Metod And Apparatus For Debris Mitigation For An Electrical Discharge Source
Abstract
Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.
- Inventors:
-
- San Clemente, CA
- St. Helena, CA
- Albuquerque, NM
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 879899
- Patent Number(s):
- 6888297
- Application Number:
- 10/325997
- Assignee:
- EUV LLC (Santa Clara, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Klebanoff, Leonard E, Silfvast, William T, and Rader, Daniel J. Metod And Apparatus For Debris Mitigation For An Electrical Discharge Source. United States: N. p., 2005.
Web.
Klebanoff, Leonard E, Silfvast, William T, & Rader, Daniel J. Metod And Apparatus For Debris Mitigation For An Electrical Discharge Source. United States.
Klebanoff, Leonard E, Silfvast, William T, and Rader, Daniel J. Tue .
"Metod And Apparatus For Debris Mitigation For An Electrical Discharge Source". United States. https://www.osti.gov/servlets/purl/879899.
@article{osti_879899,
title = {Metod And Apparatus For Debris Mitigation For An Electrical Discharge Source},
author = {Klebanoff, Leonard E and Silfvast, William T and Rader, Daniel J},
abstractNote = {Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 03 00:00:00 EDT 2005},
month = {Tue May 03 00:00:00 EDT 2005}
}
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