Equilibrium calculation during deposition of nitride films in Nb-N-Cl-H system. Raschety ravnovesij pri osazhdenii nitridnykh plenok v sisteme Nb-N-Cl-H Gorbov, S I; Petrusevich, I V; Ogurtsov, S V [Moskovskij Meditsinskij Stomatologicheskij Inst., Moscow (Russian Federation) Gosudarstvennyj Nauchno-Issledovatel'skij i Proektnyj Inst. Redkometallicheskoj Promyshlennosti, Moscow (Russian Federation)] 36 MATERIALS SCIENCE; NIOBIUM COMPOUNDS; CHEMICAL VAPOR DEPOSITION; PHASE DIAGRAMS; NITRIDES; CHLORIDES; FILMS; HYDRIDES; NUMERICAL SOLUTION; PHASE STUDIES; THERMODYNAMIC PROPERTIES; CHEMICAL COATING; CHLORINE COMPOUNDS; DEPOSITION; DIAGRAMS; HALIDES; HALOGEN COMPOUNDS; HYDROGEN COMPOUNDS; NITROGEN COMPOUNDS; PHYSICAL PROPERTIES; PNICTIDES; REFRACTORY METAL COMPOUNDS; SURFACE COATING; TRANSITION ELEMENT COMPOUNDS; 360202* - Ceramics, Cermets, & Refractories- Structure & Phase Studies; 360606 - Other Materials- Physical Properties- (1992-) Equilibria in Nb-N-Cl-H system are calculated with an account 29 components in condensed and gaseous states, including 6 niobioum nitride phases. Residue phase diagrams by deposition of niobium nitrides from vapour-gas mixture and diagrams of residue equilibrium compositions as function of the mentioned parameters, which enabled determination of the deposition process optimal regime for [epsilon]-NbN pure phase are plotted. Russian Federation 1991-11-01 Russian Journal Article Journal Name: Izvestiya Akademii Nauk SSSR, Neorganicheskie Materialy; (Russian Federation); Journal Volume: 27:11 Medium: X; Size: Pages: 2318-2323 https://doi.org/ [] 27:11 Journal ID: ISSN 0002-337X; CODEN: IVNMAW INIS; AIX-24-046636; EDB-93-097999 2010-12-30 6461768