Abstract
Equilibria in Nb-N-Cl-H system are calculated with an account 29 components in condensed and gaseous states, including 6 niobioum nitride phases. Residue phase diagrams by deposition of niobium nitrides from vapour-gas mixture and diagrams of residue equilibrium compositions as function of the mentioned parameters, which enabled determination of the deposition process optimal regime for [epsilon]-NbN pure phase are plotted.
Gorbov, S I;
Petrusevich, I V;
Ogurtsov, S V
[1]
- Moskovskij Meditsinskij Stomatologicheskij Inst., Moscow (Russian Federation) Gosudarstvennyj Nauchno-Issledovatel'skij i Proektnyj Inst. Redkometallicheskoj Promyshlennosti, Moscow (Russian Federation)
Citation Formats
Gorbov, S I, Petrusevich, I V, and Ogurtsov, S V.
Equilibrium calculation during deposition of nitride films in Nb-N-Cl-H system. Raschety ravnovesij pri osazhdenii nitridnykh plenok v sisteme Nb-N-Cl-H.
Russian Federation: N. p.,
1991.
Web.
Gorbov, S I, Petrusevich, I V, & Ogurtsov, S V.
Equilibrium calculation during deposition of nitride films in Nb-N-Cl-H system. Raschety ravnovesij pri osazhdenii nitridnykh plenok v sisteme Nb-N-Cl-H.
Russian Federation.
Gorbov, S I, Petrusevich, I V, and Ogurtsov, S V.
1991.
"Equilibrium calculation during deposition of nitride films in Nb-N-Cl-H system. Raschety ravnovesij pri osazhdenii nitridnykh plenok v sisteme Nb-N-Cl-H."
Russian Federation.
@misc{etde_6461768,
title = {Equilibrium calculation during deposition of nitride films in Nb-N-Cl-H system. Raschety ravnovesij pri osazhdenii nitridnykh plenok v sisteme Nb-N-Cl-H}
author = {Gorbov, S I, Petrusevich, I V, and Ogurtsov, S V}
abstractNote = {Equilibria in Nb-N-Cl-H system are calculated with an account 29 components in condensed and gaseous states, including 6 niobioum nitride phases. Residue phase diagrams by deposition of niobium nitrides from vapour-gas mixture and diagrams of residue equilibrium compositions as function of the mentioned parameters, which enabled determination of the deposition process optimal regime for [epsilon]-NbN pure phase are plotted.}
journal = []
volume = {27:11}
journal type = {AC}
place = {Russian Federation}
year = {1991}
month = {Nov}
}
title = {Equilibrium calculation during deposition of nitride films in Nb-N-Cl-H system. Raschety ravnovesij pri osazhdenii nitridnykh plenok v sisteme Nb-N-Cl-H}
author = {Gorbov, S I, Petrusevich, I V, and Ogurtsov, S V}
abstractNote = {Equilibria in Nb-N-Cl-H system are calculated with an account 29 components in condensed and gaseous states, including 6 niobioum nitride phases. Residue phase diagrams by deposition of niobium nitrides from vapour-gas mixture and diagrams of residue equilibrium compositions as function of the mentioned parameters, which enabled determination of the deposition process optimal regime for [epsilon]-NbN pure phase are plotted.}
journal = []
volume = {27:11}
journal type = {AC}
place = {Russian Federation}
year = {1991}
month = {Nov}
}