Method and apparatus for debris mitigation for an electrical discharge source

Klebanoff, Leonard E; Rader, Daniel J; Silfvast, William T

Title: Method and apparatus for debris mitigation for an electrical discharge source

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Abstract

Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.

Inventors:

Klebanoff, Leonard E ^[1]; Rader, Daniel J ^[2]; Silfvast, William T ^[3]

San Clemente, CA
Albuquerque, NM
Helena, CA

Issue Date:: 2006-01-24

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 908608

Patent Number(s):: 6989629

Assignee:: EUV LLC (Santa Clara, CA)

Patent Classifications (CPCs):: G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES

B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

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G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
G03F7/70033 - {by plasma EUV sources

B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
B82Y10/00 - Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic

G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
G03F7/70916 - {Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps}

H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05G - X-RAY TECHNIQUE
H05G2/003 - {being produced from a liquid or gas}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2893/0063 - Plasma light sources

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 47 OTHER INSTRUMENTATION

Citation Formats


                    Klebanoff, Leonard E, Rader, Daniel J, and Silfvast, William T. Method and apparatus for debris mitigation for an electrical discharge source.  United States: N. p., 2006. 
        Web.

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                    Klebanoff, Leonard E, Rader, Daniel J, & Silfvast, William T. Method and apparatus for debris mitigation for an electrical discharge source.  United States.

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                    Klebanoff, Leonard E, Rader, Daniel J, and Silfvast, William T. Tue .  
        "Method and apparatus for debris mitigation for an electrical discharge source".  United States.  https://www.osti.gov/servlets/purl/908608.

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@article{osti_908608,

  title        = {Method and apparatus for debris mitigation for an electrical discharge source},

  author       = {Klebanoff, Leonard E and Rader, Daniel J and Silfvast, William T},

  abstractNote = {Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2006},

  month        = {1}

}

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