{
  "date" : "1991-11-01",
  "identifier_doecontract" : "",
  "subject" : "36 MATERIALS SCIENCE; NIOBIUM COMPOUNDS; CHEMICAL VAPOR DEPOSITION; PHASE DIAGRAMS; NITRIDES; CHLORIDES; FILMS; HYDRIDES; NUMERICAL SOLUTION; PHASE STUDIES; THERMODYNAMIC PROPERTIES; CHEMICAL COATING; CHLORINE COMPOUNDS; DEPOSITION; DIAGRAMS; HALIDES; HALOGEN COMPOUNDS; HYDROGEN COMPOUNDS; NITROGEN COMPOUNDS; PHYSICAL PROPERTIES; PNICTIDES; REFRACTORY METAL COMPOUNDS; SURFACE COATING; TRANSITION ELEMENT COMPOUNDS; 360202* - Ceramics, Cermets, & Refractories- Structure & Phase Studies; 360606 - Other Materials- Physical Properties- (1992-)",
  "description" : "Equilibria in Nb-N-Cl-H system are calculated with an account 29 components in condensed and gaseous states, including 6 niobioum nitride phases. Residue phase diagrams by deposition of niobium nitrides from vapour-gas mixture and diagrams of residue equilibrium compositions as function of the mentioned parameters, which enabled determination of the deposition process optimal regime for [epsilon]-NbN pure phase are plotted.",
  "language" : "Russian",
  "identifier_report" : "",
  "publisher_sponsor" : "",
  "publisher_country" : "Russian Federation",
  "source" : "INIS; AIX-24-046636; EDB-93-097999",
  "purl" : "",
  "title" : "Equilibrium calculation during deposition of nitride films in Nb-N-Cl-H system. Raschety ravnovesij pri osazhdenii nitridnykh plenok v sisteme Nb-N-Cl-H",
  "type" : "Journal Article",
  "subject_related" : "",
  "relation" : "Journal Name: Izvestiya Akademii Nauk SSSR, Neorganicheskie Materialy; (Russian Federation); Journal Volume: 27:11",
  "entry_date" : "2010-12-30",
  "subject_list" : [ "36 MATERIALS SCIENCE", "NIOBIUM COMPOUNDS", "CHEMICAL VAPOR DEPOSITION", "PHASE DIAGRAMS", "NITRIDES", "CHLORIDES", "FILMS", "HYDRIDES", "NUMERICAL SOLUTION", "PHASE STUDIES", "THERMODYNAMIC PROPERTIES", "CHEMICAL COATING", "CHLORINE COMPOUNDS", "DEPOSITION", "DIAGRAMS", "HALIDES", "HALOGEN COMPOUNDS", "HYDROGEN COMPOUNDS", "NITROGEN COMPOUNDS", "PHYSICAL PROPERTIES", "PNICTIDES", "REFRACTORY METAL COMPOUNDS", "SURFACE COATING", "TRANSITION ELEMENT COMPOUNDS", "360202* - Ceramics, Cermets, & Refractories- Structure & Phase Studies", "360606 - Other Materials- Physical Properties- (1992-)" ],
  "publisher_availability" : "",
  "rights" : "",
  "announced_date" : "1993-08-15",
  "type_qualifier" : "",
  "has_fulltext" : false,
  "coverage" : "",
  "identifier" : "",
  "journal_volume" : "27:11",
  "creator" : "Gorbov, S I; Petrusevich, I V; Ogurtsov, S V [Moskovskij Meditsinskij Stomatologicheskij Inst., Moscow (Russian Federation) Gosudarstvennyj Nauchno-Issledovatel'skij i Proektnyj Inst. Redkometallicheskoj Promyshlennosti, Moscow (Russian Federation)]",
  "site_ownership_code" : "INIS",
  "osti_id" : "6461768",
  "journal_issue" : "",
  "resource_type" : "JOUR",
  "format" : "Medium: X; Size: Pages: 2318-2323",
  "journal_name" : [ ],
  "contributing_organizations" : "",
  "citation_location" : "https://www.osti.gov/etdeweb/biblio/6461768",
  "publication_year" : 1991,
  "subject_list_commas" : "36 MATERIALS SCIENCE, NIOBIUM COMPOUNDS, CHEMICAL VAPOR DEPOSITION, PHASE DIAGRAMS, NITRIDES, CHLORIDES, FILMS, HYDRIDES, NUMERICAL SOLUTION, PHASE STUDIES, THERMODYNAMIC PROPERTIES, CHEMICAL COATING, CHLORINE COMPOUNDS, DEPOSITION, DIAGRAMS, HALIDES, HALOGEN COMPOUNDS, HYDROGEN COMPOUNDS, NITROGEN COMPOUNDS, PHYSICAL PROPERTIES, PNICTIDES, REFRACTORY METAL COMPOUNDS, SURFACE COATING, TRANSITION ELEMENT COMPOUNDS, 360202* - Ceramics, Cermets, & Refractories- Structure & Phase Studies, 360606 - Other Materials- Physical Properties- (1992-)",
  "publisher" : "",
  "identifier_other" : "Journal ID: ISSN 0002-337X; CODEN: IVNMAW",
  "publisher_research" : "",
  "creators_list" : [ "Gorbov, S I", "Petrusevich, I V", "Ogurtsov, S V [Moskovskij Meditsinskij Stomatologicheskij Inst., Moscow (Russian Federation) Gosudarstvennyj Nauchno-Issledovatel'skij i Proektnyj Inst. Redkometallicheskoj Promyshlennosti, Moscow (Russian Federation)]" ],
  "doi" : "https://doi.org/"
}