Spin coating apparatus
Abstract
A spin coating apparatus requires less cleanroom air flow than prior spin coating apparatus to minimize cleanroom contamination. A shaped exhaust duct from the spin coater maintains process quality while requiring reduced cleanroom air flow. The exhaust duct can decrease in cross section as it extends from the wafer, minimizing eddy formation. The exhaust duct can conform to entrainment streamlines to minimize eddy formation and reduce interprocess contamination at minimal cleanroom air flow rates.
- Inventors:
-
- Albuquerque, NM
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 873457
- Patent Number(s):
- 6165267
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B05 - SPRAYING OR ATOMISING IN GENERAL B05C - APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
B - PERFORMING OPERATIONS B08 - CLEANING B08B - CLEANING IN GENERAL
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- spin; coating; apparatus; requires; cleanroom; air; flow; prior; minimize; contamination; shaped; exhaust; duct; coater; maintains; process; quality; requiring; reduced; decrease; section; extends; wafer; minimizing; eddy; formation; conform; entrainment; streamlines; reduce; interprocess; minimal; rates; spin coating; cleanroom air; flow rates; flow rate; air flow; exhaust duct; coating apparatus; reduced cleanroom; /118/134/137/396/427/
Citation Formats
Torczynski, John R. Spin coating apparatus. United States: N. p., 2000.
Web.
Torczynski, John R. Spin coating apparatus. United States.
Torczynski, John R. Sat .
"Spin coating apparatus". United States. https://www.osti.gov/servlets/purl/873457.
@article{osti_873457,
title = {Spin coating apparatus},
author = {Torczynski, John R},
abstractNote = {A spin coating apparatus requires less cleanroom air flow than prior spin coating apparatus to minimize cleanroom contamination. A shaped exhaust duct from the spin coater maintains process quality while requiring reduced cleanroom air flow. The exhaust duct can decrease in cross section as it extends from the wafer, minimizing eddy formation. The exhaust duct can conform to entrainment streamlines to minimize eddy formation and reduce interprocess contamination at minimal cleanroom air flow rates.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Jan 01 00:00:00 EST 2000},
month = {Sat Jan 01 00:00:00 EST 2000}
}
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