Title: Apparatus and method for measurement of the mechanical properties and electromigration of thin films

Abstract

A method for characterizing a sample comprising the steps of depositing the sample on a substrate, measuring a first change in optical response of the sample, changing the lateral strain of the sample, measuring a second change in optical response of the sample, comparing the second change in optical response of with the first change in optical response and associating a difference between the second change and the first change in optical response with a property of interest in the sample. The measurement of the first change in optical response is made with the sample having an initial lateral strain. The measurement of the second change in optical response is made after the lateral strain in the sample is changed from the initial lateral strain to a different lateral strain. The second change in optical response is compared to the first change in optical response to find the difference between the second change and the first change.

Inventors:

Maris, Humphrey J ^[1]

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1. Barrington, RI

Issue Date:

Mon Jan 01 00:00:00 EST 2001

Research Org.:

Brown Univ., Providence, RI (United States)

OSTI Identifier:

873634

Patent Number(s):

6208418

Assignee:

Brown University Research Foundation (Providence, RI)

Patent Classifications (CPCs):

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

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G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

G01N21/1717 - {with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance}

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DOE Contract Number:  

FG02-86ER45267

Resource Type:

Patent

Country of Publication:

United States

Language:

English

Subject:

apparatus; method; measurement; mechanical; properties; electromigration; films; characterizing; sample; comprising; steps; depositing; substrate; measuring; change; optical; response; changing; lateral; strain; comparing; associating; difference; property; initial; changed; compared; optical response; mechanical properties; sample comprising; /356/