Tensile-stressed microelectromechanical apparatus and tiltable micromirrors formed therefrom
Abstract
A microelectromechanical (MEM) apparatus is disclosed which includes a pair of tensile-stressed actuators suspending a platform above a substrate to tilt the platform relative to the substrate. A tensile stress built into the actuators initially tilts the platform when a sacrificial material used in fabrication of the MEM apparatus is removed. Further tilting of the platform can occur with a change in the ambient temperature about the MEM apparatus, or by applying a voltage to one or both of the tensile-stressed actuators. The MEM apparatus can be used to form a tiltable micromirror or an array of such devices, and also has applications for thermal management within satellites.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1176059
- Patent Number(s):
- 7159397
- Application Number:
- 11/146,811
- Assignee:
- Sandia Corporation
- Patent Classifications (CPCs):
-
F - MECHANICAL ENGINEERING F03 - MACHINES OR ENGINES FOR LIQUIDS F03G - SPRING, WEIGHT, INERTIA OR LIKE MOTORS
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Fleming, James G. Tensile-stressed microelectromechanical apparatus and tiltable micromirrors formed therefrom. United States: N. p., 2007.
Web.
Fleming, James G. Tensile-stressed microelectromechanical apparatus and tiltable micromirrors formed therefrom. United States.
Fleming, James G. Tue .
"Tensile-stressed microelectromechanical apparatus and tiltable micromirrors formed therefrom". United States. https://www.osti.gov/servlets/purl/1176059.
@article{osti_1176059,
title = {Tensile-stressed microelectromechanical apparatus and tiltable micromirrors formed therefrom},
author = {Fleming, James G.},
abstractNote = {A microelectromechanical (MEM) apparatus is disclosed which includes a pair of tensile-stressed actuators suspending a platform above a substrate to tilt the platform relative to the substrate. A tensile stress built into the actuators initially tilts the platform when a sacrificial material used in fabrication of the MEM apparatus is removed. Further tilting of the platform can occur with a change in the ambient temperature about the MEM apparatus, or by applying a voltage to one or both of the tensile-stressed actuators. The MEM apparatus can be used to form a tiltable micromirror or an array of such devices, and also has applications for thermal management within satellites.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2007},
month = {1}
}
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Works referenced in this record:
Stress relaxation in Si-rich silicon nitride thin films
journal, May 1998
- Habermehl, S.
- Journal of Applied Physics, Vol. 83, Issue 9, p. 4672-4677
Novel multi-user-MEMS-processes-compatible single-layer out-of-plane electrothermal actuator
journal, April 2003
- Tang, Weider
- Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 2, Issue 2