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Title: Micro-machined resonator oscillator

A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.
Inventors:
 [1];  [1];  [1];  [1]
  1. (Albuquerque, NM)
Issue Date:
OSTI Identifier:
869452
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
Patent Number(s):
US 5339051
Contract Number:
AC04-76DP00789
Research Org:
AT & T CORP
Country of Publication:
United States
Language:
English
Subject:
micro-machined; resonator; oscillator; micro-miniature; resonator-oscillator; disclosed; due; miniaturization; oscillation; frequencies; mhz; utilized; thickness-mode; quartz; housed; silicon; package; operated; telemetered; sensor; beacon; digital; self-powered; remote; parameter; measuring-transmitter; fm-band; design; trapped; energy; principles; temperature; dependence; methodology; crystal; orientation; control; operation; 20-100; range; volume; batch-processing; manufacturing; assembly; wafer; level; unique; features; squeeze-film; damping; robust; vibration; shock; performance; capacitive; coupling; diaphragms; allowing; excitation; exterior; circuit; integration; extremely; square; dimensioning; family; beacons; widespread; applications; bio-medical; sensors; vehicle; status; monitors; high-volume; animal; identification; health; allows; measurement; temperatures; chemicals; acceleration; pressure; microphone; clock; realization; available; quartz resonator; resonator assembly; temperature dependence; micro-machined resonator; crystal orientation; design features; hz range; allows measurement; medical sensor; capacitive coupling; /331/310/324/343/455/