Method to fabricate silicon chromatographic column comprising fluid ports
Abstract
A new method for fabricating a silicon chromatographic column comprising through-substrate fluid ports has been developed. This new method enables the fabrication of multi-layer interconnected stacks of silicon chromatographic columns.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1174746
- Patent Number(s):
- 6699392
- Application Number:
- 10/167,238
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
Citation Formats
Manginell, Ronald P., Frye-Mason, Gregory C., Heller, Edwin J., and Adkins, Douglas R. Method to fabricate silicon chromatographic column comprising fluid ports. United States: N. p., 2004.
Web.
Manginell, Ronald P., Frye-Mason, Gregory C., Heller, Edwin J., & Adkins, Douglas R. Method to fabricate silicon chromatographic column comprising fluid ports. United States.
Manginell, Ronald P., Frye-Mason, Gregory C., Heller, Edwin J., and Adkins, Douglas R. Tue .
"Method to fabricate silicon chromatographic column comprising fluid ports". United States. https://www.osti.gov/servlets/purl/1174746.
@article{osti_1174746,
title = {Method to fabricate silicon chromatographic column comprising fluid ports},
author = {Manginell, Ronald P. and Frye-Mason, Gregory C. and Heller, Edwin J. and Adkins, Douglas R.},
abstractNote = {A new method for fabricating a silicon chromatographic column comprising through-substrate fluid ports has been developed. This new method enables the fabrication of multi-layer interconnected stacks of silicon chromatographic columns.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 02 00:00:00 EST 2004},
month = {Tue Mar 02 00:00:00 EST 2004}
}