Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom
Abstract
A nanomechanical near-field grating device is disclosed which includes two sub-gratings vertically spaced by a distance less than or equal to an operating wavelength. Each sub-grating includes a plurality of line-elements spaced apart by a distance less than or equal to the operating wavelength. A light source (e.g., a VCSEL or LED) can provide light at the operating wavelength for operation of the device. The device can operate as an active grating, with the intensity of a reflected or transmitted portion of the light varying as the relative positions of the sub-gratings are controlled by an actuator. The device can also operate as a passive grating, with the relative positions of the sub-gratings changing in response to an environmentally-induced force due to acceleration, impact, shock, vibration, gravity, etc. Since the device can be adapted to sense an acceleration that is directed laterally or vertically, a plurality of devices can be located on a common substrate to form a multi-axis acceleration sensor.
- Inventors:
-
- Albuquerque, NM
- Corrales, NM
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 970551
- Patent Number(s):
- 7339738
- Application Number:
- 11/088,313
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Carr, Dustin Wade, Bogart, Gregory Robert, and Keeler, Bianca E. N. Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom. United States: N. p., 2008.
Web.
Carr, Dustin Wade, Bogart, Gregory Robert, & Keeler, Bianca E. N. Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom. United States.
Carr, Dustin Wade, Bogart, Gregory Robert, and Keeler, Bianca E. N. Tue .
"Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom". United States. https://www.osti.gov/servlets/purl/970551.
@article{osti_970551,
title = {Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom},
author = {Carr, Dustin Wade and Bogart, Gregory Robert and Keeler, Bianca E. N.},
abstractNote = {A nanomechanical near-field grating device is disclosed which includes two sub-gratings vertically spaced by a distance less than or equal to an operating wavelength. Each sub-grating includes a plurality of line-elements spaced apart by a distance less than or equal to the operating wavelength. A light source (e.g., a VCSEL or LED) can provide light at the operating wavelength for operation of the device. The device can operate as an active grating, with the intensity of a reflected or transmitted portion of the light varying as the relative positions of the sub-gratings are controlled by an actuator. The device can also operate as a passive grating, with the relative positions of the sub-gratings changing in response to an environmentally-induced force due to acceleration, impact, shock, vibration, gravity, etc. Since the device can be adapted to sense an acceleration that is directed laterally or vertically, a plurality of devices can be located on a common substrate to form a multi-axis acceleration sensor.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 04 00:00:00 EST 2008},
month = {Tue Mar 04 00:00:00 EST 2008}
}
Works referenced in this record:
Laterally deformable optical NEMS grating transducers for inertial sensing applications
conference, January 2005
- Keeler, Bianca E.; Bogart, Gregory R.; Carr, Dustin W.
- Optics East, SPIE Proceedings
Laterally deformable nanomechanical zeroth-order gratings: anomalous diffraction studied by rigorous coupled-wave analysis
journal, January 2003
- Carr, Dustin W.; Sullivan, J. P.; Friedmann, T. A.
- Optics Letters, Vol. 28, Issue 18
Deformable grating optical modulator
journal, January 1992
- Solgaard, O.; Sandejas, F. S. A.; Bloom, D. M.
- Optics Letters, Vol. 17, Issue 9
Thick polysilicon surface-micromachined optically sensed accelerometer
conference, March 1999
- Chen, Yi-Hsing; Wang, Yvonne Y.; Tien, Norman C.
- Optoelectronics '99 - Integrated Optoelectronic Devices, SPIE Proceedings
Measurement of a laterally deformable optical MEMS grating transducer
conference, January 2004
- Carr, Dustin W.; Keeler, Bianca E. N.; Sullivan, John P.
- Micromachining and Microfabrication, SPIE Proceedings
Integrated semiconductor vertical-cavity surface-emitting lasers and PIN photodetectors for biomedical fluorescence sensing
journal, May 2004
- Thrush, E.; Levi, O.; Ha, W.
- IEEE Journal of Quantum Electronics, Vol. 40, Issue 5
Experimental demonstration of a laterally deformable optical nanoelectromechanical system grating transducer
journal, January 2004
- Keeler, Bianca E. N.; Carr, Dustin W.; Sullivan, John P.
- Optics Letters, Vol. 29, Issue 11