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Title: Fabrication of metallic microstructures by micromolding nanoparticles

Abstract

A method is provided for fabricating metallic microstructures, i.e., microcomponents of micron or submicron dimensions. A molding composition is prepared containing an optional binder and nanometer size (1 to 1000 nm in diameter) metallic particles. A mold, such as a lithographically patterned mold, preferably a LIGA or a negative photoresist mold, is filled with the molding composition and compressed. The resulting microstructures are then removed from the mold and the resulting metallic microstructures so provided are then sintered.

Inventors:
 [1];  [2];  [3];  [4];  [5]
  1. Livermore, CA
  2. Goleta, CA
  3. Danville, CA
  4. Henrietta, NY
  5. Fremont, CA
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
874844
Patent Number(s):
6472459
Assignee:
Sandia Corporation (Livermore, CA)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B28 - WORKING CEMENT, CLAY, OR STONE B28B - SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG, OR MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
fabrication; metallic; microstructures; micromolding; nanoparticles; method; provided; fabricating; microcomponents; micron; submicron; dimensions; molding; composition; prepared; containing; optional; binder; nanometer; size; 1000; nm; diameter; particles; mold; lithographically; patterned; liga; negative; photoresist; filled; compressed; resulting; removed; sintered; /524/419/

Citation Formats

Morales, Alfredo M, Winter, Michael R, Domeier, Linda A, Allan, Shawn M, and Skala, Dawn M. Fabrication of metallic microstructures by micromolding nanoparticles. United States: N. p., 2002. Web.
Morales, Alfredo M, Winter, Michael R, Domeier, Linda A, Allan, Shawn M, & Skala, Dawn M. Fabrication of metallic microstructures by micromolding nanoparticles. United States.
Morales, Alfredo M, Winter, Michael R, Domeier, Linda A, Allan, Shawn M, and Skala, Dawn M. Tue . "Fabrication of metallic microstructures by micromolding nanoparticles". United States. https://www.osti.gov/servlets/purl/874844.
@article{osti_874844,
title = {Fabrication of metallic microstructures by micromolding nanoparticles},
author = {Morales, Alfredo M and Winter, Michael R and Domeier, Linda A and Allan, Shawn M and Skala, Dawn M},
abstractNote = {A method is provided for fabricating metallic microstructures, i.e., microcomponents of micron or submicron dimensions. A molding composition is prepared containing an optional binder and nanometer size (1 to 1000 nm in diameter) metallic particles. A mold, such as a lithographically patterned mold, preferably a LIGA or a negative photoresist mold, is filled with the molding composition and compressed. The resulting microstructures are then removed from the mold and the resulting metallic microstructures so provided are then sintered.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}

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Works referenced in this record:

LIGA process: sensor construction techniques via X-ray lithography
conference, January 1988


Fabrication and testing of the planar magnetic micromotor
journal, September 1991


LIGA: metals, plastics, and ceramics
conference, August 1999