Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas
- Authors:
-
[1];
[3];
- Department of Electrical Engineering and Computer Science, University of Michigan, 1301 Beal Ave, Ann Arbor, Michigan 48109, USA
- Nuclear Engineering Department, North Carolina State University, 2500 Stinson Drive, Raleigh, North Carolina 27695, USA
- MKS Instruments, Inc. 100 Highpower Road, Rochester, New York 14623, USA
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1228183
- Grant/Contract Number:
- SC0001319
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Journal of Applied Physics
- Additional Journal Information:
- Journal Name: Journal of Applied Physics Journal Volume: 117 Journal Issue: 23; Journal ID: ISSN 0021-8979
- Publisher:
- American Institute of Physics
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Zhang, Yiting, Zafar, Abdullah, Coumou, David J., Shannon, Steven C., and Kushner, Mark J. Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas. United States: N. p., 2015.
Web. doi:10.1063/1.4922631.
Zhang, Yiting, Zafar, Abdullah, Coumou, David J., Shannon, Steven C., & Kushner, Mark J. Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas. United States. https://doi.org/10.1063/1.4922631
Zhang, Yiting, Zafar, Abdullah, Coumou, David J., Shannon, Steven C., and Kushner, Mark J. Wed .
"Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas". United States. https://doi.org/10.1063/1.4922631.
@article{osti_1228183,
title = {Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas},
author = {Zhang, Yiting and Zafar, Abdullah and Coumou, David J. and Shannon, Steven C. and Kushner, Mark J.},
abstractNote = {},
doi = {10.1063/1.4922631},
journal = {Journal of Applied Physics},
number = 23,
volume = 117,
place = {United States},
year = {Wed Jun 17 00:00:00 EDT 2015},
month = {Wed Jun 17 00:00:00 EDT 2015}
}
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https://doi.org/10.1063/1.4922631
https://doi.org/10.1063/1.4922631
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Cited by: 49 works
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