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Title: Plastic Deformation in Profile-Coated Elliptical KB Mirrors

Abstract

Profile coating has been successfully applied to produce elliptical Kirkpatrick-Baez (KB) mirrors using both cylindrical and flat Si substrates. Previously, focusing widths of 70 nm with 15-keV monochromatic and 80 nm with white beam were achieved using a flat Si substrate. Now, precision elliptical KB mirrors with sub-nm figure errors are produced with both Au and Pt coatings on flat substrates. Here, recent studies of bare Si-, Au-, and Pt-coated KB mirrors under prolonged synchrotron X-ray radiation and low-temperature vacuum annealing will be discussed in terms of film stress relaxation and Si plastic deformation.

Authors:
 [1];  [2];  [1];  [3];  [1];  [1];  [1];  [4];  [1]
+ Show Author Affiliations
  1. X-ray Science Division, Argonne National Laboratory, Argonne, IL 60439, USA
  2. National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA
  3. Synchrotron Soleil, BP 48 Saint-Aubin, 91192 Gif-sur-Yvette, France
  4. Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
Publication Date:
Research Org.:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1197880
Alternate Identifier(s):
OSTI ID: 1052266
Grant/Contract Number:  
AC02-06CH11357; AC05-00OR22725
Resource Type:
Published Article
Journal Name:
ISRN Optics
Additional Journal Information:
Journal Name: ISRN Optics Journal Volume: 2012; Journal ID: ISSN 2090-7826
Publisher:
Hindawi (International Scholarly Research Network)
Country of Publication:
Egypt
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Liu, Chian, Conley, R., Qian, J., Kewish, C. M., Liu, W., Assoufid, L., Macrander, A. T., Ice, G. E., and Tischler, J. Z. Plastic Deformation in Profile-Coated Elliptical KB Mirrors. Egypt: N. p., 2012. Web. doi:10.5402/2012/151092.
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Liu, Chian, Conley, R., Qian, J., Kewish, C. M., Liu, W., Assoufid, L., Macrander, A. T., Ice, G. E., & Tischler, J. Z. Plastic Deformation in Profile-Coated Elliptical KB Mirrors. Egypt. https://doi.org/10.5402/2012/151092
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Liu, Chian, Conley, R., Qian, J., Kewish, C. M., Liu, W., Assoufid, L., Macrander, A. T., Ice, G. E., and Tischler, J. Z. Tue . "Plastic Deformation in Profile-Coated Elliptical KB Mirrors". Egypt. https://doi.org/10.5402/2012/151092.
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@article{osti_1197880,
title = {Plastic Deformation in Profile-Coated Elliptical KB Mirrors},
author = {Liu, Chian and Conley, R. and Qian, J. and Kewish, C. M. and Liu, W. and Assoufid, L. and Macrander, A. T. and Ice, G. E. and Tischler, J. Z.},
abstractNote = {Profile coating has been successfully applied to produce elliptical Kirkpatrick-Baez (KB) mirrors using both cylindrical and flat Si substrates. Previously, focusing widths of 70 nm with 15-keV monochromatic and 80 nm with white beam were achieved using a flat Si substrate. Now, precision elliptical KB mirrors with sub-nm figure errors are produced with both Au and Pt coatings on flat substrates. Here, recent studies of bare Si-, Au-, and Pt-coated KB mirrors under prolonged synchrotron X-ray radiation and low-temperature vacuum annealing will be discussed in terms of film stress relaxation and Si plastic deformation.},
doi = {10.5402/2012/151092},
journal = {ISRN Optics},
number = ,
volume = 2012,
place = {Egypt},
year = {Tue Sep 04 00:00:00 EDT 2012},
month = {Tue Sep 04 00:00:00 EDT 2012}
}
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Publisher's Version of Record
https://doi.org/10.5402/2012/151092
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Works referenced in this record:

The Tension of Metallic Films Deposited by Electrolysis
journal, May 1909

  • Stoney, G. G.
  • Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences, Vol. 82, Issue 553
  • DOI: 10.1098/rspa.1909.0021

Diffusion in a Single Crystal within a Stressed Environment
journal, October 2007

On the Figuring and Correcting of Mirrors by Controlled Deposition of Aluminum1
journal, January 1936

  • Strong, John; Gaviola, E.
  • Journal of the Optical Society of America, Vol. 26, Issue 4
  • DOI: 10.1364/JOSA.26.000153

Short focal length Kirkpatrick-Baez mirrors for a hard x-ray nanoprobe
journal, November 2005

  • Liu, Wenjun; Ice, Gene E.; Tischler, Jonathan Z.
  • Review of Scientific Instruments, Vol. 76, Issue 11
  • DOI: 10.1063/1.2125730

From Flat Substrate to Elliptical KB Mirror by Profile Coating
conference, January 2004

  • Liu, Chian
  • SYNCHROTRON RADIATION INSTRUMENTATION: Eighth International Conference on Synchrotron Radiation Instrumentation, AIP Conference Proceedings
  • DOI: 10.1063/1.1757893

Thermal stresses in the reflective x-ray optics for the Linac Coherent Light Source
journal, August 2003

  • Ryutov, D. D.
  • Review of Scientific Instruments, Vol. 74, Issue 8
  • DOI: 10.1063/1.1590747

Profile coating and its application for Kirkpatrick-Baez mirrors
journal, December 2003

Fabrication of nested elliptical KB mirrors using profile coating for synchrotron radiation X-ray focusing
journal, January 2012

Residual stress and microstructure of as-deposited and annealed, sputtered yttria-stabilized zirconia thin films
journal, March 2008

  • Quinn, David J.; Wardle, Brian; Spearing, S. Mark
  • Journal of Materials Research, Vol. 23, Issue 3
  • DOI: 10.1557/JMR.2008.0077

Physics of loose abrasive microgrinding
journal, January 1991

Stress-related effects in thin films
journal, April 1989

Achromatic nested Kirkpatrick–Baez mirror optics for hard X-ray nanofocusing
journal, May 2011

  • Liu, Wenjun; Ice, Gene E.; Assoufid, Lahsen
  • Journal of Synchrotron Radiation, Vol. 18, Issue 4
  • DOI: 10.1107/S0909049511010995
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