed the z-AlN to wurzite AlN phase transformation through collective glide of Shockley partial dislocations on every two {111} planes of the z-AlN.},
doi = {10.1038/srep18554},
journal = {Scientific Reports},
number = ,
volume = 5,
place = {United States},
year = {Fri Dec 18 00:00:00 EST 2015},
month = {Fri Dec 18 00:00:00 EST 2015}
}

Journal Article:
Free Publicly Available Full Text
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Cited by: 23 works
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Figures / Tables:

Figure 1 Figure 1: (a) TEM image of the as-deposited films with the individual layer thickness 5 nm. (b) A magnified HRTEM image of the as-deposited films showing crystal structures of Al-AlN-TiN trilayers. (c) A magnified HRTEM image of the deformed film showing crystal structures of Al-AlN-TiN trilayers. The white dashed linesmore » indicate the interface between the TiN and Al. The yellow dashed lines indicate the Al and AlN interface and the AlN and TiN interface.« less

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Works referencing / citing this record:

Structural Engineering of Zinc-Blend/Wurtzite BN Superlattices
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