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Title: Profile etching for prefiguring X-ray mirrors

Journal Article · · Journal of Synchrotron Radiation (Online)
; ;

A method to pre-shape mirror substrates through etching with a broad-beam ion source and a contoured mask is presented. A 100 mm-long elliptical cylinder substrate was obtained from a super-polished flat Si substrate with a 48 nm root-mean-square (r.m.s.) figure error and a 1.5 Å r.m.s. roughness after one profile-etching process at a beam voltage of 600 V without iteration. A follow-up profile coating can be used to achieve a final mirror. Profile etching and profile coating combined provide an economic way to make X-ray optics, such as nested Kirkpatrick–Baez mirrors.

Research Organization:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
DOE Contract Number:
AC02-06CH11357
OSTI ID:
1395991
Journal Information:
Journal of Synchrotron Radiation (Online), Vol. 22, Issue 2; ISSN 1600-5775
Publisher:
International Union of Crystallography
Country of Publication:
United States
Language:
English

References (8)

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Towards the preparation of optical surfaces preserving the coherence of hard x-ray beams
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conference November 2001
Ion beam profiling of aspherical X-ray mirrors
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journal May 2010
Reconstruction of an astigmatic hard X-ray beam and alignment of K-B mirrors from ptychographic coherent diffraction data journal January 2010
Evolution of surface roughness in silicon X-ray mirrors exposed to a low-energy ion beam
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  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3 https://doi.org/10.1016/j.nima.2009.12.062
journal May 2010
Nanometer Linear Focusing of Hard X Rays by a Multilayer Laue Lens journal March 2006
Profile coating and its application for Kirkpatrick-Baez mirrors journal December 2003
Fabrication of nested elliptical KB mirrors using profile coating for synchrotron radiation X-ray focusing journal January 2012

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Related Subjects

73 NUCLEAR PHYSICS AND RADIATION PHYSICS
Broad beam ion figuring
KB mirrors
ion etching
profile coating