Large area, surface discharge pumped, vacuum ultraviolet light source
Abstract
Large area, surface discharge pumped, vacuum ultraviolet (VUV) light source. A contamination-free VUV light source having a 225 cm.sup.2 emission area in the 240-340 nm region of the electromagnetic spectrum with an average output power in this band of about 2 J/cm.sup.2 at a wall-plug efficiency of approximately 5% is described. Only ceramics and metal parts are employed in this surface discharge source. Because of the contamination-free, high photon energy and flux, and short pulse characteristics of the source, it is suitable for semiconductor and flat panel display material processing.
- Inventors:
-
- Santa Fe, NM
- Los Alamos, NM
- Issue Date:
- Research Org.:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- OSTI Identifier:
- 870740
- Patent Number(s):
- 5585641
- Assignee:
- Regents of University of California (Alameda, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- surface; discharge; pumped; vacuum; ultraviolet; light; source; vuv; contamination-free; 225; cm; emission; 240-340; nm; region; electromagnetic; spectrum; average; output; power; band; wall-plug; efficiency; approximately; described; ceramics; metal; employed; photon; energy; flux; pulse; characteristics; suitable; semiconductor; flat; panel; display; material; processing; material processing; photon energy; vacuum ultraviolet; ultraviolet light; light source; output power; flat panel; panel display; surface discharge; vuv light; electromagnetic spectrum; pulse characteristics; discharge source; charge pump; violet light; discharge pumped; /250/
Citation Formats
Sze, Robert C, and Quigley, Gerard P. Large area, surface discharge pumped, vacuum ultraviolet light source. United States: N. p., 1996.
Web.
Sze, Robert C, & Quigley, Gerard P. Large area, surface discharge pumped, vacuum ultraviolet light source. United States.
Sze, Robert C, and Quigley, Gerard P. Mon .
"Large area, surface discharge pumped, vacuum ultraviolet light source". United States. https://www.osti.gov/servlets/purl/870740.
@article{osti_870740,
title = {Large area, surface discharge pumped, vacuum ultraviolet light source},
author = {Sze, Robert C and Quigley, Gerard P},
abstractNote = {Large area, surface discharge pumped, vacuum ultraviolet (VUV) light source. A contamination-free VUV light source having a 225 cm.sup.2 emission area in the 240-340 nm region of the electromagnetic spectrum with an average output power in this band of about 2 J/cm.sup.2 at a wall-plug efficiency of approximately 5% is described. Only ceramics and metal parts are employed in this surface discharge source. Because of the contamination-free, high photon energy and flux, and short pulse characteristics of the source, it is suitable for semiconductor and flat panel display material processing.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 1996},
month = {Mon Jan 01 00:00:00 EST 1996}
}
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Works referenced in this record:
High-power 1 μsec ultraviolet radiation source for pumping of gas lasers
journal, August 1976
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- Soviet Journal of Quantum Electronics, Vol. 6, Issue 8
Ultraviolet spectral efficiencies of surface-spark discharges with emphasis on the iodine photodissociation laser pumpband
journal, January 1977
- Beverly, R. E.; Barnes, R. H.; Moeller, C. E.
- Applied Optics, Vol. 16, Issue 6