Micro benchtop optics by bulk silicon micromachining
Abstract
Micromachining of bulk silicon utilizing the parallel etching characteristics of bulk silicon and integrating the parallel etch planes of silicon with silicon wafer bonding and impurity doping, enables the fabrication of on-chip optics with in situ aligned etched grooves for optical fibers, micro-lenses, photodiodes, and laser diodes. Other optical components that can be microfabricated and integrated include semi-transparent beam splitters, micro-optical scanners, pinholes, optical gratings, micro-optical filters, etc. Micromachining of bulk silicon utilizing the parallel etching characteristics thereof can be utilized to develop miniaturization of bio-instrumentation such as wavelength monitoring by fluorescence spectrometers, and other miniaturized optical systems such as Fabry-Perot interferometry for filtering of wavelengths, tunable cavity lasers, micro-holography modules, and wavelength splitters for optical communication systems.
- Inventors:
-
- Walnut Creek, CA
- Livermore, CA
- Pleasanton, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 873023
- Patent Number(s):
- 6071426
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- micro; benchtop; optics; bulk; silicon; micromachining; utilizing; parallel; etching; characteristics; integrating; etch; planes; wafer; bonding; impurity; doping; enables; fabrication; on-chip; situ; aligned; etched; grooves; optical; fibers; micro-lenses; photodiodes; laser; diodes; components; microfabricated; integrated; semi-transparent; beam; splitters; micro-optical; scanners; pinholes; gratings; filters; etc; utilized; miniaturization; bio-instrumentation; wavelength; monitoring; fluorescence; spectrometers; miniaturized; systems; fabry-perot; interferometry; filtering; wavelengths; tunable; cavity; lasers; micro-holography; modules; communication; laser diodes; optical systems; optical communication; optical components; optical filter; beam splitter; optical fibers; optical fiber; laser diode; silicon wafer; bulk silicon; communication systems; optical scanner; beam splitters; silicon micromachining; optical component; optical filters; optical grating; fabry-perot interferometry; parallel etch; /216/385/
Citation Formats
Lee, Abraham P, Pocha, Michael D, McConaghy, Charles F, and Deri, Robert J. Micro benchtop optics by bulk silicon micromachining. United States: N. p., 2000.
Web.
Lee, Abraham P, Pocha, Michael D, McConaghy, Charles F, & Deri, Robert J. Micro benchtop optics by bulk silicon micromachining. United States.
Lee, Abraham P, Pocha, Michael D, McConaghy, Charles F, and Deri, Robert J. Sat .
"Micro benchtop optics by bulk silicon micromachining". United States. https://www.osti.gov/servlets/purl/873023.
@article{osti_873023,
title = {Micro benchtop optics by bulk silicon micromachining},
author = {Lee, Abraham P and Pocha, Michael D and McConaghy, Charles F and Deri, Robert J},
abstractNote = {Micromachining of bulk silicon utilizing the parallel etching characteristics of bulk silicon and integrating the parallel etch planes of silicon with silicon wafer bonding and impurity doping, enables the fabrication of on-chip optics with in situ aligned etched grooves for optical fibers, micro-lenses, photodiodes, and laser diodes. Other optical components that can be microfabricated and integrated include semi-transparent beam splitters, micro-optical scanners, pinholes, optical gratings, micro-optical filters, etc. Micromachining of bulk silicon utilizing the parallel etching characteristics thereof can be utilized to develop miniaturization of bio-instrumentation such as wavelength monitoring by fluorescence spectrometers, and other miniaturized optical systems such as Fabry-Perot interferometry for filtering of wavelengths, tunable cavity lasers, micro-holography modules, and wavelength splitters for optical communication systems.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Jan 01 00:00:00 EST 2000},
month = {Sat Jan 01 00:00:00 EST 2000}
}