Micro-machined resonator
Abstract
A micro-machined resonator, typically quartz, with upper and lower micro-machinable support members, or covers, having etched wells which may be lined with conductive electrode material, between the support members is a quartz resonator having an energy trapping quartz mesa capacitively coupled to the electrode through a diaphragm; the quartz resonator is supported by either micro-machined cantilever springs or by thin layers extending over the surfaces of the support. If the diaphragm is rigid, clock applications are available, and if the diaphragm is resilient, then transducer applications can be achieved. Either the thin support layers or the conductive electrode material can be integral with the diaphragm. In any event, the covers are bonded to form a hermetic seal and the interior volume may be filled with a gas or may be evacuated. In addition, one or both of the covers may include oscillator and interface circuitry for the resonator.
- Inventors:
-
- Albuquerque, NM
- Issue Date:
- Research Org.:
- AT&T
- OSTI Identifier:
- 868721
- Patent Number(s):
- 5198716
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- micro-machined; resonator; typically; quartz; upper; micro-machinable; support; covers; etched; lined; conductive; electrode; material; energy; trapping; mesa; capacitively; coupled; diaphragm; supported; cantilever; springs; layers; extending; surfaces; rigid; clock; applications; available; resilient; transducer; achieved; integral; event; bonded; form; hermetic; seal; interior; volume; filled; gas; evacuated; addition; oscillator; interface; circuitry; capacitively coupled; quartz resonator; electrode material; support layer; hermetic seal; micro-machined resonator; conductive electrode; cantilever spring; /310/
Citation Formats
Godshall, Ned A, Koehler, Dale R, Liang, Alan Y, and Smith, Bradley K. Micro-machined resonator. United States: N. p., 1993.
Web.
Godshall, Ned A, Koehler, Dale R, Liang, Alan Y, & Smith, Bradley K. Micro-machined resonator. United States.
Godshall, Ned A, Koehler, Dale R, Liang, Alan Y, and Smith, Bradley K. Fri .
"Micro-machined resonator". United States. https://www.osti.gov/servlets/purl/868721.
@article{osti_868721,
title = {Micro-machined resonator},
author = {Godshall, Ned A and Koehler, Dale R and Liang, Alan Y and Smith, Bradley K},
abstractNote = {A micro-machined resonator, typically quartz, with upper and lower micro-machinable support members, or covers, having etched wells which may be lined with conductive electrode material, between the support members is a quartz resonator having an energy trapping quartz mesa capacitively coupled to the electrode through a diaphragm; the quartz resonator is supported by either micro-machined cantilever springs or by thin layers extending over the surfaces of the support. If the diaphragm is rigid, clock applications are available, and if the diaphragm is resilient, then transducer applications can be achieved. Either the thin support layers or the conductive electrode material can be integral with the diaphragm. In any event, the covers are bonded to form a hermetic seal and the interior volume may be filled with a gas or may be evacuated. In addition, one or both of the covers may include oscillator and interface circuitry for the resonator.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Jan 01 00:00:00 EST 1993},
month = {Fri Jan 01 00:00:00 EST 1993}
}
Works referenced in this record:
Silicon as a mechanical material
journal, May 1982
- Petersen, K. E.
- Proceedings of the IEEE, Vol. 70, Issue 5