Fabrication of metallic microstructures by micromolding nanoparticles
Abstract
A method is provided for fabricating metallic microstructures, i.e., microcomponents of micron or submicron dimensions. A molding composition is prepared containing an optional binder and nanometer size (1 to 1000 nm in diameter) metallic particles. A mold, such as a lithographically patterned mold, preferably a LIGA or a negative photoresist mold, is filled with the molding composition and compressed. The resulting microstructures are then removed from the mold and the resulting metallic microstructures so provided are then sintered.
- Inventors:
-
- Livermore, CA
- Goleta, CA
- Danville, CA
- Henrietta, NY
- Fremont, CA
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 874844
- Patent Number(s):
- 6472459
- Assignee:
- Sandia Corporation (Livermore, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B22 - CASTING B22F - WORKING METALLIC POWDER
B - PERFORMING OPERATIONS B28 - WORKING CEMENT, CLAY, OR STONE B28B - SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG, OR MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- fabrication; metallic; microstructures; micromolding; nanoparticles; method; provided; fabricating; microcomponents; micron; submicron; dimensions; molding; composition; prepared; containing; optional; binder; nanometer; size; 1000; nm; diameter; particles; mold; lithographically; patterned; liga; negative; photoresist; filled; compressed; resulting; removed; sintered; /524/419/
Citation Formats
Morales, Alfredo M, Winter, Michael R, Domeier, Linda A, Allan, Shawn M, and Skala, Dawn M. Fabrication of metallic microstructures by micromolding nanoparticles. United States: N. p., 2002.
Web.
Morales, Alfredo M, Winter, Michael R, Domeier, Linda A, Allan, Shawn M, & Skala, Dawn M. Fabrication of metallic microstructures by micromolding nanoparticles. United States.
Morales, Alfredo M, Winter, Michael R, Domeier, Linda A, Allan, Shawn M, and Skala, Dawn M. Tue .
"Fabrication of metallic microstructures by micromolding nanoparticles". United States. https://www.osti.gov/servlets/purl/874844.
@article{osti_874844,
title = {Fabrication of metallic microstructures by micromolding nanoparticles},
author = {Morales, Alfredo M and Winter, Michael R and Domeier, Linda A and Allan, Shawn M and Skala, Dawn M},
abstractNote = {A method is provided for fabricating metallic microstructures, i.e., microcomponents of micron or submicron dimensions. A molding composition is prepared containing an optional binder and nanometer size (1 to 1000 nm in diameter) metallic particles. A mold, such as a lithographically patterned mold, preferably a LIGA or a negative photoresist mold, is filled with the molding composition and compressed. The resulting microstructures are then removed from the mold and the resulting metallic microstructures so provided are then sintered.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 2002},
month = {Tue Jan 01 00:00:00 EST 2002}
}
Works referenced in this record:
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Fabrication and testing of the planar magnetic micromotor
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LIGA: metals, plastics, and ceramics
conference, August 1999
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